Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-12586757-B2 · Mar 24, 2026 · US
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Bingham Aaron patents
Bingham Aaron is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bingham Aaron |
| Total patents | 18 |
| First publication | Feb 24, 2015 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Temperature control of a multi-zone pedestal
US-2025171902-A1 · May 29, 2025 · US
Temperature control of a multi-zone pedestal
US-12209312-B2 · Jan 28, 2025 · US
Modular recipe controlled calibration (mrcc) apparatus used to balance plasma in multiple station system
US-2023245853-A1 · Aug 3, 2023 · US
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-11594397-B2 · Feb 28, 2023 · US
Temperature control of a multi-zone pedestal
US-2022243332-A1 · Aug 4, 2022 · US
Multi zone substrate support for ALD film property correction and tunability
US-11236422-B2 · Feb 1, 2022 · US
Modular recipe controlled calibration (mrcc) apparatus used to balance plasma in multiple station system
US-2021202208-A1 · Jul 1, 2021 · US
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-10991550-B2 · Apr 27, 2021 · US
Fault detection using showerhead voltage variation
US-10879092-B2 · Dec 29, 2020 · US
Recent patents
Latest publications not already listed above.
Methods for controlling plasma glow discharge in a plasma chamber
US-10777386-B2 · Sep 15, 2020 · US
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
US-2020075289-A1 · Mar 5, 2020 · US
Multi zone pedestal for ald film property correction and tunability
US-2019153600-A1 · May 23, 2019 · US
Methods and Systems for Controlling Plasma Glow Discharge in a Plasma Chamber
US-2019115190-A1 · Apr 18, 2019 · US
Fault Detection Using Showerhead Voltage Variation
US-2018350643-A1 · Dec 6, 2018 · US
Fault detection using showerhead voltage variation
US-10043690-B2 · Aug 7, 2018 · US
Fault Detection Using Showerhead Voltage Variation
US-2016293385-A1 · Oct 6, 2016 · US
Methods and apparatus for plasma-based deposition
US-8962101-B2 · Feb 24, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 17 |
| Novellus Systems Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32091 | 13 |
| H10P14/6336 | 10 |
| H10P72/7624 | 8 |
| H01J37/321 | 6 |
| H01J37/32183 | 6 |