Fault detection using showerhead voltage variation

Patent metadata

Field	Value
Publication number	US-10879092-B2
Application number	US-201816057705-A
Country	US
Kind code	B2
Filing date	Aug 7, 2018
Priority date	Mar 31, 2015
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

A plasma processing system having a plurality of stations is provided. Each station has a substrate support and a showerhead for supplying process gases. A radio frequency (RF) power supply and a distribution system is provided, where the distribution system is coupled to the RF power supply. A plurality of voltage probes is provided. Each of the plurality of voltage probes is connected in-line between the distribution system and each showerhead of each of the stations. A controller is configured to receive sensed voltage values from each of the plurality of voltage probes and compare the sensed voltage values against a plurality of voltage check bands. Each voltage check band is predefined for a process operation, and the controller is configured to generate an alert when the comparing detects that a sensed voltage value is outside of a voltage check band. The alert is configured to identify a type of fault based on the voltage check band and identify a specific one of the plurality of stations having said type of fault.

First claim

What is claimed is:

1. A plasma processing system, comprising,
a pedestal for supporting a substrate;
a showerhead for supplying process gases into the plasma processing system and over the substrate;
a radio frequency (RF) power supply for providing RF power to the showerhead of the plasma processing system;
a voltage probe connected in-line between the RF power supply and the showerhead, the voltage probe configured to sense voltage values during running of a process operation to deposit a material over the substrate in the plasma processing system; and
a controller configured to receive the sensed voltage values and compare the sensed voltage values against a voltage check band that is predefined for the process operation being run and based on baseline station voltages, and said controller is configured to generate an alert when the comparing detects that the sensed voltage values are outside of the voltage check band, the alert is configured to identify a type of fault based on the voltage check band that was predefined for the process operation.

2. The plasma processing system of claim 1 , wherein the controller is configured to perform a calibration operation for the plasma processing system, the calibration operation producing information for defining the voltage check band for the process operation and the controller saves the information to a database for access during said comparing.

3. The plasma processing system of claim 2 , wherein the calibration operation produces information for a plurality of voltage check bands associated with a plurality of process operations, wherein each one of the plurality of voltage check bands correspond to specific ones of the types of faults.

4. The plasma processing system of claim 1 , wherein the type of faults include wafer misplacement, or precursor delivery failure, or valve operation failure, or an electrical short condition, or an electrical open condition.

5. The plasma processing system of claim 1 , wherein the plasma processing system includes multiple stations and each station includes one of the voltage probes to sense voltage from showerheads of respective ones of the multiple stations.

6. The plasma processing system of claim 5 , wherein the generated alert identifies a condition and a station in which the alert was generated.

7. The plasma processing system of claim 1 , wherein the plasma processing system includes multiple stations, further comprising,
a distribution system disposed between the RF power supply and shower heads of each of the multiple stations, the distribution system is configured for providing said RF power to each of the multiple stations, and the voltage probe in the system with multiple stations includes individual voltage probes that are connected in-line between respective showerheads and the distribution system.

8. The plasma processing system of claim 7 , wherein the alert is configured to identify a specific one of the multiple stations and identify a type of fault, the type of fault being one of a wafer misplacement, or precursor delivery failure, or valve operation failure, or an electrical short condition, or an electrical open condition.

9. The plasma processing system of claim 1 ,
wherein the plasma processing system includes multiple stations;
wherein the controller is configured to interface with a display for rendering a graphical representation of one or more voltage check bands that illustrate voltage values over a period of time for each station of the multiple stations, the graphical representation of the voltage check bands is configured to graphically display which of the multiple stations is associated with the fault or faults.

10. A system, comprising,
a plurality of stations, each station having a substrate support and a showerhead for supplying process gases;
a radio frequency (RF) power supply;
a distribution system coupled to the RF power supply;
a plurality of voltage probes, each of the plurality of voltage probes connected in-line between the distribution system and each showerhead of each of the stations;
a controller configured to receive sensed voltage values from each of the plurality of voltage probes and compare the sensed voltage values against a plurality of voltage check bands, each voltage check band is predefined for a process operation and based on baseline station voltages, the controller is configured to generate an alert when the comparing detects that a sensed voltage value is outside of a voltage check band, the alert is configured to identify a type of fault based on the voltage check band and identify a specific one of the plurality of stations having said type of fault.

11. The system of claim 10 , wherein the controller is configured to perform a calibration operation for the system, the calibration operation producing information for defining the voltage check bands for the process operations and the controller saves the information to a database for access during said comparing.

12. The system of claim 10 , wherein the controller is configured to perform a calibration operation of the system that produces information for each of the plurality of voltage check bands associated with respective process operations, wherein each one of the plurality of voltage check bands correspond to specific ones of the types of faults.

13. The system of claim 10 , wherein the distribution system disposed is configured to distribute said RF power to each of the showerheads of the plurality of stations.

14. The system of claim 13 , wherein the plurality of stations is four, where each station is arranged in a two-by-two grid.

15. The system of claim 13 , wherein the type of fault is one of a wafer misplacement, or precursor delivery failure, or valve operation failure, or an electrical short condition, or an electrical open condition.

16. The system of claim 10 ,
wherein the controller is configured to interface with a display for rendering a graphical representation of one or more voltage check bands that illustrate voltage values over a period of time for each station of the plurality of stations, the graphical representation of the voltage check bands is configured to graphically display which station of the system is associated with the fault.

17. The system of claim 10 , wherein the RF power supply is defined by a low frequency RF generator and a high frequency RF generator, the high frequency and the low frequency RF generators being coupled to a match network that provides said RF power to the distribution system and to each showerhead of each of the plurality of stations.

Assignees

• Lam Res Corp

Inventors

• Kapoor Sunil
• Rangineni Yaswanth
• Bingham Aaron
• Nguyen Tuan

Classifications

• H10P50/242

  of Group IV materials · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P74/27 Primary

  Structural arrangements therefor · CPC title

• H01J37/32082 Primary

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title