Substrate processing apparatus and apparatus for manufacturing integrated circuit device

Patent metadata

Field	Value
Publication number	US-10985036-B2
Application number	US-201715827144-A
Country	US
Kind code	B2
Filing date	Nov 30, 2017
Priority date	Jun 8, 2017
Publication date	Apr 20, 2021
Grant date	Apr 20, 2021

Abstract

A substrate processing apparatus includes a vessel providing a processing space for processing a substrate, a substrate support supporting the substrate loaded in the processing space, and a barrier between a side wall of the vessel and the substrate support and surrounding an edge of the substrate supported by the substrate support.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a vessel comprising a processing space for processing a substrate, and an upper vessel and a lower vessel detachably coupled to each other,
wherein a first inner surface of the upper vessel and a second inner surface of the lower vessel are configured to define the processing space, and wherein the vessel further comprises:
a first supply port in the upper vessel configured to supply a first supercritical fluid into the vessel; and
an exhaust port in the lower vessel configured to discharge a fluid from inside the vessel;
a substrate support configured to support the substrate loaded in the processing space; and
a barrier, between a side wall of the vessel and the substrate support, configured to surround the substrate support,
wherein an upper end of the barrier is directly connected to the first inner surface of the upper vessel and is closed by the first inner surface of the upper vessel, a side wall of the barrier surrounds the substrate and the substrate support, and a lower end of the barrier is open, and
wherein the barrier extends downward from the upper vessel to a point lower than the substrate supported by the substrate support and is configured to:
block the first supercritical fluid supplied from the first supply port from flowing directly to a contact portion between the upper vessel and the lower vessel to the point lower than the substrate supported by the substrate support, and cause the first supercritical fluid to flow downwardly toward a bottom portion of the second inner surface of the lower vessel; and
guide fluid flowing from the contact portion between the upper vessel and the lower vessel downward to the point lower than the substrate supported by the substrate support and cause the guided fluid to flow downwardly toward the bottom portion of the second inner surface of the lower vessel.

2. The substrate processing apparatus of claim 1 , further comprising:
a first guide pin connected to a side wall of the lower vessel,
wherein the first guide pin is configured to guide the barrier to be positioned in at a predetermined position in the processing space such that the first guide pin is in contact with the barrier without fixation thereto.

3. The substrate processing apparatus of claim 1 ,
wherein the barrier has a ring shape and extends in a direction of an edge of the substrate supported by the substrate support.

4. The substrate processing apparatus of claim 1 , wherein the upper vessel and the lower vessel detachably coupled to each other are openable and closable to switch between a closed position for sealing the processing space and an open position for opening the processing space.

5. The substrate processing apparatus of claim 4 ,
wherein the contact portion between the upper vessel and the lower vessel is where the upper vessel and the lower vessel contact each other in the closed position, and the substrate processing apparatus further comprises a first protective layer on the contact portion,
wherein the first protective layer is disposed between a bottom surface of the upper vessel and a top surface of the lower vessel in the closed position,
wherein the top surface of the lower vessel is flat,
wherein the first protective layer contacts a portion of the bottom surface of the upper vessel and a portion of the top surface of the lower vessel in the closed position, and
wherein the portion of the bottom surface of the upper vessel and the portion of the top surface of the lower vessel constitute the contact portion.

6. The substrate processing apparatus of claim 4 , wherein the vessel comprises a lifting rod coupled to the upper vessel and the lower vessel to guide at least one of the upper vessel and the lower vessel between the closed position and the open position, and the substrate processing apparatus further comprises a second protective layer on the lifting rod.

7. The substrate processing apparatus of claim 4 , wherein the vessel further comprises:
a second supply port in the lower vessel to supply a second supercritical fluid into the vessel.

8. The substrate processing apparatus of claim 1 , wherein a lower portion of the barrier is shaped so as to be bent inward away from the side wall of the vessel.

9. The substrate processing apparatus of claim 1 , wherein the substrate support and the barrier are fixed to the bottom surface of the upper vessel.

10. A substrate processing apparatus comprising:
at least one vessel comprising a processing space configured to process a substrate, wherein the at least one vessel comprises an upper vessel and a lower vessel moveably coupled to each other so as to be openable and closable to switch between a closed position for sealing the processing space and an open position for opening the processing space;
a substrate support configured to support the substrate loaded in the processing space, wherein the substrate support is coupled to an upper wall of the at least one vessel;
a barrier between a side wall of the at least one vessel and the substrate support, wherein an upper end of the barrier is directly connected to the upper wall defining the processing space of the at least one vessel, a side wall of the barrier surrounds the substrate and the substrate support, and a lower end of the barrier is open; and
a first supply port in the upper wall of the at least one vessel and configured to supply a first supercritical fluid into the processing space; and
an exhaust port in a bottom wall of the at least one vessel opposite the upper wall and configured to discharge a fluid from inside the at least one vessel,
wherein the barrier extends downward along a direction of the side wall of the at least one vessel toward the bottom wall,
wherein a lowest portion of the barrier extends from the upper wall past a lowest portion of the substrate support when the vessel is in the closed position, and
wherein the barrier is configured to:
block the first supercritical fluid supplied from the first supply port from flowing directly to a contact portion between the upper vessel and the lower vessel to a point lower than the lowest portion of the barrier, and cause the first supercritical fluid to flow downwardly toward the bottom wall of the at least one vessel; and
guide fluid flowing from the contact portion between the upper vessel and the lower vessel downward to the point lower than the lowest portion of the barrier and cause the guided fluid to flow downwardly toward the bottom wall of the at least one vessel.

11. The substrate processing apparatus of claim 10 , wherein the at least one vessel comprises:
a lifting rod connecting the upper vessel to the lower vessel, the lifting rod configured to guide movement of the lower vessel; and
a lifting cylinder coupled to the lower vessel, the lifting cylinder configured to move the lower vessel, and
wherein the substrate processing apparatus further comprises a driving device comprising a hydraulic pump configured to generate hydraulic pressure and a transmission line connecting the hydraulic pump to the lifting cylinder.

12. The substrate processing apparatus of claim 11 , wherein the at least one vessel comprises a plurality of vessels arranged in parallel, and wherein the hydraulic pump is connected to each of the plurality of vessels through the transmission line.

13. The substrate processing apparatus of claim 11 , wherein the at least one vessel comprises a plurality of vessels stacked together, and wherein the hydraulic pump is connected to each of the plurality of vessels through the transmission line.

14. The s

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Young-Hoo
• Park Sang-Jine
• Cho Yong-Jhin
• Gil Yeon-Jin
• Jeong Ji-Hoon
• Cho Byung-Kwon
• Ko Yong-Sun
• Lee Kun-Tack

Classifications

• H10P70/80

  Cleaning only by supercritical fluids · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0408 Primary

  for drying · CPC title