Semiconductor devices having a plurality of unit cell transistors that have smoothed turn-on behavior and improved linearity

Patent metadata

Field	Value
Publication number	US-10978583-B2
Application number	US-201816194760-A
Country	US
Kind code	B2
Filing date	Nov 19, 2018
Priority date	Jun 21, 2017
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

A semiconductor device includes a plurality of unit cell transistors on a common semiconductor structure, the unit cell transistors electrically connected in parallel, and each unit cell transistor including a respective gate finger. Respective threshold voltages of first and second of the unit cell transistors differ by at least 0.1 volts and/or threshold voltages of first and second segments of a third of the unit cell transistors differ by at least 0.1 volts.

First claim

What is claimed is:

1. A radio frequency (“RF”) power amplifier, comprising:
a plurality of unit cell transistors on a common wide bandgap semiconductor structure, the unit cell transistors electrically connected in parallel, and each unit cell transistor including a respective gate finger,
wherein the unit cell transistors are configured so that different unit cell transistors or different portions of the same unit cell transistor have different threshold voltages so that they will exhibit different levels of current flow during turn-on in response to a simultaneous application of the same voltage signals to the unit cell transistors and so that a third order transconductance response of the RF power amplifier includes at least three peaks.

2. The RF power amplifier of claim 1 , wherein the unit cell transistors are configured so that the third order transconductance response of the RF power amplifier includes at least two positive peaks and at least one negative peak.

3. The RF power amplifier of claim 1 , wherein the unit cell transistors are configured so that the third order transconductance response of the RF power amplifier includes at least one positive peak and at least two negative peaks.

4. The RF power amplifier of claim 1 , wherein a first portion of the RF power amplifier has a first threshold voltage and a second portion of the RF power amplifier has a second threshold voltage, the first and second threshold voltages differing by at least 0.25 volts.

5. The RF power amplifier of claim 4 , wherein the first portion comprises a first percentage of a gate periphery of the RF power amplifier and the second portion comprises a second percentage of the gate periphery of the RF power amplifier, and wherein the second percentage exceeds the first percentage by at least five percentage points.

6. The RF power amplifier of claim 1 , wherein the unit cell transistors comprise gallium nitride based high electron mobility transistors.

7. The RF power amplifier of claim 6 , wherein, in a first portion of the RF power amplifier, at least portions of the unit cell transistors are configured to have a first threshold voltage and, in a second portion of the RF power amplifier, at least portions of the unit cell transistors are configured to have a second threshold voltage that differs from the first threshold voltage by 0.1 to 0.8 volts.

8. The RF power amplifier of claim 1 , wherein the unit cell transistors define a gate periphery, and wherein 35%-45% of the gate periphery corresponds to transistors that have layer thicknesses, doping levels or materials that result in a first threshold voltage, and 55%-65% of the gate periphery corresponds to transistors that have layer thicknesses, doping levels or materials that result in a second threshold voltage that differs from the first threshold voltage by 0.1 to 0.8 volts.

9. A radio frequency (“RF”) power amplifier, comprising:
a plurality of unit cell transistors on a common wide bandgap semiconductor structure, the unit cell transistors electrically connected in parallel, and each unit cell transistor including a respective gate finger,
wherein the unit cell transistors are configured so that different unit cell transistors or different portions of the same unit cell transistor will exhibit different levels of current flow during turn-on in response to a simultaneous application of the same voltage signals to the unit cell transistors and so that a third order transconductance response of the RF power amplifier includes at least three peaks,
wherein the unit cell transistors are configured so that the third order transconductance response of the RF power amplifier includes at least first and second positive peaks and at least first and second negative peaks,
wherein the at least first and second positive peaks and the at least first and second negative peaks are all at gate-to-source voltage values that are within two volts of a turn-on gate-to-source voltage of the RF power amplifier,
wherein the second positive peak occurs at a higher gate-to-source voltage level than the first positive peak, and the second positive peak has a higher third order transconductance value than the first positive peak.

10. The RF power amplifier of claim 9 , wherein the second negative peak occurs at a higher gate-to-source voltage level than the first negative peak, and the second negative peak has a lower third order transconductance value than the first negative peak.

11. A radio frequency (“RF”) power amplifier; comprising:
a plurality of unit cell transistors on a common semiconductor structure, the unit cell transistors electrically connected in parallel, and each unit cell transistor including a respective gate finger,
wherein a gate periphery of the RF power amplifier includes a first portion and a second portion, and the first portion has a first threshold voltage and the second portion has a second threshold voltage that differs from the first threshold voltage by 0.1 to 0.8 volts, and
wherein the first portion comprises a first percentage of the gate periphery and the second portion comprises a second percentage of the gate periphery that exceeds the first percentage by at least five (5) percentage points.

12. The RF power amplifier of claim 11 , wherein the first and second threshold voltages differ by at least 0.25 volts, and wherein the unit cell transistors comprise gallium nitride based high electron mobility transistors.

13. The RF power amplifier of claim 12 , wherein the first percentage comprises no more than 45% of the gate periphery and the second percentage comprises at least 55% of the gate periphery.

14. The RF power amplifier of claim 11 , wherein the first percentage comprises between 35%-45% of the gate periphery and the second percentage comprises 55%-65% of the gate periphery.

15. A radio frequency (“RF”) power amplifier, comprising:
a plurality of unit cell gallium nitride based high electron mobility transistors on a common semiconductor structure, the unit cell gallium nitride based high electron mobility transistors electrically connected in parallel,
wherein the unit cell gallium nitride based high electron mobility transistors are configured so that the RF power amplifier exhibits gain compression of less than 0.5 dB for RF signals having input power levels of between 20 dB and 11 dB back-off from a saturation power and gain compression of less than 1.0 dB for RF signals having input power levels of between 11 dB and 6 dB back-off from the saturation power, when the RF power amplifier is operated at a drain to source current level of greater than 50 mA/mm for the RF signals,
wherein a first portion of a gate periphery of the RF power amplifier has a first threshold voltage and a second portion of the gate periphery of the RF power amplifier has a second threshold voltage, the first and second threshold voltages differing by 0.1 to 0.8 volts.

16. The RF power amplifier of claim 15 , wherein the first portion comprises a first percentage of the gate periphery and the second portion comprises a second percentage of the gate periphery, wherein the second percentage exceeds the first percentage by at least five percentage points.

17. The RF power amplifier of claim 16 , wherein the first percentage comprises no more than 45% of the gate periphery and the second percentage comprises at least 55% of the gate periphery.

18. The RF power amplifier of claim 15 , wherein the first threshold voltage is less than the second threshold voltage.

19. The RF power amplifier of claim 18 , where

Assignees

• Cree Inc

Inventors

• Liu Yueying
• Sriram Saptharishi
• Sheppard Scott
• Gao Jennifer

Classifications

• H10D62/8503

  Nitride Group III-V materials, e.g. AlN or GaN · CPC title

• H10D84/82 Primary

  of only field-effect components · CPC title

• H10D64/411

  for FETs · CPC title

• H10D62/127

  of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs · CPC title

• H10D30/475

  having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs · CPC title