Substrate processing apparatus and method of manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-10636681-B2
Application number	US-201816234972-A
Country	US
Kind code	B2
Filing date	Dec 28, 2018
Priority date	Jun 30, 2016
Publication date	Apr 28, 2020
Grant date	Apr 28, 2020

Abstract

A substrate processing apparatus includes a first processing module including a first processing module, a second processing module, a first utility system adjacent to a back surface of the first processing module, and a second utility system adjacent to a back surface of the second processing module, a first exhaust box of the first utility system and a second exhaust box of the second utility system being disposed to face each other across a maintenance area located behind a part of the back surface of the first processing module that is close to the second processing module and behind a part of the back surface of the second processing module that is close to the first processing module, and a first supply box of the first utility system and a second supply box of the second utility system being disposed to face each other across the maintenance area.

First claim

What is claimed is:

1. A substrate processing apparatus, comprising:
a first process module including a first process container in which a substrate is processed;
a second process module including a second process container in which a substrate is processed, the second process module being disposed adjacent to the first process module;
a first utility system disposed adjacent to a back surface of the first process module and including:
a first exhaust system configured to evacuate an inside of the first process container; and
a first supply mechanism configured to supply a processing gas into the first process container; and

a second utility system disposed adjacent to a back surface of the second process module and including:
a second exhaust system configured to evacuate an inside of the second process container; and
a second supply mechanism configured to supply a processing gas into the second process container,

wherein the first exhaust system and the second exhaust system are disposed to face each other across a maintenance area, which is located behind a first part of the back surface of the first process module that is close to the second process module and behind a first part of the back surface of the second process module that is close to the first process module, and the first supply mechanism and the second supply mechanism are disposed to face each other across the maintenance area,
wherein the first utility system further includes:
a first supply casing formed in a box shape and enclosing the first supply mechanism; and
a first exhaust casing formed in a box shape and enclosing the first exhaust system, and

wherein the second utility system further includes:
a second supply casing formed in a box shape and enclosing the second supply mechanism; and
a second exhaust casing formed in a box shape and enclosing the second exhaust system, and

wherein a maintenance port of the first exhaust casing, a maintenance port of the second exhaust casing, a maintenance port of the first supply casing, and a maintenance port of the second supply casing are disposed at sides of the maintenance area such that the maintenance port of the first exhaust casing and the maintenance port of the second exhaust casing face each other, and the maintenance port of the first supply casing and the maintenance port of the second supply casing face each other.

2. The apparatus of claim 1 , wherein the first process module further includes a first transfer chamber disposed below the first process container, the substrate being loaded into and unloaded from the first process container,
wherein the second process module further includes a second transfer chamber disposed adjacent to the first transfer chamber, the substrate being loaded into and unloaded from the second process container, and
wherein a first maintenance door is installed on a back surface of the first transfer chamber, and a second maintenance door is installed on a back surface of the second transfer chamber.

3. The apparatus of claim 2 , wherein the maintenance area constitutes an area for maintaining the first process container and the second process container.

4. The apparatus of claim 2 , further comprising a transshipment chamber disposed adjacent to a front side of the first transfer chamber and a front side of the second transfer chamber, the substrate being transshipped to a first substrate holder in the first transfer chamber and a second substrate holder in the second transfer chamber from the transshipment chamber,
wherein the first maintenance door is configured to be opened when a pressure in the first transfer chamber is lower than a pressure in the transshipment chamber and an oxygen concentration in the first transfer chamber is equal to or higher than an oxygen concentration in the atmosphere.

5. The apparatus of claim 4 , wherein a clean unit for supplying a clean air to the transshipment chamber is provided on a ceiling of the transshipment chamber,
a first gate valve and a second gate valve are installed on a boundary wall between the first transfer chamber and the transshipment chamber and on a boundary wall between the second transfer chamber and the transshipment chamber, respectively, and
an inert gas is circulated in the transshipment chamber as the clean air.

6. The apparatus of claim 2 , wherein the first maintenance door and the second maintenance door are detachably pivoted by hinges, which are installed so as to be adjacent to each other in the vicinity of inner corners of the back surfaces of the first transfer chamber and the second transfer chamber.

7. The apparatus of claim 2 , wherein the first transfer chamber includes:
a first clean unit installed on an outer side surface of the first transfer chamber and configured to supply a clean air or an inert gas; and
a first exhaust part installed on a side surface facing the first clean unit, and
wherein the second transfer chamber includes:
a second clean unit installed on an outer side surface of the second transfer chamber and configured to supply a clean air or an inert gas; and
a second exhaust part installed on a side surface facing the second clean unit,
the first transfer chamber is configured so that the clean air or the inert gas exhausted from the first transfer chamber by the first exhaust part is re-supplied from the first clean unit to the first transfer chamber, and
the second transfer chamber is configured so that the clean air or the inert gas exhausted from the second transfer chamber by the second exhaust part is re-supplied from the second clean unit to the second transfer chamber.

8. The apparatus of claim 1 , wherein the first exhaust casing is disposed below an exhaust pipe extending from the first process container in a horizontal direction, and
wherein the second exhaust casing is disposed below an exhaust pipe extending from the second process container in a horizontal direction.

9. The apparatus of claim 1 , wherein the first process module and the second process module are plane-symmetrically disposed with respect to a surface on which the first process module and the second process module are adjacent to each other, and
wherein the first utility system and the second utility system are plane-symmetrically disposed with respect to the surface on which the first process module and the second process module are adjacent to each other.

10. The apparatus of claim 1 , wherein widths of portions of the first utility system and the second utility system that are close to front surfaces thereof are narrower than widths of portions of the first utility system and the second utility system that are close to back surfaces thereof, and
wherein a distance at the front surfaces between the first utility system and the second utility system is larger than a distance at the back surfaces between the first utility system and the second utility system.

11. The apparatus of claim 1 , wherein the first process module and the second process module are disposed to have no gap therebetween.

12. The apparatus of claim 1 , wherein the first exhaust casing accommodates at least an APC (Auto Pressure Controller) valve included in the first exhaust system, and
wherein the second exhaust casing accommodates at least an APC valve included in the second exhaust system.

13. The apparatus of claim 1 , wherein the maintenance area is commonly used for a first transfer chamber of the first process module and a second transfer chamber of the second process module.

14. The apparatus of claim 1 , wherein the maintenance area is adjacent to a back surface of a first transfer

Assignees

• Kokusai Electric Corp

Inventors

• Kamimura Daigi
• Taniyama Tomoshi
• Nogami Takashi

Classifications

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title