Method for etching organic region

Patent metadata

Field	Value
Publication number	US-10903085-B2
Application number	US-201916390326-A
Country	US
Kind code	B2
Filing date	Apr 22, 2019
Priority date	Apr 23, 2018
Publication date	Jan 26, 2021
Grant date	Jan 26, 2021

Abstract

There is provided a method for etching an organic region of a substrate. In the method, an organic film is formed on a surface in a chamber of a plasma processing apparatus. The surface extends out around a region where the substrate is to be disposed in the chamber of the plasma processing apparatus, and the organic region is etched by chemical species from plasma in the chamber.

First claim

The invention claimed is:

1. A method for etching an organic region of a substrate, comprising:
forming an organic film on a surface in a chamber of a plasma processing apparatus, the surface extending out around a region where the substrate is to be disposed in the chamber of the plasma processing apparatus; and
etching the organic region with chemical species from plasma in the chamber,
wherein in said forming the organic film, a first gas containing a first organic compound and a second gas containing a second organic compound are supplied into the chamber, and
the organic film is formed by polymerization of the first organic compound and the second organic compound.

2. The method of claim 1 , wherein a heater is provided in each of one or more components that define the surface in the plasma processing apparatus, and
in said forming the organic film, the components are heated such that the polymerization occurs selectively on the surface.

3. The method of claim 2 , wherein a sequence including said forming the organic film and said etching the organic region repeated, and
the method further comprises, between said etching the organic region and said forming the organic film, removing the organic film by plasma cleaning.

4. The method of claim 2 , wherein a sequence including said forming the organic film and said etching the organic region is repeated, and
the method further comprises, between said etching the organic region and said forming the organic film, removing the organic film by depolymerization of the organic film.

5. The method of claim 4 , wherein the first organic compound is isocyanate and the second organic compound is amine or a compound having a hydroxyl group.

6. The method of claim 1 , wherein a sequence including said forming the organic film and said etching the organic region is repeated, and
the method further comprises, between said etching the organic region and said forming the organic film, removing the organic film by plasma cleaning.

7. The method of claim 1 , wherein a sequence including said forming the organic film and said etching the organic region is repeated, and
the method further comprises, between said etching the organic region and said forming the organic film, removing the organic film by depolymerization of the organic film.

8. The method of claim 7 , wherein the first organic compound is isocyanate and the second organic compound is amine or a compound having a hydroxyl group.

9. The method of claim 1 , wherein
the chamber has an inner space which includes a first space and a second space, with the first space and the second space being divided by a partition wall, and
in said forming the organic film, the organic film is formed on a surface which defines the first space.

10. The method of claim 1 ,
wherein the chamber includes a chamber body, with the chamber body having an inner space which includes a first space and a second space and with the first space and the second space being divided by a partition wall,
the plasma processing apparatus includes an upper electrode and a member, with the upper electrode blocking an upper opening of the chamber body in cooperation with the member, and
in said forming the organic film, the organic film is formed on a surface of the partition wall, a surface of the upper electrode and a surface of the member.

11. The method of claim 10 ,
wherein the partition wall includes an opening through which the substrate is transferred between the first space and an outside of the chamber and a shutter which opens and closes the opening of the partition wall, and
the forming of organic film is performed while the shutter opens the opening of the partition wall.

12. The method of claim 1 , wherein, in said forming the organic film, the surface extending out around the region where the substrate is to be disposed is heated to a temperature within a first temperature range and the region where the substrate is to be disposed is set to a temperature within a second temperature range or a third temperature range, and
wherein the second temperature range is lower than a lower limit of the first temperature range and the third temperature range is higher than an upper limit of the first temperature range.

13. The method of claim 12 , wherein the first temperature range is from 0° C. to 150° C. and the third temperature range is from 250° C. to 400° C.

14. The method of claim 1 , wherein the first organic compound is isocyanate or carboxylic acid and the second organic compound is amine or a compound having a hydroxyl group.

15. The method of claim 1 ,
wherein said forming the organic film is performed while the substrate is not disposed in the chamber, and
the method further comprises, between said forming the organic film and said etching the organic region, loading the substrate into the chamber.

16. The method of claim 1 , wherein the first gas and the second gas are supplied into the chamber simultaneously.

17. The method of claim 1 , wherein the first gas and the second gas are suppliedinto the chamber alternately.

18. The method of claim 17 , wherein the chamber is purged after the supply of the first gas and before the supply of the second gas or after the supply of the second gas and before the supply of the first gas.

19. The method of claim 1 , wherein, in said etching the organic region, the plasma is generated from an oxygen-containing gas or a gaseous mixture of a hydrogen gas and a nitrogen gas.

Assignees

• Tokyo Electron Ltd

Inventors

• Asako Ryuichi
• Tabata Masahiro
• Funakubo Takao

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P50/242 Primary

  of Group IV materials · CPC title