Etching process method

Patent metadata

Field	Value
Publication number	US-10600654-B2
Application number	US-201715618557-A
Country	US
Kind code	B2
Filing date	Jun 9, 2017
Priority date	Jun 10, 2016
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

An etching process method is provided that includes outputting a first high frequency power of a first frequency from a first high frequency power supply, and outputting a second high frequency power of a second frequency, which is lower than the first high frequency, from a second high frequency power supply in an cryogenic temperature environment where a substrate temperature is controlled to be less than or equal to −35° C.; generating a plasma by adding a hydrocarbon gas containing at least 3 carbon atoms to an etching gas containing carbon, hydrogen, and fluorine; and etching a silicon oxide film or a laminated film made up of laminated layers of silicon-containing films having different compositions using the generated plasma.

First claim

What is claimed is:

1. An etching process method comprising:
outputting a first high frequency power of a first frequency from a first high frequency power supply, and outputting a second high frequency power of a second frequency, which is lower than the first high frequency, from a second high frequency power supply in an environment where a substrate temperature is controlled to be less than or equal to −35° C.;
adding a hydrocarbon gas containing at least 3 carbon atoms to an etching gas containing carbon, hydrogen, and fluorine for generating a plasma; and
etching a silicon oxide film or a laminated film made up of laminated layers of silicon-containing films having different compositions using generated plasma,
wherein the hydrocarbon gas contains one double bond between carbon atoms, and
wherein the hydrocarbon gas is butene.

2. The etching process method according to claim 1 , wherein an addition ratio of the hydrocarbon gas is controlled to be less than or equal to 10% of a total flow rate of the etching gas and the hydrocarbon gas.

3. The etching process method according to claim 1 , wherein a partial pressure ratio of the etching gas and the hydrocarbon gas is 2:1, and an addition ratio of the hydrocarbon gas is controlled to be 7% of a total flow rate of the etching gas and the hydrocarbon gas.

4. The etching process method according to claim 1 , further comprising controlling a temperature of a chiller that is configured to cool a mounting table for mounting the substrate from −60° C. to −70° C.

5. An etching process method comprising:
outputting a first high frequency power of a first frequency from a first high frequency power supply, and outputting a second high frequency power of a second frequency, which is lower than the first high frequency, from a second high frequency power supply in an environment where a substrate temperature is controlled to be less than or equal to −35° C.;
adding a hydrocarbon gas containing at least 3 carbon atoms to an etching gas containing hydrogen, sulfur, and fluorine for generating a plasma; and
etching a silicon oxide film or a laminated film made up of laminated layers of silicon-containing films having different compositions using generated plasma,
wherein the hydrocarbon gas contains one double bond between carbon atoms.

6. The etching process method according to claim 5 , wherein the hydrocarbon gas is propylene.

7. The etching process method according to claim 5 , wherein an addition ratio of the hydrocarbon gas is controlled to be less than or equal to 10% of a total flow rate of the etching gas and the hydrocarbon gas.

Assignees

• Tokyo Electron Ltd

Inventors

• Tomura Maju
• Kudo Jin
• Ohya Yoshinobu

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P50/73

  using masks for insulating materials · CPC title