Cooling base with spiral channels for ESC

Patent metadata

Field	Value
Publication number	US-10586718-B2
Application number	US-201615335059-A
Country	US
Kind code	B2
Filing date	Oct 26, 2016
Priority date	Nov 11, 2015
Publication date	Mar 10, 2020
Grant date	Mar 10, 2020

Abstract

Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.

First claim

What is claimed is:

1. A cooling base, comprising:
a cap;
a body having an outer periphery, a center portion, a top surface and a lower surface, wherein the cap is disposed on the lower surface of the body, the body further comprising:
an inner ring-shaped channel and an outer ring-shaped channel; and
a plurality of cooling channels disposed in the body and having at least a portion of each of the cooling channels in contact with the cap and formed in a polar array of spirals, wherein each cooling channel of the plurality of cooling channels comprises:
an inlet and an outlet; and
a plurality of channel segments which together form a fluid pathway between the inlet and the outlet, the fluid pathway extending from the inlet to the inner ring-shaped channel, from the inner ring-shaped channel out to the outer ring-shaped channel, and from the outer ring-shaped channel back towards the inner ring-shaped channel to the outlet, wherein the plurality of channel segments are configured for flowing a fluid therethrough.

2. The cooling base of claim 1 , wherein the body further comprises:
at least one thermal compensation plenum disposed on the top surface of the body, wherein the thermal compensation plenum is configured for a cooling fluid to flow therethrough.

3. The cooling base of claim 2 , wherein the plurality of cooling channels comprises at least 4 cooling channels.

4. The cooling base of claim 1 , wherein the plurality of channel segments comprise:
a first segment extending from the inlet to the inner ring-shaped channel;
a second segment extending along the inner ring-shaped channel and in fluid communication with the first segment;
a third segment extending from the inner ring-shaped channel to the outer ring-shaped channel and in fluid communication with the second segment;
a fourth segment extending along the outer ring-shaped channel and in fluid communication with the third segment; and
a fifth segment extending from the outer ring-shaped channel to the outlet toward the inner ring-shaped channel and in fluid communication with the fourth segment.

5. The cooling base of claim 4 , wherein the second segment is a part of the inner ring-shaped channel and the fourth segment is part of the outer ring-shaped channel.

6. The cooling base of claim 1 , wherein the cooling channels are configured to allow a portion of the fluid flowing in through the inlet to a first cooling channel of the plurality of cooling channels exits the outlet of a second cooling channel of the plurality of cooling channels.

7. The cooling base of claim 1 , wherein the plurality of cooling channels comprises at least 6 cooling channels.

8. The cooling base of claim 1 further comprising:
an electrostatic chuck coupled to the body.

9. A substrate support assembly comprising:
an electrostatic chuck having a heat, a workpiece support surface and a bottom surface;
a cooling base, comprising:
a cap;
a body having an outer periphery, a center portion, a top surface and a lower surface, wherein the cap is disposed on the lower surface of the body, the body further comprising:
an inner ring-shaped channel and an outer ring-shaped channel; and
a plurality of cooling channels disposed in the body and having at least a portion of each of the cooling channels in contact with the cap and formed in a polar array of spirals, wherein each cooling channel of the plurality of cooling channels comprises:
an inlet and an outlet; and
a plurality of channel segments which together form a fluid pathway between the inlet and the outlet, the pathway extending from the inlet to the inner ring-shaped channel, from the inner ring-shaped channel out to the outer ring-shaped channel, and from the outer ring-shaped channel back towards the inner ring-shaped channel to the outlet, wherein the segments are configured for flowing a fluid therethrough.

10. The cooling base of claim 9 , wherein the body further comprises:
at least one thermal compensation plenum disposed on the top surface of the body, wherein the thermal compensation plenum is configured for a cooling fluid to flow therethrough.

11. The cooling base of claim 10 , wherein the thermal compensation plenum further comprises:
a first thermal compensation plenum disposed at the center portion; and
a second thermal compensation plenum disposed at the outer periphery.

12. The cooling base of claim 10 , wherein the plurality of cooling channels comprises at least 4 cooling channels.

13. The cooling base of claim 9 , wherein the segments comprise:
a first segment extending from the inlet to the inner ring-shaped channel;
a second segment extending along the inner ring-shaped channel and in fluid communication with the first segment;
a third segment extending from the inner ring-shaped channel to the outer ring-shaped channel and in fluid communication with the second segment;
a fourth segment extending along the outer ring-shaped channel and in fluid communication with the third segment; and
a fifth segment extending from the outer ring-shaped channel to the outlet toward the inner ring-shaped channel and in fluid communication with the fourth segment.

14. The cooling base of claim 13 , wherein the second segment is a part of the inner ring-shaped channel and the fourth segment is part of the outer ring-shaped channel.

15. The cooling base of claim 9 , wherein the plurality of cooling channels are configured to allow a portion of the fluid flowing in through the inlet to a first cooling channel of the plurality of cooling channels exits the outlet of a second cooling channel of the plurality of cooling channels.

16. The cooling base of claim 9 , wherein the plurality of cooling channels further comprises at least 6 cooling channels.

17. The cooling base of claim 9 , wherein the plurality of cooling channels are not connected to each other by the inner ring-shaped channel or the outer ring-shaped channel.

18. The cooling base of claim 9 , wherein the segments comprise:
a first segment extending from the inlet to the inner ring-shaped channel;
a second segment extending along the inner ring-shaped channel and in fluid communication with the first segment, wherein the second segment is a part of the inner ring-shaped channel.

Assignees

• Applied Materials Inc

Inventors

• Knyazik Vladimir
• Rauf Shahid
• Prouty Stephen
• Smith Roland
• Koosau Denis M

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• F28F2210/02

  with particular branching, e.g. fractal conduit arrangements · CPC title

• F28F3/12 Primary

  Elements constructed in the shape of a hollow panel, e.g. with channels {(F28D1/02, F28D1/03 take precedence)} · CPC title