Texture inducing structure for alloy films and texture inducing method thereof

Patent metadata

Field	Value
Publication number	US-10580558-B2
Application number	US-201715641238-A
Country	US
Kind code	B2
Filing date	Jul 4, 2017
Priority date	Jun 7, 2017
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

A texture inducing structure for alloy films is provided. The texture inducing structure includes a substrate, a texture-inducing layer and a deposition layer. The texture-inducing layer is formed on the substrate. The texture-inducing layer has an intrinsically strong crystalline texture, a texture coefficient of the texture-inducing layer is greater than 2, and a thickness of the texture-inducing layer is ranged from 0.1 μm to 6 μm. The deposition layer is formed on the texture-inducing layer. A texture of the deposition layer is induced by the texture-inducing layer thereby changing the magnetic anisotropy and the magnetic strength of the deposition layer, a thickness of the deposition layer is ranged from 1 μm˜60 μm, and the thickness of the deposition layer is greater than that of the texture-inducing layer.

First claim

What is claimed is:

1. A texture inducing structure for alloy films, the texture inducing structure comprising:
a substrate;
a texture-inducing layer formed on the substrate, wherein the texture-inducing layer has an intrinsically crystalline texture, a texture coefficient of the texture-inducing layer is greater than 2, and a thickness of the texture-inducing layer is ranged from 0.1 μm to 6 μm; and
a deposition layer formed on the texture-inducing layer, wherein the texture of the deposition layer is induced by the texture-inducing layer thereby changing the magnetic anisotropy and the magnetic strength of the deposition layer, a thickness of the deposition layer is ranged from 1˜60 μm, and the thickness of the deposition layer is greater than that of the texture-inducing layer;
wherein the texture coefficient of the texture-inducing layer can be calculated by the following equation:

T
.
C
⁢

.

(
002
)

=

I

(
002
)

/

I

0
⁢

(
002
)

1
n

⁢

∑

[

I

(

h
⁢

⁢
k
⁢

⁢
l

)

/

I

0
⁢

(

h
⁢

⁢
k
⁢

⁢
l

)

]

;

where I (002) and I (hkl) are the intensities of the peaks of X-ray diffraction patterns of HCP (002) and HCP (hkl) taken on the texture-inducing layer, respectively; I 0(002) and I 0(hkl) are the intensities of the peaks of standard X-ray diffraction patterns from JCPDS card of HCP (002) and HCP (hkl) of the texture-inducing layer, respectively.

2. The texture inducing structure of claim 1 , wherein a single layer of the texture-inducing layer and a single layer of the deposition layer are stacked to form a composite structure, and the composite structure is repeatedly stacked to form a multilayered composite structure.

3. The texture inducing structure of claim 1 , wherein the texture coefficient of the texture-inducing layer is greater than 2.5, and the thickness of the texture-inducing layer is ranged from 0.1 μm˜6 μm.

4. The texture inducing structure of claim 1 , wherein the texture-inducing layer is a CoP alloy or a CoNiMnP alloy.

5. The texture inducing structure of claim 1 , wherein the texture-inducing layer and the deposition layer are made from permanent magnet alloys.

6. A texture inducing method for alloy films, the texture inducing method comprising:
providing a substrate;
depositing a texture-inducing layer on the substrate, wherein the texture-inducing layer has an intrinsically crystalline texture, a texture coefficient of the texture-inducing layer is greater than 2, and a thickness of the texture-inducing layer is ranged from 0.1 μm to 6 μm; and
depositing a deposition layer on the texture-inducing layer, wherein the thickness of the deposition layer is greater than that of the texture-inducing layer, and the thickness of the deposition layer is ranged from 1 μm to 60 μm;
wherein the texture coefficient of the texture-inducing layer can be calculated by the following equation:

T
.
C
⁢

.

(
002
)

=

I

(
002
)

/

I

0
⁢

(
002
)

1
n

⁢

∑

[

I

(

h
⁢

⁢
k
⁢

⁢
l

)

Assignees

• Univ Nat Tsing Hua

Inventors

• Hsiao Chi-Ju
• Hsiao Heng-Sheng
• Chang Jen-Yuan
• Chin Tsung-Shune

Classifications

• C01B25/08

  Other phosphides · CPC title

• C22C19/07

  based on cobalt · CPC title

• B81B3/0091

  Magnetic properties, e.g. guiding magnetic flux · CPC title

• B32B15/043

  of metal (B32B15/01 takes precedence) · CPC title

• C01B25/088

  containing plural metal · CPC title