Electrostatic chucking force measurement tool for process chamber carriers

Patent metadata

Field	Value
Publication number	US-10879094-B2
Application number	US-201615360412-A
Country	US
Kind code	B2
Filing date	Nov 23, 2016
Priority date	Nov 23, 2016
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

An electrostatic chucking force tool is described that may be used on workpiece carriers for micromechanical and semiconductor processing. One example includes a workpiece fitting to hold a workpiece when gripped by an electrostatic chucking force by an electrostatic chuck, an arm coupled to the workpiece fitting to pull the workpiece through the workpiece fitting laterally across the chuck, and a force gauge coupled to the arm to measure an amount of force with which the workpiece fitting is pulled by the arm in order to move the workpiece.

First claim

The invention claimed is:

1. An electrostatic chucking force measurement tool comprising:
a workpiece fitting to hold a workpiece when gripped by an electrostatic chucking force by an electrostatic chuck, the workpiece fitting above the electrostatic chuck in a vertical direction orthogonal to a horizontal direction;
an arm coupled to the workpiece fitting to pull the workpiece through the workpiece fitting laterally across the electrostatic chuck along the horizontal direction by moving the workpiece while the electrostatic chuck is stationary; and
a force gauge coupled to the arm to measure an amount of force with which the workpiece fitting is pulled by the arm in order to move the workpiece.

2. The tool of claim 1 , further comprising a chuck holder to hold the chuck in place, the chuck holder being further coupled to the arm.

3. The tool of claim 2 , wherein the chuck holder is a vacuum chuck fastened to a supporting tray.

4. The tool of claim 3 , wherein the supporting tray comprises a wet bath to submerge the chuck and the workpiece in a chemical to measure an amount of force when the chuck and the workpiece are submerged.

5. The tool of claim 2 , wherein the chuck holder comprises a vacuum chuck having a plurality of vacuum holes to apply a suction to the chuck to hold the chuck against lateral movement.

6. The tool of claim 5 , wherein the vacuum chuck comprises a top face to contact the chuck, the top face having a plurality of vacuum bands to contact the chuck and a plurality of non-vacuum bands to break a vacuum in the vacuum bands.

7. The tool of claim 6 , wherein the vacuum bands have concentric edges defined by slits through the vacuum chuck from a top surface to a bottom surface.

8. The tool of claim 1 , wherein the workpiece fitting comprises a suction cup coupled to a vacuum pump to apply a suction to hold the workpiece.

9. The tool of claim 1 , wherein the arm is attached to the workpiece fitting at one end and to the force gauge at another end.

10. The tool of claim 9 , further comprising a support bracket coupled to the chuck holder and wherein the force gauge is mounted to the support bracket so that the force gauge measures relative movement between the arm and the support bracket.

11. The tool of claim 10 , wherein the support bracket is coupled to the chuck through a supporting tray which comprises a wet bath to allow the chuck to be submerged.

12. A method comprising:
gripping a workpiece by an electrostatic chuck using an electrostatic chucking force;
holding the workpiece with a workpiece fitting, the workpiece fitting above the electrostatic chuck in a vertical direction orthogonal to a horizontal direction;
pulling the workpiece laterally across the electrostatic chuck along the horizontal direction using an arm coupled to the workpiece fitting by moving the workpiece while the electrostatic chuck is stationary; and
measuring an amount of force with which the workpiece fitting is pulled in order to move the workpiece using a force gauge coupled to the arm.

13. The method of claim 12 , further comprising holding the chuck in place using a chuck holder that is coupled to the arm.

14. The method of claim 13 , wherein holding the chuck comprises applying a vacuum through a vacuum chuck to hold the chuck to the vacuum chuck.

15. The method of claim 13 , further comprising submerging the chuck and the workpiece in a wet bath of a chemical and wherein measuring comprises measuring an amount of force when the chuck and the workpiece are submerged.

16. The method of claim 13 , further comprising recording the amount of force and the time of day in a test controller.

17. An electrostatic workpiece carrier test tool comprising:
a supporting tray;
a vacuum chuck mounted to the supporting tray configured to hold an electrostatic workpiece carrier in place with respect to the tray;
a workpiece fitting configured to hold a workpiece when gripped by an electrostatic chucking force by the electrostatic workpiece carrier, the workpiece fitting above the electrostatic workpiece carrier in a vertical direction orthogonal to a horizontal direction;
an arm coupled to the workpiece fitting to pull the workpiece through the workpiece fitting laterally across the electrostatic workpiece carrier along the horizontal direction by moving the workpiece while the electrostatic workpiece carrier is stationary; and
a force gauge coupled to the workpiece fitting and to the tray to measure an amount of force with which the workpiece fitting is pulled in order to move the workpiece with respect to the tray.

18. The tool of claim 17 , wherein the supporting tray comprises a wet bath to submerge the chuck and the workpiece in a chemical to measure an amount of force when the chuck and the workpiece are submerged.

19. The tool of claim 17 , wherein the arm is attached to the workpiece fitting at one end and to the force gauge at another end, the tool further comprising a support bracket mounted to the tray and coupled to the vacuum chuck and wherein the force gauge is mounted to the support bracket so that the force gauge measures relative movement between the arm and the support bracket.

Assignees

• Applied Materials Inc

Inventors

• Nemani Srinivas D
• Pisharody Gautam
• Ramaswami Seshadri
• Roy Shambhu N
• Kumar Niranjan

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H10P72/0616 Primary

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title