Coefficient-of-thermal-expansion measurement method of dimension reference gauge, measuring device for coefficient of thermal expansion and reference gauge

Patent metadata

Field	Value
Publication number	US-10352678-B2
Application number	US-201615271593-A
Country	US
Kind code	B2
Filing date	Sep 21, 2016
Priority date	Sep 25, 2015
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.

First claim

What is claimed is:

1. A coefficient-of-thermal-expansion measuring device of a measurement target in a form of a dimension reference gauge, the coefficient-of-thermal-expansion being measured for a section from a first surface to a second surface of the measurement target that are distanced in a drawing direction of the measurement target, the coefficient-of-thermal-expansion measuring device comprising:
a reference gauge comprising a first reference surface and a second reference surface each corresponding to the first surface and the second surface, a length from the first reference surface to the second reference surface being known;
a temperature-controlled chamber configured to adjust an interior temperature thereof and to house the measurement target and the reference gauge, the temperature-controlled chamber comprising a measurement surface provided with a measurement aperture;
a measurement target support base placed in an inside of the temperature-controlled chamber and configured to support the measurement target;
a reference gauge support base placed in the inside of the temperature-controlled chamber and configured to support the reference gauge; and
a coordinate measuring machine comprising a measurement probe that is introducible into the inside of the temperature-controlled chamber through the measurement aperture.

2. A coefficient-of-thermal-expansion measuring device of a measurement target in a form of a dimension reference gauge, the coefficient-of-thermal-expansion of the measurement target being measured for a plurality of measurement sections defined by a plurality of pairs of a measurement start point and a measurement end point of the measurement target that are distanced in a drawing direction of the measurement target, the coefficient-of-thermal-expansion measuring device comprising:
a reference gauge comprising a plurality of pairs of reference start points and reference end points that define a plurality of reference sections corresponding to the plurality of measurement sections, a length of each of the reference sections being known;
a temperature-controlled chamber configured to adjust an interior temperature thereof and to house the measurement target and the reference gauge, the temperature-controlled chamber comprising a measurement surface provided with a measurement aperture; and
a coordinate measuring machine comprising a measurement probe that is introducible into an inside of the temperature-controlled chamber through the measurement aperture.

3. The coefficient-of-thermal-expansion measuring device according to claim 1 , wherein
the reference gauge support base is configured to support the reference gauge between the measurement target and the measurement aperture.

4. The coefficient-of-thermal-expansion measuring device according to claim 3 , wherein
a length of the reference gauge in the drawing direction is shorter than a length of the measurement target in the drawing direction by a predetermined dimension.

5. The coefficient-of-thermal-expansion measuring device according to claim 4 , wherein
when the first and second relative measurements are performed, the first reference surface and the first surface are coplanarly arranged or the second reference surface and the second surface are coplanarly arranged.

6. The coefficient-of-thermal-expansion measuring device according to claim 1 , wherein
the measurement target support base comprises a first measurement target support base and a second measurement target support base,
the first measurement target support base and the second measurement target support base are configured to restrict a displacement of the measurement target in two directions intersecting the drawing direction and to permit a rotation of the measurement target around axes in the two directions intersecting the drawing direction,
one of the first measurement target support base and the second measurement target support base is configured to restrict a displacement of the measurement target in the drawing direction and the other of the first measurement target support base and the second measurement target support base is configured to permit the displacement of the measurement target in the drawing direction,
one of the first measurement target support base and the second measurement target support base is configured to restrict a rotation of the measurement target around an axis in the drawing direction and the other one of the first measurement target support base and the second measurement target support base is configured to permit the rotation of the measurement target around the axis in the drawing direction,
the reference gauge support base comprises a first reference gauge support base and a second reference gauge support base,
the first reference gauge support base and the second reference gauge support base are configured to restrict a displacement of the reference gauge in the two directions intersecting the drawing direction and to permit a rotation of the reference gauge around axes in the two directions intersecting the drawing direction,
one of the first reference gauge support base and the second reference gauge support base is configured to restrict a displacement of the reference gauge in the drawing direction and the other of the first reference gauge support base and the second reference gauge support base is configured to permit the displacement of the reference gauge in the drawing direction, and
one of the first reference gauge support base and the second reference gauge support base is configured to restrict a rotation of the reference gauge around an axis in the drawing direction and the other of the first reference gauge support base and the second reference gauge support base is configured to permit a rotation of the reference gauge around an axis in the drawing direction.

7. The coefficient-of-thermal-expansion measuring device according to claim 6 , wherein
the first measurement target support base comprises one or two of a conical-hole-sphere contact portion, a plane-sphere contact portion and a V-shaped-groove-sphere contact portion in contact with a bottom face of the measurement target, and
the second measurement target support base comprises at least one of the conical-hole-sphere contact portion, the plane-sphere contact portion and the V-shaped-groove-sphere contact portion in contact with the bottom face of the measurement target that is not provided to the first measurement target support base.

8. The coefficient-of-thermal-expansion measuring device according to claim 6 , wherein
the first measurement target support base comprises one of a conical-hole-sphere contact portion and a plane-sphere contact portion in contact with a bottom face of the measurement target, and
the second measurement target support base comprises the other one of the conical-hole-sphere contact portion and the plane-sphere contact portion in contact with the bottom face of the measurement target, and
one of the first measurement target support base and the second measurement target support base comprises a sphere contact portion in contact with one of lateral faces of the measurement target and a pressing unit that is configured to press the one of lateral faces of the measurement target against the sphere contact portion.

9. The coefficient-of-thermal-expansion measuring device according to claim 6 , wherein
the first reference gauge support base comprises one or two of a conical-hole-sphere contact portion, a plane-sphere contact portion and a V-shaped-groove-sphere contact portion in contact with a bottom face of the reference gauge, and
the second reference gauge support base comprises at least one of the conical-hole-sphere contact po

Assignees

• Mitutoyo Corp

Inventors

• Yokoyama Yuichiro
• Hagino Takeshi
• Kuriyama Yutaka

Classifications

• G01N25/16 Primary

  by investigating thermal coefficient of expansion · CPC title

• G01B5/008 Primary

  using coordinate measuring machines · CPC title

• G01B3/02

  Rulers with scales or marks for direct reading (measuring tapes G01B3/10) · CPC title