Vibration-controlled substrate handling robots, systems, and methods

Patent metadata

Field	Value
Publication number	US-9296105-B2
Application number	US-201314085462-A
Country	US
Kind code	B2
Filing date	Nov 20, 2013
Priority date	Nov 30, 2012
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate, and operating the robot to reduce vibration of the end effector supporting the substrate. In some embodiments, a filter is provided in the motor drive circuit to filter one or more frequencies causing unwanted vibration of the end effector. Vibration control systems and methods of operating the same are provided, as are other aspects.

First claim

The invention claimed is:

1. A vibration-controlled robot apparatus, comprising:
a robot having a housing coupleable to a structure, and an end effector operable to transport a substrate;
a permanent sensor coupled to the housing of the robot or the structure supporting the housing, the permanent sensor operable to sense vibration as the robot transports the substrate; and
a vibration controller including:
a model generated from input from the permanent sensor and a temporary sensor coupled to the end effector or the substrate, the model adapted to estimate vibration at the substrate based on vibration sensed by the permanent sensor, and
a drive circuit for a drive motor of the robot, the drive circuit operable for reducing vibration of the robot by filtering drive signals through a filter to the drive motor based upon data measured by the permanent sensor.

2. The vibration-controlled robot apparatus of claim 1 wherein the permanent sensor is a micro-electromechanical system (MEMS) accelerometer.

3. The vibration-controlled robot apparatus of claim 2 wherein the MEMS accelerometer is mounted to the robot via at least one of a magnet, an adhesive, and a mounting stud.

4. The vibration-controlled robot apparatus of claim 1 comprising the filter operable to the filter certain input frequencies to the robot, the filter including coefficients set based on input from the permanent sensor.

5. The vibration-controlled robot apparatus of claim 4 wherein the filter comprises a bi-quad notch filter that is operational to reduce vibration by preventing vibration at a pre-set frequency from being communicated to the substrate.

6. The vibration-controlled robot apparatus of claim 4 wherein the total permissible vibration is less than 0.1 g of acceleration.

7. The vibration-controlled robot apparatus of claim 1 further comprising a vibration controller operable to receive a first signal from the permanent sensor indicative of the vibration.

8. The vibration-controlled robot apparatus of claim 7 wherein the vibration controller comprises logic to correlate sensed vibration with particular motions of the robot.

9. The vibration-controlled robot apparatus of claim 8 wherein the logic compares the first signal to a database to determine expected vibration.

10. The vibration-controlled robot apparatus of claim 9 wherein the logic compares the first signal to a database to determine whether the acceleration of an end effector of the robot is undesirable.

11. A robot vibration reduction method, comprising:
supporting a substrate with an end effector of a robot;
providing a permanent sensor coupled to a housing of the robot or a structure supporting the housing;
providing a temporary sensor coupled to the end effector or substrate;
detecting a vibration with the permanent sensor and the temporary sensor as the robot being driven by a drive motor transports the substrate;
generating a vibration model based on vibration detected by the permanent sensor and the temporary sensor to predict vibration of the substrate for any motion or system input;
removing the temporary sensor;
determining one or more conditions under which an undesirable amount of vibration occurs; and
minimizing at least some of the vibration of the end effector of the robot by filtering drive signals to the drive motor at the one or more conditions as measured by the permanent sensor.

12. The method of claim 11 , wherein minimizing at least some of the vibration of the robot comprises:
applying a filter to a motor drive circuit to cut out one or more frequency at which the undesirable amount of vibration occurs.

13. The method of claim 12 wherein the filter is a bi-quad notch filter.

14. The method of claim 11 , wherein minimizing at least some of the vibration of the robot comprises:
preventing the robot from operating at the frequency at which the undesirable amount of vibration occurs.

15. The method of claim 11 wherein determining a frequency at which an undesirable amount of vibration occurs comprises:
artificially inducing external vibration with a vibrating mass.

16. A vibration-controlled substrate transport system, comprising:
a chamber;
a robot received in the chamber, the robot having a housing and an end effector operable to transport a substrate;
a permanent sensor coupled to the housing of the robot or a structure supporting the housing, the permanent sensor operable to detect vibration of the robot as the robot supports the substrate; and
a vibration controller including:
a vibration model based on vibration detected by the permanent sensor and temporary sensor coupled to the end effector or the substrate, the model adapted to predict vibration of the substrate of the end effector for any motion or system input, and
a drive circuit for a drive motor, the drive circuit having a filter operable to reduce vibration of the end effector based on the vibration detected by the permanent sensor.

17. The system of claim 16 wherein the sensor is a micro-electromechanical system (MEMS) accelerometer.

18. The system of claims 16 wherein the filter is a bi-quad notch filter.

19. The system of claim 18 wherein the bi-quad notch filter reduces vibration at the end effector by preventing vibration at a pre-set frequency from being communicated to the end effector.

Assignees

• Applied Materials Inc
• Applied Materials Inc

Inventors

• Merry Nir
• Minkovich Alex
• Hudgens Jeffrey C
• Till Brendan

Classifications

• B25J9/1653 Primary

  parameters identification, estimation, stiffness, accuracy, error analysis · CPC title

• H10P72/30

  for conveying, e.g. between different workstations · CPC title

• B65G49/06

  for fragile sheets, e.g. glass · CPC title

• B25J19/02

  Sensing devices · CPC title