Dressing board, cutting blade dressing method, and cutting apparatus

Patent metadata

Field	Value
Publication number	US-10576608-B2
Application number	US-201815873578-A
Country	US
Kind code	B2
Filing date	Jan 17, 2018
Priority date	Jan 17, 2017
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

Disclosed herein is a dressing board for dressing a cutting blade. The dressing board is held on a chuck table in dressing the cutting blade. The dressing board includes a bar code formed on the front side of the dressing board for indicating kind information on the dressing board, and a groove code formed on the front side of the dressing board at an edge portion thereof, the groove code being composed of grooves having pattern corresponding to that of the bar code. Even when the bar code is cut off by the cutting blade in dressing the cutting blade, the kind information on the dressing board is indicated by the groove code left on the front side of the dressing board.

First claim

What is claimed is:

1. A dressing board for dressing a cutting blade, the dressing board having a front side and a back side opposite to the front side, the back side of the dressing board being held on a chuck table in dressing the cutting blade, the dressing board comprising:
a bar code formed on the front side of the dressing board for indicating kind information on the dressing board; and
a groove code formed on the front side of the dressing board at an edge portion thereof, the groove code being composed of grooves having a pattern corresponding to that of the bar code;
wherein even when the bar code is cut off by the cutting blade in dressing the cutting blade, the kind information on the dressing board is indicated by the groove code left on the front side of the dressing board.

2. The dressing board according to claim 1 , wherein the kind information on the dressing board is indicated by using the width of each groove, the number of the grooves, the spacing between the grooves, and the length of each groove.

3. A cutting blade dressing method of dressing a cutting blade by using a dressing board having a front side and a back side opposite to the front side, the front side having a bar code for indicating kind information on the dressing board, the cutting blade dressing method comprising:
a holding step of holding the dressing board on a chuck table in a condition where the front side of the dressing board is exposed;
a dressing board recording step of imaging the bar code of the dressing board held on the chuck table and next recording the kind information on the dressing board as included in the bar code, to a control unit of a cutting apparatus;
a groove code deciding step of deciding a pattern of a groove code to be formed on the front side of the dressing board at an edge portion thereof, according to the kind information recorded in the dressing board recording step;
a groove code forming step of forming the pattern of the groove code decided in the groove code deciding step, on the front side of the dressing board at the edge portion by using the cutting blade; and
a dressing step of cutting the front side of the dressing board after performing the groove code forming step, by using the cutting blade, thereby dressing the cutting blade.

4. A cutting apparatus comprising:
a chuck table for holding a workpiece;
an auxiliary chuck table for holding a dressing board having a front side on which a bar code is formed, the bar code indicating kind information on the dressing board;
a cutting unit having a cutting blade for cutting the workpiece held on the chuck table;
an imaging unit for imaging the workpiece held on the chuck table and also imaging the bar code of the dressing board; and
a control unit for controlling the chuck table, the auxiliary chuck table, the cutting unit, and the imaging unit;
the control unit including
a bar code determining section for operating the imaging unit to image the bar code of the dressing board held on the auxiliary chuck table and determining the kind information on the dressing board as included in the bar code, and
a groove code forming section for converting the kind information included in the bar code into a pattern of a groove code and forming the groove code corresponding to the bar code at an edge portion of the dressing board.

Assignees

• Disco Corp

Inventors

• Sekiya Kazuma

Classifications

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/0618

  using identification means, e.g. labels on substrates or labels on containers · CPC title

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title