Apparatus and method for CMP pad conditioning

Patent metadata

Field	Value
Publication number	US-10675732-B2
Application number	US-201715489866-A
Country	US
Kind code	B2
Filing date	Apr 18, 2017
Priority date	Apr 18, 2017
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

A chemical mechanical polishing apparatus including a conditioning head having a first pressure sensor and a controller configured to adjust at least one of a position or a rotation of the conditioning pad responsive to the first pressure data. The conditioning head is adjustable between a first position and a second position, the conditioning head and a polishing pad are in contact when the conditioning head is in the second position, and the first pressure sensor generates first pressure data when the conditioning head is in the second position.

First claim

What is claimed is:

1. A chemical mechanical polishing apparatus comprising:
a polishing pad;
a conditioning head having a first pressure sensor, wherein the conditioning head is configured to receive a conditioning pad, the conditioning head is adjustable between a first position and a second position,
the conditioning head and the polishing pad are in contact when the conditioning head is in the second position, and
the first pressure sensor is configured to generate first pressure data when the conditioning head is in the second position, wherein the first pressure data indicates a pressure exerted on the polishing pad by the conditioning pad; and

a controller configured to adjust at least one of a position or a rotation of the conditioning pad responsive to the first pressure data.

2. The chemical mechanical polishing apparatus according to claim 1 , further comprising:
a support arm having a longitudinal axis attached to the conditioning head, the support arm being moveable between the first position and the second position along the longitudinal axis.

3. The chemical mechanical polishing apparatus according to claim 1 , further comprising:
a support arm attached to the conditioning head, the support arm being rotatable between the first position and the second position about a first pivot point.

4. The chemical mechanical polishing apparatus according to claim 1 , further comprising:
a surface condition scanner directed to a scanned area on the polishing pad, wherein the surface condition scanner is configured to generate a surface condition signal corresponding to a detected surface condition of the scanned area.

5. The chemical mechanical polishing apparatus according to claim 4 , wherein:
the controller is configured to adjust the position or the rotation of the conditioning pad in response to the first pressure data and the surface condition signal.

6. The chemical mechanical polishing apparatus according to claim 1 , further comprising:
a second pressure sensor, wherein the second pressure sensor is configured to generate second pressure data when the conditioning head is in the second position.

7. The chemical mechanical polishing apparatus according to claim 6 , wherein:
the controller is configured to adjust the position or the rotation of the conditioning pad responsive to the first pressure data and the second pressure data.

8. The chemical mechanical polishing apparatus according to claim 1 , further comprising:
a plurality of second pressure sensors,
wherein each pressure sensor of the plurality of second pressure sensors is configured to generate a plurality of second pressure data, and
wherein the combination of the first pressure sensor and the plurality of second pressure sensors are arranged within the conditioning head as a first array of pressure sensors.

9. The chemical mechanical polishing apparatus according to claim 8 , wherein:
the controller is configured to adjust the position of the conditioning pad responsive to the first pressure data and the plurality of second pressure data.

10. A chemical mechanical polishing apparatus comprising:
a platen;
a polishing pad supported by the platen, the polishing pad having a polishing surface;
a conditioning head being adjustable between a first position and a second position, the conditioning head having a first pressure chamber and a first pressure sensor;
a conditioning pad supported by the conditioning head,
wherein the conditioning pad and the polishing pad are in contact when the conditioning head is in the second position, and
wherein the first pressure sensor is configured to generate first pressure data when the conditioning head is in the second position, wherein the first pressure data indicates a pressure exerted on the polishing pad by the conditioning pad;

a source of pressurized fluid in communication with the first pressure chamber; and
a controller configured to adjust a first fluid pressure within the first pressure chamber responsive to the first pressure data.

11. The chemical mechanical polishing apparatus according to claim 10 , further comprising:
a support arm having a longitudinal axis attached to the conditioning head, the support arm being moveable between a first position and a second position along the longitudinal axis, and
being rotatable between a first position and a second position about a first pivot point.

12. The chemical mechanical polishing apparatus according to claim 10 , further comprising:
a surface condition scanner directed to a scanned area on the polishing pad, the surface condition scanner configured to generate a surface condition signal corresponding to a surface roughness value within the scanned area.

13. The chemical mechanical polishing apparatus according to claim 12 , wherein:
the controller is configured to adjust a first fluid pressure within the first pressure chamber responsive to the first pressure data and the surface condition signal.

14. The chemical mechanical polishing apparatus according to claim 10 , further comprising:
a second pressure sensor, wherein the second pressure sensor is configured to generate second pressure data when the conditioning head is in the second position.

15. The chemical mechanical polishing apparatus according to claim 14 , wherein:
the controller is configured to adjust a first fluid pressure within the first pressure chamber responsive to the first pressure data and the second pressure data.

16. A chemical mechanical polishing apparatus comprising:
a polishing pad;
a conditioning head having a first pressure sensor, wherein the conditioning head is configured to receive a conditioning pad, the conditioning head is adjustable between a first position and a second position,
the conditioning head and the polishing pad are in contact when the conditioning head is in the second position, and
the first pressure sensor is configured to generate first pressure data when the conditioning head is in the second position, wherein the first pressure data indicates a pressure exerted on the polishing pad by the conditioning pad; and

a surface condition scanner, wherein the surface condition scanner is configured to measure a surface roughness of the polishing pad; and
a controller configured to adjust at least one of a position or a rotation of the conditioning pad responsive to the first pressure data and the surface roughness of the polishing pad.

17. The chemical mechanical polishing apparatus of claim 16 , wherein the surface condition scanner is separate from the conditioning head.

18. The chemical mechanical polishing apparatus of claim 16 , wherein the first pressure sensor extends continuously along a circular path defined by the conditioning head.

19. The chemical mechanical polishing apparatus of claim 16 , wherein the first pressure sensor comprises a plurality of pressure sensor segments along a circular path defined by the conditioning head.

20. The chemical mechanical polishing apparatus of claim 16 , wherein the surface condition scanner comprises an optical scanner.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chen Chunhung
• Wang Sheng-Chen

Classifications

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B49/18

  taking regard of the presence of dressing tools · CPC title

• B24B49/16

  taking regard of the load · CPC title

• B24B49/12

  involving optical means · CPC title

• B24B53/005

  Positioning devices for conditioning tools · CPC title