Cutting apparatus

Patent metadata

Field	Value
Publication number	US-10361102-B2
Application number	US-201815875242-A
Country	US
Kind code	B2
Filing date	Jan 19, 2018
Priority date	Jan 20, 2017
Publication date	Jul 23, 2019
Grant date	Jul 23, 2019

Abstract

A cutting apparatus includes a cutting unit including a cutting blade that has a cutting edge for cutting a dresser board. An elastic wave detection sensor is disposed in the cutting unit, for detecting an elastic wave produced when the dresser board is cut. The elastic wave detection sensor produces an output signal representing the detected elastic wave when the cutting blade cuts the dresser board and is dressed thereby, the output signal being variable as the cutting blade is progressively dressed by the dresser board. A control unit stores in advance, as a threshold value, the value of the output signal when the dressing of the cutting blade is completed. The control unit stops cutting the dresser board with the cutting blade and finishes the dressing of the cutting blade when the output signal produced by the elastic wave detection sensor reaches the threshold value.

First claim

What is claimed is:

1. A cutting apparatus comprising:
a holding table for holding a plate-shaped workpiece;
a cutting unit including a cutting blade that has a cutting edge for cutting the plate-shaped workpiece held on said holding table;
a cutting-feed unit for cutting-feeding said holding table and said cutting unit relatively to each other in cutting-feed directions;
an indexing-feed unit for indexing-feeding said holding table and said cutting unit relatively to each other in indexing-feed directions perpendicular to said cutting-feed directions;
an elastic wave detection sensor disposed in either one of said cutting unit and said holding table, for detecting an elastic wave produced when the plate-shaped workpiece held on said holding table is cut by said cutting blade; and
a control unit for controlling said cutting-feed unit and said indexing-feed unit, wherein
said elastic wave detection sensor produces an output signal representing the detected elastic wave when said cutting blade cuts a dresser board held on said holding table and is dressed thereby, said output signal being variable as said cutting blade is progressively dressed by said dresser board, and said control unit includes a storage unit that stores in advance, a threshold value, which is a previously determined value corresponding to an output signal produced by said elastic wave detection sensor when the dressing of said cutting blade is completed, and
said control unit stops cutting said dresser board with said cutting blade and finishes the dressing of said cutting blade on the dresser board held on said holding table when the output signal produced by said elastic wave detection sensor reaches the threshold value stored in said storage unit.

Assignees

• Disco Corp

Inventors

• Kaminaga Takuya
• Sugiyama Tomoaki
• Miyakawa Saki

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P52/00 Primary

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• B26D5/005

  Computer numerical control means · CPC title