Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10741396-B2
Application number	US-201615566694-A
Country	US
Kind code	B2
Filing date	Apr 12, 2016
Priority date	Apr 14, 2015
Publication date	Aug 11, 2020
Grant date	Aug 11, 2020

Abstract

Provided is a substrate processing apparatus. The substrate processing apparatus includes a tube having an inner space, a substrate support on which a plurality of substrates are stacked in multistage within the tube, the substrate support individually defining a plurality of processing spaces in which the plurality of substrates are respectively processed, a first gas supply part configured to supply a first gas into all the plurality of processing spaces, a second gas supply part comprising a plurality of injectors disposed to respectively correspond to the plurality of processing spaces so that the second gas is individually supplied onto each of the plurality of substrates, and an exhaust part configured to exhaust the gases within the tube. Thus, the gas may be individually supplied into each of the processing spaces in which the plurality of substrates are respectively processed.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a tube having a cylindrical shape and defining an inner space;
a substrate support on which a plurality of substrates are stacked in multistage within the tube, the substrate support individually defining a plurality of processing spaces in which the plurality of substrates are respectively processed;
a first gas supply part configured to supply a first gas into all the plurality of processing spaces;
a second gas supply part configured to individually supply the second gas onto each of the plurality of substrates to adjust a component of a gas within each of the processing spaces; and
an exhaust part configured to exhaust gases within the tube,
wherein the second gas supply part comprises:
a plurality of injectors provided in number corresponding to the number of processing spaces, and disposed to respectively correspond to the plurality of processing spaces to supply the second gas into each of the plurality of processing spaces, and
a plurality of gas supply lines, wherein each gas supply line of the plurality of gas supply lines is connected to a respective injector of the plurality of injectors,

wherein a first through hole and plurality of second through holes are formed within the tube and are circumferentially offset relative to one another within the tube,
wherein the first through hole is formed in the tube in a straight line shape along an extension direction of the first gas supply part, and corresponds to a plurality of injection holes provided in the first gas supply part,
wherein the second through holes of the plurality of second through holes are axially offset relative to one another within the tube so as to be arranged at different heights from one another, wherein each injector of the plurality of injectors includes a first portion and a second portion, wherein the second portion is bent relative to the first portion, and wherein the second portion of each injector of the plurality of injectors is inserted into a corresponding second through hole of the plurality of second through holes, and
wherein the first portion of the plurality of injectors have heights different from each other to respectively correspond to heights of the processing spaces and to heights of the second through holes,
wherein each of the plurality of gas supply lines further comprises:
a gas tube configured to define a path through which the second gas moves,
a flow sensor installed in the gas tube to measure a flow rate of the gas within the gas tube; and
a plurality of valves installed in the gas tube to individually control an amount of the second gas supplied into each of the processing spaces,
wherein the plurality of gas supply lines individually control and measure the flow rate of the second gas supplied to each of the processing spaces for individually tuning the gas within each of the processing spaces.

2. The substrate processing apparatus of claim 1 , wherein the first gas supply part comprises:
an injection unit extending in a direction in which the substrates are stacked; and
a gas supply unit connected to the injection unit to supply the first gas into the injection unit,
wherein the plurality of injection holes are defined in the injection unit to correspond to the processing spaces in the direction in which the substrates are stacked.

3. The substrate processing apparatus of claim 2 , wherein the plurality of injection holes have diameters that gradually increase in a direction that is away from the portion at which the injection unit and the gas supply unit are connected to each other.

4. The substrate processing apparatus of claim 1 , wherein a plurality of injection holes through which the second gas is injected are defined in the other ends of the injectors, and
the plurality of injection holes are spirally defined along a circumference of the tube.

5. The substrate processing apparatus of claim 1 , further comprising a rotational driving part connected to the substrate support to rotate the substrate support.

6. The substrate processing apparatus of claim 1 , further comprising an external tube configured to accommodate the tube therein,
wherein an injection unit of the first gas supply part and the plurality of injectors of the second gas supply part are disposed between the tube and the external tube.

7. The substrate processing apparatus of claim 1 , wherein the first gas supply part supplies the first gas comprising a silicon source gas.

8. The substrate processing apparatus of claim 1 , wherein the second gas supply part selectively supplies the second gas comprising at least one of a dopant gas and an etching gas onto each of the plurality of substrates.

9. The substrate processing apparatus of claim 1 , wherein the substrate support comprises a plurality of isolation plates that are respectively disposed between the substrates in a stacking direction of the substrates to isolate the plurality of processing spaces from each other.

Assignees

• Eugene Technology Co Ltd

Inventors

• Jung Woo Duck
• Je Sung Tae
• Choi Kyu Jin
• Han Seong Min

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title