Methods and apparatus for reducing sputtering of a grounded shield in a process chamber

Patent metadata

Field	Value
Publication number	US-10692706-B2
Application number	US-201313798021-A
Country	US
Kind code	B2
Filing date	Mar 12, 2013
Priority date	Mar 12, 2013
Publication date	Jun 23, 2020
Grant date	Jun 23, 2020

Abstract

Methods and apparatus for physical vapor deposition are provided herein. In some embodiments, a process kit shield for use in a physical vapor deposition chamber may include an electrically conductive body having one or more sidewalls defining a central opening, wherein the body has a ratio of a surface area of inner facing surfaces of the one or more sidewalls to a height of the one or more sidewalls of about 2 to about 3.

First claim

The invention claimed is:

1. A substrate processing apparatus, comprising:
a chamber body having a substrate support disposed therein;
a target coupled to the chamber body opposite the substrate support;
an RF power source to form a plasma within the chamber body; and
a grounded shield having an inner sidewall including a plurality of waves disposed between the target and the substrate support;
wherein a ratio of a diameter of the target to a height of the grounded shield is about 4.1 to about 4.3, and wherein a ratio of a surface area of inner facing surfaces of the inner sidewall to a surface area of a principal surface of the target is about 1 to about 1.5.

2. The apparatus of claim 1 , wherein a ratio of the diameter of the target to a diameter of a substrate to be disposed atop the substrate support is about 1.4.

3. The apparatus of claim 1 , wherein the plurality of waves of the grounded shield further comprise alternating concave and convex portions.

4. The apparatus of claim 3 , wherein the plurality of waves are arranged in a repeating pattern, and wherein each wave has a period of about 6 mm to about 20 mm.

5. The apparatus of claim 1 , wherein the grounded shield is made of at least one of an aluminum alloy or stainless steel.

6. The apparatus of claim 1 , wherein a distance between the target and a substrate having a diameter of 300 mm disposed atop the substrate support is about 50.8 mm to about 152.4 mm.

7. The apparatus of claim 1 , wherein a distance between the target and a substrate having a diameter of 450 mm disposed atop the substrate support is about 101.6 mm to about 203.2 mm.

8. A substrate processing apparatus, comprising:
a chamber body having a substrate support disposed therein;
a target coupled to the chamber body opposite the substrate support;
an RF power source to form a plasma within the chamber body; and
a grounded shield having an inner sidewall including a plurality of waves disposed between the target and the substrate support;
wherein a ratio of a diameter of the target to a height of the grounded shield is about 4, wherein the plurality of waves of the grounded shield further comprise alternating concave and convex portions, and wherein each one of the plurality of concave portions is configured to allow a plasma sheath to form within the concave portion at an RF frequency of about 27 MHz to about 162 MHz and at chamber pressure of about 60 millitorr to about 140 millitorr.

9. The apparatus of claim 8 , wherein the plurality of waves are arranged in a repeating pattern, and wherein each wave has a period of about 6 mm to about 20 mm.

10. The apparatus of claim 8 , wherein the grounded shield comprises at least one of an aluminum alloy or stainless steel.

11. The apparatus of claim 8 , wherein a ratio of the diameter of the target to the diameter of a substrate disposed atop the substrate support is about 1.4.

12. The apparatus of claim 8 , wherein a distance between the target and a substrate, having a diameter of 300 mm and disposed atop the substrate support, is about 50.8 mm to about 152.4 mm.

13. The apparatus of claim 8 , wherein a distance between the target and a substrate, having a diameter of 450 mm and disposed atop the substrate support, is about 101.6 mm to about 203.2 mm.

Assignees

• Applied Materials Inc

Inventors

• Ritchie Alan
• Forster John C
• Rasheed Muhammad

Classifications

• C23C14/358

  Inductive energy · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title

• H01J37/3405

  Magnetron sputtering · CPC title

• H01J37/3441 Primary

  Dark space shields · CPC title

• H01J37/32504

  Means for preventing sputtering of the vessel · CPC title