Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device

Patent metadata

Field	Value
Publication number	US-10559937-B2
Application number	US-201816200106-A
Country	US
Kind code	B2
Filing date	Nov 26, 2018
Priority date	May 26, 2016
Publication date	Feb 11, 2020
Grant date	Feb 11, 2020

Abstract

A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

First claim

What is claimed is:

1. A pulsed light generation device, comprising:
a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and
a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein:
at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and
self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

2. The pulsed light generation device according to claim 1 , wherein:
the second pulsed light has a peak intensity higher than the peak intensity of the first pulsed light.

3. The pulsed light generation device according to claim 2 , wherein:
a maximum value of the second pulsed light entering the second optical fiber is lower than a maximum value of the first pulsed light entering the second optical fiber or is zero.

4. The pulsed light generation device according to claim 1 , wherein:
the second pulsed light has a maximum value at time points both before and after a time point at which the intensity of the first pulsed light peaks.

5. The pulsed light generation device according to claim 1 , further comprising:
a separation element disposed between the first optical fiber and the second optical fiber, which separates the first pulsed light and the second pulsed light from each other.

6. The pulsed light generation device according to claim 5 , further comprising:
a first laser light source that emits the first pulsed light; and
a second laser light source that emits the second pulsed light, wherein:
wavelength of the first pulsed light and wavelength of the second pulsed light are different from each other; and
the separation element is a wavelength selection filter.

7. The pulsed light generation device according to claim 5 , further comprising:
a first laser light source that emits the first pulsed light; and
a second laser light source that emits the second pulsed light, wherein:
polarization direction of the first pulsed light and polarization direction of the second pulsed light are different from each other; and
the separation element is a polarization beam splitter.

8. The pulsed light generation device according to claim 1 , further comprising:
a first laser light source that emits the first pulsed light; and
a second laser light source that emits the second pulsed light.

9. The pulsed light generation device according to claim 1 , further comprising:
a third laser light source that emits third pulsed light;
a demultiplexer element that branches the third pulsed light into pulsed light to be propagated through a first optical path and pulsed light to be propagated through a second optical path;
a first modulation element that is disposed in the first optical path and generates the first pulsed light;
a second modulation element that is disposed in the second optical path and generates the second pulsed light; and
a multiplexer element that multiplexes the first pulsed light propagated through the first optical path and the second pulsed light propagated through the second optical path so that multiplexed first pulsed light and second pulsed light are propagated through a third optical path, wherein:
the first optical fiber and the second optical fiber are disposed in the third optical path; and
a polarization beam splitter is disposed between the first optical fiber and the second optical fiber.

10. The pulsed light generation device according to claim 9 , wherein:
a third optical fiber at which the second pulsed light is amplified, is disposed in the second optical path.

11. The pulsed light generation device according to claim 9 , wherein:
a partially reflecting element is disposed in the first optical path.

12. The pulsed light generation device according to claim 1 , further comprising:
a wavelength conversion unit at which a wavelength of the first pulsed light, having exited the second optical fiber and entered therein, is converted as the first pulsed light is propagated therein.

13. The pulsed light generation device according to claim 12 , wherein:
the wavelength conversion unit includes a plurality of nonlinear optical crystals and converts the wavelength of the first pulsed light to a wavelength in an ultraviolet range.

14. An exposure apparatus, comprising:
a pulsed light generation device according to claim 1 ;
an exposure target support unit at which an exposure target is held;
a pattern forming unit that forms a predetermined pattern light from pulsed light output from the pulsed light generation device; and
a projection optical system via which the pattern light is projected onto the exposure target held at the exposure target support unit.

15. An inspection apparatus, comprising:
a pulsed light generation device according to claim 1 ;
a inspection target support unit at which a inspection target is held;
an illumination optical system that irradiates pulsed light output from the pulsed light generation device onto the inspection target held at the inspection target support unit; and
a projection optical system that projects light from the inspection target onto a detector.

16. A pulsed light generation method, comprising steps of:
multiplexing first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, and causing the multiplexed first pulsed light and second pulsed light to enter a first optical fiber to be propagated therein;
causing the first pulsed light, having exited the first optical fiber, to enter a second optical fiber and amplifying the first pulsed light as the first pulsed light is propagated through the second optical fiber; and
diminishing phase modulation occurring in the first pulsed light at the second optical fiber, attributable to self-phase modulation, with phase modulation occurring in the first pulsed light at the first optical fiber, attributable to cross phase modulation caused by the second pulsed light.

17. The pulsed light generation method according to claim 16 , wherein:
the second pulsed light has a peak intensity higher than a peak intensity of the first pulsed light.

18. The pulsed light generation method according to claim 17 , wherein:
a maximum value of the second pulsed light entering the second optical fiber is lower than a maximum value of the first pulsed light entering the second optical fiber or is zero.

19. The pulsed light generation method according to claim 16 , wherein:
the second pulsed light has a maximum value at time points both before and after a time point at which the intensity of the first pulsed light peaks.

20. A pulsed light generation method according to claim 16 , wherein:
the first pulsed light and the second pulsed light are separated from each other by a separation element disposed between the first optical fiber and the second optical fiber.

21. The pulsed light generation method according to claim 20 , wherein:
the first pulsed light is gen

Assignees

• Nikon Corp

Inventors

• Tokuhisa Akira

Classifications

• H01S5/0057

  for temporal shaping, e.g. pulse compression, frequency chirping · CPC title

• H01S5/0092

  for nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity · CPC title

• H01S5/4087

  emitting more than one wavelength · CPC title

• H01S5/4012

  Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms · CPC title

• G02F1/1365 Primary

  in which the switching element is a two-electrode device {(G02F1/136277 takes precedence)} · CPC title