Coefficient-of-thermal-expansion measurement method and measuring device for coefficient of thermal expansion

Patent metadata

Field	Value
Publication number	US-10627204-B2
Application number	US-201715827589-A
Country	US
Kind code	B2
Filing date	Nov 30, 2017
Priority date	Dec 22, 2016
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

A step gauge and a reference gauge block are placed in a temperature-controlled chamber in parallel with each other. A temperature of the step gauge is changed to a first temperature and a second temperature using a measurement-target temperature adjuster and the temperature-controlled chamber. A distance between a first surface and a second surface of the step gauge is relatively measured at each of the first and second temperatures with reference to a distance between a first reference surface and a second reference surface of the reference gauge block. A coefficient of thermal expansion of the measurement target is calculated from the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.

First claim

What is claimed is:

1. A coefficient-of-thermal-expansion measurement method for measuring a coefficient of thermal expansion of a measurement target having first and second surfaces, the method comprising:
obtaining:
a temperature-controlled chamber configured to house the measurement target, the temperature-controlled chamber having an adjustable internal temperature;
a distance measuring device configured to measure a distance between the first surface and the second surface, at least one measurement-target temperature adjuster placed in the temperature-controlled chamber and configured to heat or cool the measurement target; and
a measurement-target thermometer attached to the measurement target and configured to measure a temperature of the measurement target;

placing the measurement target in the temperature-controlled chamber;
heating or cooling the measurement target using the temperature-controlled chamber and the measurement-target temperature adjuster after a temperature setpoint of the temperature-controlled chamber and the measurement-target temperature adjuster is set at a first temperature;
measuring the distance between the first surface and the second surface after the temperature measured by the measurement-target thermometer is determined to be stabilized at the first temperature;
heating or cooling the measurement target using the temperature-controlled chamber and the measurement-target temperature adjuster after the temperature setpoint of the temperature-controlled chamber and the measurement-target temperature adjuster is changed to a second temperature;
measuring the distance between the first surface and the second surface after the temperature measured by the measurement-target thermometer is determined to be stabilized at the second temperature;
calculating the coefficient of thermal expansion of the measurement target from the distance between the first surface and the second surface at the first temperature and the distance between the first surface and the second surface at the second temperature;
obtaining a reference gauge having a first reference surface and a second reference surface respectively corresponding to the first surface and the second surface, a distance from the first reference surface to the second reference surface being known;
placing the reference gauge in the temperature-controlled chamber along with the measurement target; and
relatively measuring the distance between the first surface and the second surface with reference to a distance between the first reference surface and the second reference surface.

2. The coefficient-of-thermal-expansion measurement method according to claim 1 , wherein the at least one measurement-target temperature adjuster comprises measurement-target temperature adjusters attached to at least a pair of faces of the measurement target at symmetric positions with respect to a center axis of the measurement target.

3. The coefficient-of-thermal-expansion measurement method according to claim 1 , wherein an output of the measurement-target temperature adjuster is adjusted depending on a difference between the temperature measured by the measurement-target thermometer and the temperature setpoint of the measurement-target temperature adjuster.

4. The coefficient-of-thermal-expansion measurement method according to claim 1 , wherein the measurement-target temperature adjuster stops operating when a difference between the temperature measured by the measurement-target thermometer and the temperature setpoint falls below a desired threshold.

5. The coefficient-of-thermal-expansion measurement method according to claim 1 , wherein a heat capacity of the measurement-target temperature adjuster is smaller than a heat capacity of the measurement target.

6. The coefficient-of-thermal-expansion measurement method according to claim 1 , wherein the reference gauge is made of an ultra-low or zero coefficient-of-expansion material whose expansion due to a temperature change between the first temperature and the second temperature is negligible in terms of accuracy, or made of a material whose coefficient of expansion is known.

7. The coefficient-of-thermal-expansion measurement method according to claim 1 , further comprising:
obtaining:
a reference-gauge temperature adjuster placed in the temperature-controlled chamber and configured to heat or cool the reference gauge; and
a reference-gauge thermometer attached to the reference gauge and configured to measure a temperature of the reference gauge;

heating or cooling the measurement target and the reference gauge using the temperature-controlled chamber, the measurement-target temperature adjuster and the reference-gauge temperature adjuster after a temperature setpoint of the temperature-controlled chamber, the measurement-target temperature adjuster and the reference-gauge temperature adjuster is set at the first temperature;
relatively measuring the distance between the first surface and the second surface after the temperature measured by each of the measurement-target thermometer and the reference-gauge thermometer is determined to be stabilized at the first temperature;
heating or cooling the measurement target and the reference gauge using the temperature-controlled chamber, the measurement-target temperature adjuster and the reference-gauge temperature adjuster after the temperature setpoint of the temperature-controlled chamber, the measurement-target temperature adjuster and the reference-gauge temperature adjuster is changed to the second temperature;
relatively measuring the distance between the first surface and the second surface after the temperature measured by each of the measurement-target thermometer and the reference-gauge thermometer is determined to be stabilized at the second temperature; and
calculating the coefficient of thermal expansion of the measurement target from the distance between the first surface and the second surface at the first temperature and the distance between the first surface and the second surface at the second temperature.

8. A coefficient-of-thermal-expansion measuring device configured to measure a coefficient of thermal expansion of a measurement target having first and second surfaces, the device comprising:
a temperature-controlled chamber configured to house the measurement target, the temperature-controlled chamber having an adjustable internal temperature;
a distance measuring device configured to measure a distance between the first surface and the second surface;
a measurement-target temperature adjuster placed in the temperature-controlled chamber and configured to change a temperature of the measurement target;
a measurement-target thermometer attached to the measurement target and configured to measure the temperature of the measurement target; and
a reference gauge having a first reference surface and a second reference surface respectively corresponding to the first surface and the second surface, a distance from the first reference surface to the second reference surface being known, wherein
the reference gauge is configured to be in the temperature-controlled chamber along with the measurement target; and
the coefficient-of-thermal-expansion measuring device is configured to relatively measure the distance between the first surface and the second surface with reference to a distance between the first reference surface and the second reference surface.

9. The coefficient-of-thermal-expansion measuring device according to claim 8 , wherein
the distance measuring device comprises a coordinate measuring machine, and
the temperature-controlled chamber is provided with a measurement opening through which a measurement probe of the coord

Assignees

• Mitutoyo Corp

Inventors

• Hagino Takeshi
• Yokoyama Yuichiro

Classifications

• G01B5/0014 Primary

  due to temperature (on machine tools B23Q11/0003) · CPC title

• G01B5/0009

  Guiding surfaces; Arrangements compensating for non-linearity there-of · CPC title

• G01B7/34

  for measuring roughness or irregularity of surfaces · CPC title

• G01N25/16 Primary

  by investigating thermal coefficient of expansion · CPC title

• G01B5/28

  for measuring roughness or irregularity of surfaces · CPC title