Simplified lamp design

Patent metadata

Field	Value
Publication number	US-10453670-B2
Application number	US-201816139596-A
Country	US
Kind code	B2
Filing date	Sep 24, 2018
Priority date	Mar 15, 2013
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

First claim

The invention claimed is:

1. A lamp assembly, comprising:
a capsule having a filament disposed therein;
a press seal extending from the capsule and configured to hermetically seal the capsule;
a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;
an insulative sleeve coupled to the press seal, the insulative sleeve comprising:
a first mating extension that is snap fit into a first groove formed in the press seal, a second mating extension that is snap fit into a second groove formed in a first conductive pin; and
a third mating extension that is snap fit into a third groove formed in a second conductive pin, wherein the first lead and the second lead extend into the insulative sleeve;

a first fuse electrically coupling the first lead to the first conductive pin; and
a second fuse electrically coupling the second lead to the second conductive pin.

2. A lamp assembly, comprising:
a capsule having a filament disposed therein;
a press seal extending from the capsule and configured to hermetically seal the capsule;
a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;
a first insulative sleeve coupled to the first lead via a threaded connection external to the press seal;
a first conductive cap or pin coupled to the first insulative sleeve;
a first fuse electrically coupling the first lead to the first conductive cap or pin;
a second insulative sleeve coupled to the second lead external to the press seal;
a second conductive cap or pin coupled to the second insulative sleeve; and
a second fuse electrically coupling the second lead to the second conductive cap or pin.

3. The lamp assembly of claim 2 , wherein the first fuse comprises a metallic coating on an inner surface of the first insulative sleeve.

4. The lamp assembly of claim 2 , wherein the first fuse comprises a metallic trace on an inner surface of the first insulative sleeve.

5. The lamp assembly of claim 2 , wherein the first fuse comprises a wire extending through the first insulative sleeve.

6. The lamp assembly of claim 2 , wherein the first lead and the first conductive cap or pin are attached to the first insulative sleeve by a ceramic material.

7. The lamp assembly of claim 2 , wherein the first and second insulative sleeves are filled with insulating particles.

8. The lamp assembly of claim 2 , wherein the first conductive cap or pin is a cap crimped onto an outer surface of the first insulative sleeve.

9. The lamp assembly of claim 2 , wherein the first lead is crimped over a flange portion of the first insulative sleeve.

Assignees

• Applied Materials Inc

Inventors

• Ranish Joseph M

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H01K1/40

  Leading-in conductors · CPC title

• H05B3/0047

  for semiconductor manufacture · CPC title

• H01K1/16 Primary

  Electric connection thereto · CPC title

• H01K1/66

  with built-in fuse · CPC title