Co or Ni and Cu integration for small and large features in integrated circuits

Patent metadata

Field	Value
Publication number	US-10622252-B2
Application number	US-201715798168-A
Country	US
Kind code	B2
Filing date	Oct 30, 2017
Priority date	Jan 8, 2016
Publication date	Apr 14, 2020
Grant date	Apr 14, 2020

Abstract

In one embodiment of the present disclosure, a microfeature workpiece includes at least two features of two different sizes disposed in a dielectric, wherein a width of a first feature is less than or equal to 17 nm and wherein the first feature is filled with cobalt or nickel, and wherein a width of a second feature is greater than 20 nm and wherein the second feature is filled with a stack layer of cobalt or nickel and copper.

First claim

The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:

1. A microfeature workpiece, comprising:
at least two features of two different sizes disposed in a dielectric:
wherein a width of a first feature of the at least two features is less than or equal to 17 nm, and wherein a width of a second feature of the at least two features is greater than 20 nm; and
a first metal layer disposed on the microfeature workpiece, the first metal layer comprising a metal selected from the group consisting of cobalt and nickel, the first metal layer completely filling the first feature of the at least two features and not completely filling the second feature of the at least two features; and
a second metal layer electrochemically deposited on the microfeature workpiece, wherein the second metal layer is a copper layer that stack fills in the first metal layer of the second feature of the at least two features.

2. The microfeature workpiece of claim 1 , wherein the microfeature workpiece has been heat treated after deposition of the second metal layer.

3. The microfeature workpiece of claim 2 , wherein the first and second metal layers have been annealed by the heat treating.

4. The microfeature workpiece of claim 2 , wherein the second metal layer has reflowed due to the heat treatment to at least partially fill the second feature of the at least two features.

5. The microfeature workpiece of claim 1 , wherein the first metal layer has been plasma treated using hydrogen plasma or hydrogen radicals (H*) prior to electrochemically depositing the second metal layer.

6. The microfeature workpiece of claim 1 , wherein the first metal layer has been heat treated before depositing the second metal layer.

7. The microfeature workpiece of claim 1 , wherein the second metal layer is a conformal or superconformal layer.

8. The microfeature workpiece of claim 1 , wherein the second metal layer includes an overburden.

9. The microfeature workpiece of claim 1 , wherein the second feature of the at least two features has been partially filled by the second metal layer without depositing an overburden on the microfeature workpiece.

10. The microfeature workpiece of claim 1 , further comprising a third metal layer electrochemically deposited on the second metal layer.

11. The microfeature workpiece of claim 10 , wherein the third metal layer is one or more of an overburden, a cap, a fill layer, a conformal conductive layer, or a superconformal conductive layer.

12. The microfeature workpiece of claim 1 , wherein the first metal layer is a first seed layer.

13. The microfeature workpiece of claim 12 , wherein a second seed layer is disposed on the first seed layer.

14. The microfeature workpiece of claim 13 , wherein the second seed layer is different in metal composition from the first seed layer.

15. The microfeature workpiece of claim 13 , wherein the second seed layer is a copper seed layer.

16. The microfeature workpiece of claim 1 , wherein the second metal layer is deposited over an entire surface of the first metal layer.

17. The microfeature workpiece of claim 1 , wherein the second metal layer is a bottom-up fill layer.

18. The microfeature workpiece of claim 1 , wherein the microfeature workpiece includes an adhesion or barrier layer in the at least the two features between the dielectric and the first metal layer.

19. The microfeature workpiece of claim 1 , wherein the cobalt or nickel in the first feature of the at least two features has been reflowed.

20. The microfeature workpiece of claim 1 , wherein the cobalt or nickel in the first feature of the at least two features and the stack layer of cobalt or nickel and copper in the second feature of the at least two features has been reflowed.

21. The microfeature workpiece of claim 1 , wherein the first and second features of the at least two features include an overburden.

22. The microfeature workpiece of claim 2 , wherein heat treatment of the microfeature workpiece occurred in a temperature range of 150 degrees C. to 400 degrees C.

Assignees

• Applied Materials Inc

Inventors

• Shaviv Roey
• Emesh Ismail T

Classifications

• H01L21/76883

  Electricity · mapped topic

• H01L21/76877

  Electricity · mapped topic

• H01L23/53209

  Electricity · mapped topic

• H01L21/2885

  Electricity · mapped topic

• H01L23/53238

  Electricity · mapped topic