Apparatus and methods for reducing particles in semiconductor process chambers

Patent metadata

Field	Value
Publication number	US-10770269-B2
Application number	US-201715677929-A
Country	US
Kind code	B2
Filing date	Aug 15, 2017
Priority date	Mar 15, 2013
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

Embodiments of the present disclosure generally provide various apparatus and methods for reducing particles in a semiconductor processing chamber. One embodiment of present disclosure provides a vacuum screen assembly disposed over a vacuum port to prevent particles generated by the vacuum pump from entering substrate processing regions. Another embodiment of the present disclosure provides a perforated chamber liner around a processing region of the substrate. Another embodiment of the present disclosure provides a gas distributing chamber liner for distributing a cleaning gas around the substrate support under the substrate supporting surface.

First claim

What is claimed is:

1. A processing apparatus, comprising:
a chamber body and a chamber lid enclosing a processing region;
a substrate support assembly;
a substrate support liner surrounding the substrate support assembly;
a plasma screen disposed below the processing region and above the substrate support liner; and
a chamber liner disposed inside the chamber body, the chamber liner comprising:
a bottom; and
a sidewall extending from a periphery of the bottom, wherein the sidewall forms a closed loop surrounding the substrate support assembly, the sidewall having a first plurality of through holes grouped together and formed through a portion of the sidewall, and a remaining portion of the sidewall free from additional through holes.

2. The processing apparatus of claim 1 , wherein a cylindrical volume around the substrate support assembly is enclosed by the sidewall, the plasma screen, and the substrate support liner.

3. The processing apparatus of claim 1 , wherein the bottom of the chamber liner is substantially circular, and the first plurality of through holes are distributed along the portion of the sidewall non-uniformly.

4. The processing apparatus of claim 3 , wherein the portion of the sidewall having the first plurality of through holes extends from a first end through a center point to a second end, a number of through holes per length of the sidewall decreases from the first end to the center point and increases from the center point to the second end.

5. The processing apparatus of claim 4 , wherein the first plurality of through holes are distributed symmetrical about the center point.

6. The processing apparatus of claim 1 , the chamber liner further comprising:
a second plurality of through holes formed through the bottom.

7. The processing apparatus of claim 6 , wherein the second plurality of through holes are distributed non-uniformly about a center point of the portion of the sidewall.

8. The processing apparatus of claim 6 , further comprising a vacuum port, wherein the bottom of the chamber liner comprising the second plurality of through holes overlaps the vacuum port.

9. The processing apparatus of claim 8 , wherein the vacuum port is laterally offset from the substrate support assembly.

Assignees

• Applied Materials Inc

Inventors

• Nguyen Andrew
• Howard Bradley
• Rauf Shahid
• Balakrishna Ajit
• Choi Tom K
• Collins Kenneth S
• Kumar Anand
• Willwerth Michael D
• Sarode Vishwanath Yogananda

Classifications

• B32B1/08

  Tubular products · CPC title

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title

• H01J37/32495 Primary

  Means for protecting the vessel against plasma · CPC title

• Y10T428/13

  Hollow or container type article [e.g., tube, vase, etc.] · CPC title

• H01J37/32871

  Means for trapping or directing unwanted particles · CPC title