Shutter disc for a semiconductor processing tool
US-2025137114-A1 · May 1, 2025 · US
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Wang Yi-Lin patents
Wang Yi-Lin is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wang Yi-Lin |
| Total patents | 12 |
| First publication | Apr 26, 2016 |
| Latest publication | May 1, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Shutter disc for a semiconductor processing tool
US-12215414-B2 · Feb 4, 2025 · US
Method for Improving Deposition Process
US-2024387155-A1 · Nov 21, 2024 · US
Method for improving deposition process
US-12112930-B2 · Oct 8, 2024 · US
Shutter disc for a semiconductor processing tool
US-2023383397-A1 · Nov 30, 2023 · US
Shutter disc for a semiconductor processing tool
US-11827970-B2 · Nov 28, 2023 · US
Shutter disc for a semiconductor processing tool
US-2023023914-A1 · Jan 26, 2023 · US
Leveling sensor, load port including the same, and method of leveling a load port
US-11022437-B2 · Jun 1, 2021 · US
Leveling Sensor, Load Port Including the Same, and Method of Leveling a Load Port
US-2020149886-A1 · May 14, 2020 · US
Method for Improving Deposition Process
US-2020075299-A1 · Mar 5, 2020 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 11 |
| Ind Tech Res Inst | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C14/34 | 8 |
| H01J37/3447 | 5 |
| H01J37/3441 | 5 |
| B08B7/0035 | 5 |
| H01J2237/332 | 5 |