Three dimensional NAND memory device with drain select gate electrode shared between multiple strings

Patent metadata

Field	Value
Publication number	US-10566059-B2
Application number	US-201816014028-A
Country	US
Kind code	B2
Filing date	Jun 21, 2018
Priority date	Apr 30, 2018
Publication date	Feb 18, 2020
Grant date	Feb 18, 2020

Abstract

Systems, methods, and devices of the various embodiments provide both “string-sharing” drain select gate electrodes and “string-selective” drain select gate electrodes in vertical NAND strings. Various embodiments may provide two or more vertical NAND strings sharing a common drain select gate electrode while also having separate additional drain select gate electrodes not electrically connected across the two or more vertical NAND strings.

First claim

What is claimed is:

1. A memory device, comprising:
an alternating stack of insulating layers and electrically conductive layers located over a substrate;
a first vertical NAND string extending through the alternating stack, the first vertical NAND string comprising a first drain region and first memory cell charge storage transistors in a series connection with a first drain select transistor and a second drain select transistor;
a second vertical NAND string extending through the alternating stack, the second vertical NAND string comprising a second drain region and second memory cell charge storage transistors in a series connection with a third drain select transistor and a fourth drain select transistor;
a common drain select gate electrode shared between the first drain select transistor and the third drain select transistor;
a first separate drain select gate electrode connected to the second drain select transistor;
a second separate drain select gate electrode connected to the fourth drain select transistor,
wherein the first separate drain select gate electrode and the second separate drain select gate electrode are not electrically connected to each other;
wherein:
the memory device is configured such that during an erase operation, the common drain select gate electrode is biased with a first bias voltage and a selected one of the first separate drain select gate electrode or the second separate drain select gate electrode is biased with a second bias voltage; and
the first bias voltage is a lower voltage than the second bias voltage.

2. The memory device of claim 1 , wherein the first and second vertical NAND strings are located in a same memory block.

3. The memory device of claim 1 , wherein the common drain select gate electrode is shared between four vertical NAND strings.

4. The memory device of claim 1 , further comprising:
a third vertical NAND string extending through the alternating stack, the third vertical NAND string comprising a third drain region and third memory cell charge storage transistors in a series connection with a fifth drain select transistor and a sixth drain select transistor;
a fourth vertical NAND string extending through the alternating stack, the fourth vertical NAND string comprising a fourth drain region and fourth memory cell charge storage transistors in a series connection with a seventh drain select transistor and an eighth drain select transistor;
a third separate drain select gate electrode connected to the sixth drain select transistor; and
a fourth separate drain select gate electrode connected to the eighth drain select transistor,
wherein:
the common drain select gate electrode is further shared between the fifth drain select transistor and the seventh drain select transistor; and
the first separate drain select gate electrode, the second separate drain select gate electrode, the third separate drain select gate electrode, and the fourth separate drain select gate electrode are not electrically connected to each other.

5. The memory device of claim 4 , wherein the second drain select transistor, the fourth drain select transistor, the sixth drain select transistor, and the eighth drain select transistor each comprise three series connected transistors in each respective vertical NAND string.

6. The memory device of claim 4 , wherein the first drain select transistor, the third drain select transistor, the fifth drain select transistor, and the seventh drain select transistor each comprise two or more series connected transistors in each respective vertical NAND string.

7. The memory device of claim 1 , wherein the memory device is configured for gate induced drain leakage erase.

8. The memory device of claim 1 , wherein:
the first drain select transistor and the second drain select transistor are connected between a bit line and the first memory cell charge storage transistors on the first vertical NAND string; and
the third drain select transistor and the fourth drain select transistor are connected between the bit line and the second memory cell charge storage transistors on the second vertical NAND string.

9. The memory device of claim 8 , wherein:
the first drain select transistor is connected to the bit line and the second drain select transistor is connected between the first drain select transistor and the first memory cell charge storage transistors; and
the third drain select transistor is connected to the bit line and the fourth drain select transistor is connected between the third drain select transistor and the second memory cell charge storage transistors.

10. The memory device of claim 1 , wherein:
the memory device is configured such that during a programming operation, the common drain select gate electrode is biased with a first bias voltage, a selected one of the first separate drain select gate electrode or the second separate drain select gate electrode is biased with a second bias voltage, and an un-selected one of the first separate drain select gate electrode or the second separate drain select gate electrode is biased with a third voltage; and
the first bias voltage and the second bias voltage are both higher voltages than the third bias voltage.

11. A method of operating a memory device comprising an alternating stack of insulating layers and electrically conductive layers located over a substrate; a first vertical NAND string extending through the alternating stack, the first vertical NAND string comprising a first drain region and first memory cell charge storage transistors in a series connection with a first drain select transistor and a second drain select transistor; a second vertical NAND string extending through the alternating stack, the second vertical NAND string comprising a second drain region and second memory cell charge storage transistors in a series connection with a third drain select transistor and a fourth drain select transistor; a common drain select gate electrode shared between the first drain select transistor and the third drain select transistor; a first separate drain select gate electrode connected to the second drain select transistor; and a second separate drain select gate electrode connected to the fourth drain select transistor, wherein the first separate drain select gate electrode and the second separate drain select gate electrode are not electrically connected to each other, the method comprising:
applying a first bias voltage to the common drain select gate electrode during an erase operation of the first memory cell charge storage transistors or the second memory cell charge storage transistors; and
applying a second bias voltage to the common drain select gate during a programming operation of the first memory cell charge storage transistors or the second memory cell charge storage transistors,
wherein the first bias voltage is lower than the second bias voltage.

12. The method of claim 11 , further comprising activating only one of the first vertical NAND string or the second vertical NAND string during the programming operation.

13. The method of claim 11 , wherein the erase operation is a gate induced drain leakage erase operation.

14. A method of operating a memory device comprising an alternating stack of insulating layers and electrically conductive layers located over a substrate; a first vertical NAND string extending through the alternating stack, the first vertical NAND string comprising a first drain region and first memory cell charge storage transistors in a series connection with a first drain select transistor and a second drain select transistor; a second vertical NAND stri

Assignees

• Sandisk Technologies Llc

Inventors

• DIEP Vinh
• Lu Ching Huang
• Chin Henry
• Chen Changyuan

Classifications

• G11C16/10

  Programming or data input circuits · CPC title

• G11C16/0483 Primary

  comprising cells having several storage transistors connected in series · CPC title

• H01L29/42344

  Electricity · mapped topic

• H01L27/1157

  Electricity · mapped topic

• H01L29/7926

  Electricity · mapped topic