Method for fabricating three-dimensional semiconductor device using buried stop layer in substrate
US-2024268119-A1 · Aug 8, 2024 · US
US10748771B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10748771-B2 |
| Application number | US-201916283392-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 22, 2019 |
| Priority date | Jul 12, 2016 |
| Publication date | Aug 18, 2020 |
| Grant date | Aug 18, 2020 |
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Disclosed herein is an apparatus for processing a substrate that forms a hole in a substrate while reducing a burr in the hole so that a module device can be inserted into the hole to reduce the thickness of a display device, and the display device using the apparatus. The apparatus for processing the substrate comprises a body configured to operably be rotatable, and a cylindrical cutting tip at an end of the body. The bottom surface of the cutting tip is in an acute angle with respect to a contact surface of the substrate to allow formation of a groove at the substrate.
Opening claim text (preview).
What is claimed is: 1. A cutting apparatus for forming a hole in a substrate, comprising: a cutting tip, the cutting tip having a first, second, third, and fourth inclined surface, wherein the first inclined surface and the second inclined surface meet to form a tip having an acute angle formed based on the first and second inclined surface, the third inclined surface extends from the first inclined surface and the fourth inclined surface extends from the second inclined surface; a first acute angle that the first inclined surface forms with a surface of the substrate; a second acute angle that the second inclined surface forms with the surface of the substrate, the first acute angle is smaller than the second acute angle; a third acute angle that the third inclined surface forms with the surface of the substrate, the third acute angle is larger than the first acute angle; and a fourth acute angle that the fourth inclined surface forms with the surface of the substrate, the fourth acute angle is smaller than the second acute angle, wherein a width of the first inclined surface as projected to the surface of the substrate is greater than a sum of a width of the second inclined surface as projected to the surface of the substrate and a width of the fourth inclined surface as projected to the surface of the substrate. 2. A cutting apparatus of claim 1 , wherein a sum of the acute angle between the first and second inclined surface, the first acute angle, and the second acute angle is 180°. 3. A cutting apparatus of claim 1 , wherein the cutting tip includes a plurality of sub-cutting tips spaced from each other to form a gap between the respective sub-cutting tips. 4. A cutting apparatus of claim 3 , wherein the respective sub-cutting tip includes an arc-shaped cutting portion. 5. A cutting apparatus of claim 1 , wherein a boundary portion between the second inclined surface and the fourth inclined surface has a recessed shape or a concave shape slightly bent toward an inner side of the cutting tip.
the processing being the formation of vias or contact holes · CPC title
using bonding · CPC title
for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements · CPC title
comprising polycrystalline silicon · CPC title
Perforating by tool or tools of the drill type · CPC title
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