Probe pin alignment apparatus

Patent metadata

Field	Value
Publication number	US-10845386-B2
Application number	US-201916598537-A
Country	US
Kind code	B2
Filing date	Oct 10, 2019
Priority date	Oct 31, 2018
Publication date	Nov 24, 2020
Grant date	Nov 24, 2020

Abstract

A probe pin alignment apparatus includes a beam-splitting element, an image-sensing device and a light-reflecting element. The beam-splitting element has a first illuminating surface facing a probe element, a second illuminating surface facing an object, and a light incident surface. The beam-splitting element has a semi-reflective surface for reflecting a light beam from the light incident surface to the probe element. The image-sensing device is disposed externally to the light incident surface of the beam-splitting element. The light-reflecting element, disposed oppositely to the light incident surface, allows a light beam to pass through the semi-reflective surface to be reflected back to the semi-reflective surface to be further projected onto the object. The beam-splitting element outputs a probe image and an object image from the first and second illuminating surfaces through the light incident surface. The image-sensing device is to capture the probe image and the object image for performing alignment.

First claim

What is claimed is:

1. A probe pin alignment apparatus, applied to align a probe element with an object under test, comprising:
a beam-splitting element, disposed between the object under test and the probe element, having a first illuminating surface, a second illuminating surface and a light incident surface, the first illuminating surface and the second illuminating surface facing respectively the probe element and the object under test, the beam-splitting element being consisted of two triangular light transmission prisms, a junction surface of the two triangular light transmission prisms being formed as a semi-reflective surface for reflecting a light beam from the light incident surface to be projected onto the probe element;
an image-sensing device, disposed externally to the light incident surface of the beam-splitting element; and
a light-reflecting element, disposed at a side of the beam-splitting element by opposing to the light incident surface, allowing part of the light beam passing through the semi-reflective surface to be reflected back to the semi-reflective surface to be further projected onto the object under test;

wherein the beam-splitting element sends out both a probe image from the first illuminating surface and an object image from the second illuminating surface through the light incident surface, and the image-sensing device is used for capturing the probe image and the object image for performing alignment.

2. The probe pin alignment apparatus of claim 1 , wherein the first illuminating surface and the second illuminating surface are disposed to opposing sides of the beam-splitting element.

3. The probe pin alignment apparatus of claim 1 , wherein the beam-splitting element is a beam splitter.

4. The probe pin alignment apparatus of claim 1 , further including a light path-changing element, movably disposed on the beam-splitting element for selectively blocking one of the first illuminating surface and the second illuminating surface.

5. The probe pin alignment apparatus of claim 1 , further including a light-shielding element, movably disposed on the beam-splitting element for selectively blocking the first illuminating surface.

6. The probe pin alignment apparatus of claim 1 , further including a light source, located close to the light incident surface of the beam-splitting element for projecting part of the light beam onto the probe element and another part of the light beam onto the object under test through the beam-splitting element.

7. The probe pin alignment apparatus of claim 6 , wherein the light source is a coaxial light source.

8. The probe pin alignment apparatus of claim 6 , further including a ring-type light source, disposed between the beam-splitting element and the probe element for providing another light beam to the probe element, or disposed between the beam-splitting element and the object under test for providing a further light beam to the object under test.

9. The probe pin alignment apparatus of claim 1 , wherein the image-sensing device scans the object under test through the beam-splitting element scan.

Assignees

• Chroma Ate Inc

Inventors

• Wang Yu-Yen
• Lin Jia-Hong
• Weng Szu-Yuan
• Huang Kuo-Wei

Classifications

• G01N21/8851

  Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002) · CPC title

• G01R31/2887

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R35/02

  of auxiliary devices, e.g. of instrument transformers according to prescribed transformation ratio, phase angle, or wattage rating · CPC title

• G01R1/07364 Primary

  with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch · CPC title

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title