Chip capacitor and method for manufacturing the same
US-2015022938-A1 · Jan 22, 2015 · US
US2015280276A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015280276-A1 |
| Application number | US-201414229490-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 28, 2014 |
| Priority date | Mar 28, 2014 |
| Publication date | Oct 1, 2015 |
| Grant date | — |
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A battery includes at least two externally accessible battery electrodes to provide a supply voltage and at least more than half of a wafer including at least two wafer electrodes. The wafer includes a plurality of trenches reaching into the wafer. At least a part of a trench of the plurality of trenches is filled with a solid state battery structure. The solid state battery structure within the trench includes electrodes electrically connected to the wafer electrodes.
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What is claimed is: 1 . A battery comprising: at least two externally accessible battery electrodes to provide a supply voltage of the battery; a substrate having a main surface with a surface area of at least 600 cm 2 ; and at least two substrate electrodes disposed on the substrate, wherein the substrate comprises a plurality of trenches extending into the substrate, wherein at least a part of a trench of the plurality of trenches is filled with a solid state battery structure, wherein the solid state battery structure within the trench comprises electrodes electrically connected to the substrate electrodes. 2 . The battery of claim 1 , wherein the substrate comprises at least more than half of a wafer. 3 . The battery of claim 1 , wherein the substrate is substantially a complete wafer comprising the at least two substrate electrodes. 4 . The battery of claim 1 , wherein the trench of the plurality of trenches comprises a cavity. 5 . The battery of claim 1 , wherein the solid state battery structure within the trench comprises a solid state electrolyte layer between a first electrode layer connected to a first substrate electrode of the at least two substrate electrodes and a second electrode layer connected to a second substrate electrode of the at least two substrate electrodes. 6 . The battery of claim 5 , wherein the solid state electrolyte layer comprises lithium phosphorus oxynitride. 7 . The battery of claim 5 , wherein the first electrode layer comprises an anode layer comprising carbon or silicon. 8 . The battery of claim 5 , wherein the second electrode layer comprises a cathode layer comprising lithium cobalt oxide and a collector layer comprising titan nitride. 9 . The battery of claim 1 , wherein trenches of the plurality of trenches extend into the substrate to a depth deeper than 500 μm. 10 . The battery of claim 1 , wherein trenches of the plurality of trenches comprise an aspect ratio larger than 10. 11 . The battery of claim 1 , wherein trenches of the plurality of trenches comprise a maximal width of less than 300 μm. 12 . The battery of claim 1 , wherein adjacent trenches of the plurality of trenches are spaced by a distance between 2 μm and 300 nm. 13 . The battery of claim 1 , wherein trenches of the plurality of trenches comprise a maximal depth larger than a maximal lateral dimension. 14 . The battery of claim 1 , comprising a plurality of substrates, each substrate having a main surface with a surface area of at least 600 cm 2 , wherein each substrate includes trenches comprising solid state battery structures. 15 . The battery of claim 1 , wherein the substrate comprises a control circuit integrated on the substrate. 16 . A battery element comprising a substrate with a plurality of trenches extending into the substrate, wherein a part of a trench of the plurality of trenches is filled with a solid state battery structure, wherein the trench of the plurality of trenches comprises a cavity. 17 . The battery element of claim 16 , wherein a part of each trench of the plurality of trenches is filled with a solid state battery structure and each trench of the plurality of trenches comprises a cavity. 18 . The battery element of claim 16 , comprising a first battery element electrode electrically connected to a first electrode of the solid state battery structure within the trench and a second battery element electrode electrically connected to a second electrode of the solid state battery structure within the trench. 19 . The battery element of claim 16 , wherein the substrate is at least more than half of a wafer. 20 . A mobile device comprising a casing accommodating an electronic device configured to provide at least one of audio data and video data for a user and a battery configured to provide a power supply for the electronic device, wherein the battery comprises a battery element comprising a substrate with a plurality of trenches extending into the substrate, wherein a part of a trench of the plurality of trenches is filled with a solid state battery structure, wherein the substrate maximal dimension larger than a maximal dimension of the casing of the mobile device. 21 . A method for forming a battery, the method comprising: preparing a wafer comprising at least two wafer electrodes, wherein the wafer comprises a plurality of trenches extending from a surface of the wafer into the wafer, wherein at least a part of a trench of the plurality of trenches is filled with a solid state battery structure, wherein the solid state battery structures within the trenches comprise electrodes electrically connected to the wafer electrodes; and forming a battery package comprising two externally accessible battery electrodes to provide a supply voltage to a connectable device. 22 . The method of claim 21 , comprising cutting the wafer to obtain a remaining part of the wafer with a desired geometry, wherein the remaining part of the wafer is at least more than half of the wafer and comprises the two wafer electrodes. 23 . A method for forming a battery, the method comprising: providing a wafer; removing a portion of the wafer to form a substrate, the substrate comprising at least half of the wafer; forming at least two wafer electrodes in the substrate, wherein the substrate with the wafer electrodes comprises a plurality of trenches extending into the substrate, wherein at least a part of a trench of the plurality of trenches is filled with a solid state battery structure; and forming at least two externally accessible battery electrodes to provide a supply voltage of the battery, wherein the solid state battery structure within the trench comprises electrodes electrically connected to the wafer electrodes.
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