Two-component bump metallization

Patent metadata

Field	Value
Publication number	US-10629797-B2
Application number	US-201816233852-A
Country	US
Kind code	B2
Filing date	Dec 27, 2018
Priority date	Sep 29, 2017
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

A structure has a first substrate bonded to a first under-bump metallization (UBM) structure, the first UBM structure comprising a first bonding region laterally surrounded by a first superconducting region. A second substrate is bonded to a second under-bump metallization (UBM) structure, the second UBM structure comprising a second bonding region laterally surrounded by a second superconducting region; and a superconducting solder material joins the first UBM structure to the second UBM structure.

First claim

What is claimed is:

1. A structure, comprising:
an under-bump metallization (UBM) structure comprising a bonding region laterally surrounded by a superconducting region; and
a superconducting solder material joining the UBM structure to a substrate.

2. The structure of claim 1 , wherein the bonding region comprises a non-oxidizing metal.

3. The structure of claim 1 , wherein the superconducting region is an annular ring that circumferentially surrounds the bonding region.

4. The structure of claim 1 , wherein the bonding region has a lower level of surface oxidation than the superconducting region.

5. The structure of claim 1 , wherein the bonding region has a higher enthalpy of vaporization than the superconducting region.

6. The structure of claim 1 , wherein the bonding region is selected from a group consisting of: titanium; palladium or gold.

7. The structure of claim 1 , wherein the superconducting region has greater electrical coupling than the bonding region.

8. The structure of claim 1 , wherein the superconducting region is selected from a group consisting of: titanium nitride, tantalum or aluminum.

9. A structure, comprising:
a first substrate bonded to a first under-bump metallization (UBM) structure, the first UBM structure comprising a first bonding region laterally surrounded by a first superconducting region;
a second substrate bonded to a second under-bump metallization (UBM) structure, the second UBM structure comprising a second bonding region laterally surrounded by a second superconducting region; and
a superconducting solder material joining the first UBM structure to the second UBM structure.

10. The structure of claim 9 , wherein at least one of the first or second bonding regions comprises a non-oxidizing metal.

11. The structure of claim 9 , wherein at least one of the first or second superconducting regions is an annular ring that circumferentially surrounds respectively at least one of the first or second bonding regions.

12. The structure of claim 9 , wherein the first bonding region has a lower level of surface oxidation than the first superconducting region.

13. The structure of claim 9 , wherein the first bonding region has a higher enthalpy of vaporization than the first superconducting region.

14. The structure of claim 9 , wherein the first bonding region is selected from a group consisting of: titanium; palladium or gold.

15. The structure of claim 9 , wherein the first superconducting region has greater electrical coupling than the first bonding region.

16. The structure of claim 9 , wherein the first superconducting region is selected from a group consisting of: titanium nitride, tantalum or aluminum.

17. A method, comprising:
forming a first under-bump metallization (UBM) structure by:
depositing a superconducting metal on a substrate;
patterning and etching the superconducting metal to form a superconducting region and a non-superconducting region; and
depositing a non-superconducting metal in the non-superconducting region;

depositing a bump material on the non-superconducting metal of the non-superconducting region;
reflowing the deposited bump material into a spherical bump; and
bonding the first UBM structure to a second UBM structure such that the spherical bump deforms and contacts respective superconducting metals of superconducting regions of the first and second UBM structures.

18. The method of claim 17 further comprising cleaning surfaces of the superconducting metals of the first and second UBM structures to remove oxides.

19. The method of claim 17 , wherein the patterning and etching of the superconducting metal forms a superconducting annular ring, and the non-superconducting metal deposited in the non-superconducting region is circumferentially surrounded by the superconducting annular ring.

20. The method of claim 17 , wherein the bump material is a superconducting solder material.

Assignees

• IBM

Inventors

• Abraham David W
• Cotte John M
• Lewandowski Eric P

Classifications

• H01L2224/0401

  Electricity · mapped topic

• H01L2224/05664

  Electricity · mapped topic

• H01L2224/05144

  Electricity · mapped topic

• H01L2224/05015

  Electricity · mapped topic

• H01L2224/05163

  Electricity · mapped topic