Leveling sensor, load port including the same, and method of leveling a load port

Patent metadata

Field	Value
Publication number	US-11022437-B2
Application number	US-202016740897-A
Country	US
Kind code	B2
Filing date	Jan 13, 2020
Priority date	Sep 27, 2018
Publication date	Jun 1, 2021
Grant date	Jun 1, 2021

Abstract

A leveling sensor, a load port including a leveling sensor, and a method of leveling a load port using a load port are disclosed. In an embodiment, a sensor includes an accelerometer configured to detect leveling and vibration of a load port and produce a plurality of data; a plurality of indicator lights configured to display a level measurement and a level direction based on the leveling of the load port; a processor configured to process the data produced by the accelerometer; and a wired connection configured to connect the processor to an external device.

First claim

What is claimed is:

1. A load port comprising:
a pod support configured to hold a semiconductor wafer transport pod;
a load port door through which the semiconductor wafer transport pod is transported; and
a load port leveling sensor, the load port leveling sensor comprising an accelerometer configured to measure the leveling of the load port, the load port leveling sensor being disposed on an exterior of the load port directly on the pod support.

2. The load port of claim 1 , wherein the load port leveling sensor further comprises a plurality of indicator lights indicating the leveling of the load port.

3. The load port of claim 1 , wherein the load port leveling sensor further comprises a speaker configured to sound a warning based on the leveling of the of the load port.

4. The load port of claim 1 , wherein the accelerometer is further configured to measure vibration of the load port.

5. The load port of claim 1 , further comprising a load port computer connected to the load port leveling sensor and configured to receive feedback data from the load port leveling sensor indicating the leveling of the load port.

6. The load port of claim 5 , wherein the load port computer is connected to the load port leveling sensor using a wired connection.

7. The load port of claim 5 , wherein the load port computer is connected to the load port leveling sensor using a wireless connection.

8. A sensor comprising:
an accelerometer configured to produce leveling and vibration data;
a processor configured to process the leveling and vibration data; and
indicator lights configured to indicate a direction of unleveling of a load port based on the leveling and vibration data.

9. The sensor of claim 8 , further comprising a wired connection configured to connect the processor to an external device.

10. The sensor of claim 9 , wherein the wired connection comprises an edge connector.

11. The sensor of claim 9 , wherein the wired connection comprises a USB port.

12. The sensor of claim 8 , further comprising an antenna configured to wirelessly connect the processor to an external device.

13. The sensor of claim 8 , further comprising a programmable button configured to set an initial position for a location of the sensor.

14. The sensor of claim 8 , wherein the indicator lights are further configured to indicate a severity of unleveling of the load port based on the leveling and vibration data.

15. A method comprising:
providing a load port having a sensor disposed thereon;
monitoring a level measurement of the load port; and
displaying the level measurement of the load port using indicator lights provided on the sensor.

16. The method of claim 15 , wherein monitoring the level measurement of the load port comprises monitoring acceleration of an accelerometer provided in the sensor.

17. The method of claim 15 , further comprising providing an auditory alarm if the level measurement is outside of a prescribed range.

18. The method of claim 15 , further comprising leveling the load port if the level measurement is outside of a prescribed range.

19. The method of claim 15 , further comprising:
monitoring a vibration measurement of the load port; and
providing a warning if the vibration measurement exceeds a threshold value.

20. The method of claim 15 , further comprising:
monitoring a vibration measurement of the load port; and
providing a warning to an external device in wireless connection with the sensor if the vibration measurement exceeds a threshold value or the level measurement is outside of a prescribed range.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wang Yi-Lin
• Wu Jung-Tang
• Lee Chin-Szu
• Chiu Hua-Sheng

Classifications

• H10P72/3412

  Batch transfer of wafers · CPC title

• H10P72/3411

  involving loading and unloading of wafers · CPC title

• H10P72/3408 Primary

  Docking arrangements · CPC title

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title