Ceramic susceptor
US-11963270-B2 · Apr 16, 2024 · US
for semiconductor manufacture
for semiconductor manufacture · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H05B3/0047 |
| Official title | {for semiconductor manufacture} |
| Display label | for semiconductor manufacture |
| Total patents | 474 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 32 |
| 2016 | 35 |
| 2017 | 38 |
| 2018 | 33 |
| 2019 | 41 |
| 2020 | 33 |
| 2021 | 50 |
| 2022 | 53 |
| 2023 | 36 |
| 2024 | 58 |
| 2025 | 48 |
| 2026 | 17 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Heating system comprising semiconductor light sources
US-2016381732-A1 · Dec 29, 2016 · US
Light-irradiation heat treatment method and heat treatment apparatus
US-2016336195-A1 · Nov 17, 2016 · US
Absorbing lamphead face
US-2016336205-A1 · Nov 17, 2016 · US
Internal chamber rotation motor, alternative rotation
US-2016323936-A1 · Nov 3, 2016 · US
RTP lamp base with removal features
US-9462636-B2 · Oct 4, 2016 · US
Light-irradiation heat treatment apparatus
US-2016262207-A1 · Sep 8, 2016 · US
Substrate processing apparatus and heating unit
US-2016244878-A1 · Aug 25, 2016 · US
Rapid thermal processing chamber with linear control lamps
US-2016234881-A1 · Aug 11, 2016 · US
Lamp heating for process chamber
US-2016227606-A1 · Aug 4, 2016 · US
Internal chamber rotation motor, alternative rotation
US-9394938-B2 · Jul 19, 2016 · US
Substrate processing method, non-transitory storage medium and heating apparatus
US-2016189974-A1 · Jun 30, 2016 · US
Apparatus For Improving Temperature Uniformity Of A Workpiece
US-2016181132-A1 · Jun 23, 2016 · US
Consolidated filter arrangement for devices in an rf environment
US-2016149482-A1 · May 26, 2016 · US
Heat treatment apparatus for heating substrate by irradiating substrate with flash of light
US-9351341-B2 · May 24, 2016 · US
Substrate support assembly having rapid temperature control
US-2016135252-A1 · May 12, 2016 · US
Heating lamp system
US-2016130724-A1 · May 12, 2016 · US
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-2016118278-A1 · Apr 28, 2016 · US
Apparatus for adjustable light source
US-2016111305-A1 · Apr 21, 2016 · US
Optical system
US-2016111306-A1 · Apr 21, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H05B3/0047?
- CPC H05B3/0047 is the Cooperative Patent Classification code for “for semiconductor manufacture.”
- How many patents are filed under CPC H05B3/0047 (for semiconductor manufacture)?
- Our database includes 474 publications tagged with this CPC code.
- Is patent activity under CPC H05B3/0047 growing?
- Publication counts under this code: 58 in 2024 vs 48 in 2025 (latest complete years).