Li1+xAlxTi2-x(PO4)3 solid-state thin film electrolyte for 3D microbattery and method of fabrication

Patent metadata

Field	Value
Publication number	US-10749199-B2
Application number	US-201715826409-A
Country	US
Kind code	B2
Filing date	Nov 29, 2017
Priority date	Nov 29, 2017
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

A solid-state rechargeable 3D microbattery is provided that has improved power density, energy density, and cycle lifetimes. These improvements are afforded by providing a solid-state electrolyte that is composed of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 , wherein x is from 0 to 2. The solid-state electrolyte that is composed of crystalline Li 1+x Al x Ti 2−x (PO 4 ) has a high ionic conductivity (which is greater than 10 −4 Siemens/cm) as well as high chemical stability.

First claim

What is claimed is:

1. A solid-state rechargeable 3D microbattery comprising:
an anode current collector located on a semiconductor substrate;
an anode region located on the anode current collector;
a solid-state electrolyte composed of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 , wherein x is from 0 to 2, and the layer of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 , is selected from the group consisting of Li 1.5 Al 0.5 Ti 1.5 (PO 4 ) 3 , Li 1.4 Al 0.4 Ti 1.6 (PO 4 ), Li 1.3 Al 0.3 Ti 1.7 (PO 4 ) 3 and Li 1.1 Al 0.1 Ti 1.9 (PO 4 ) 3 and located on the anode region;
a cathode located on the solid-state electrolyte; and
a cathode current collector located on the cathode.

2. The solid-state rechargeable 3D microbattery of claim 1 , wherein the semiconductor substrate is a patterned substrate containing a plurality of semiconductor material pillars.

3. The solid-state rechargeable 3D microbattery of claim 1 , wherein the semiconductor substrate is a patterned substrate containing a plurality of semiconductor material pyramids.

4. The solid-state rechargeable 3D microbattery of claim 1 , wherein the semiconductor substrate is a patterned substrate containing a plurality of semiconductor material cones.

5. The solid-state rechargeable 3D microbattery of claim 1 , wherein the cathode comprises a lithiated cathode material.

6. The solid-state rechargeable 3D microbattery of claim 1 , wherein the layer of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 , has an ionic conductivity of greater than 10 −4 .

7. The solid-state rechargeable 3D microbattery of claim 1 , wherein the anode region is present continuously between the anode current collector and the solid-state electrolyte.

8. The solid-state rechargeable 3D microbattery of claim 1 , wherein the anode region is present discontinuously between the anode current collector and the solid-state electrolyte.

9. The solid-state rechargeable 3D microbattery of claim 1 , further comprising a first contact contacting a surface of the anode current collector and a second contact contacting a surface of the cathode current collector and spaced apart from the first contact.

10. A solid-state electrolyte comprising a layer of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 , wherein x is from 0 to 2, and the layer of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 , is selected from the group consisting of Li 1.5 Al 0.5 Ti 1.5 (PO 4 ) 3 , Li 1.4 Al 0.4 Ti 1.6 (PO 4 ) 3 Li 1.3 Al 0.3 Ti 1.7 (PO 4 ) 3 , and Li 1.1 Al 0.1 Ti 1.9 (PO 4 ) 3 .

11. The solid-state electrolyte of claim 10 , wherein the layer of crystalline Li 1+x Al x Ti 2−x (PO 4 ) 3 has an ionic conductivity of greater than 10 −4 .

Assignees

• IBM

Inventors

• Peng Lele
• Lin Qinghuang
• Xie Yujun

Classifications

• Y02P70/50

  Manufacturing or production processes characterised by the final manufactured product · CPC title

• H01M10/0436 Primary

  Small-sized flat cells or batteries for portable equipment · CPC title

• Y02E60/50

  Fuel cells · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title

• H01M10/0562

  Solid materials · CPC title