Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
US-11757247-B2 · Sep 12, 2023 · US
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Patent family 60411274
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 60411274 |
| Family type | — |
| Earliest priority | May 26, 2016 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US11757247B2 — Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device |
Representative publication
Best representative member for this family based on priority and filing country.
US11757247B2 — Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device (published Sep 12, 2023)
Member publications
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