Simplified lamp design

Patent metadata

Field	Value
Publication number	US-11133173-B2
Application number	US-201916557045-A
Country	US
Kind code	B2
Filing date	Aug 30, 2019
Priority date	Mar 15, 2013
Publication date	Sep 28, 2021
Grant date	Sep 28, 2021

Abstract

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

First claim

The invention claimed is:

1. A lamp assembly, comprising:
a capsule having a filament disposed therein;
a press seal extending from the capsule and configured to hermetically seal the capsule;
a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament, a first end of each of the first and second leads disposed within the press seal;
an insulative sleeve directly coupled to a second end of the first lead and spaced a distance from the press seal, the insulative sleeve comprising plastic material or filled with glass beads;
a conductive cap or pin coupled to the insulative sleeve; and
a fuse electrically coupling the first lead to the conductive cap or pin.

2. The lamp assembly of claim 1 , wherein the fuse comprises a metallic coating on an inner surface of the insulative sleeve.

3. The lamp assembly of claim 1 , wherein the fuse comprises a metallic trace on an inner surface of the insulative sleeve.

4. The lamp assembly of claim 1 , wherein the fuse comprises a wire extending through the insulative sleeve.

5. The lamp assembly of claim 1 , wherein the first lead and the conductive pin are attached to the insulative sleeve by a ceramic material.

6. The lamp assembly of claim 1 , wherein the insulative sleeve is filled with insulating particles.

7. The lamp assembly of claim 1 , wherein the second lead is coupled to a second conductive pin.

8. A lamp assembly, comprising:
a capsule having a filament disposed therein;
a press seal extending from the capsule and configured to hermetically seal the capsule;
a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament, a first end of each of the first and second leads disposed within the press seal;
a first insulative sleeve directly coupled to a second end of the first lead and spaced a distance from the press seal;
a first conductive cap or pin coupled to the first insulative sleeve;
a first fuse electrically coupling the first lead to the first conductive cap or pin;
a second insulative sleeve coupled to a second end of the second lead and spaced apart from the press seal;
a second conductive pin coupled to the second insulative sleeve; and
a second fuse electrically coupling the second lead to the second conductive pin.

9. The lamp assembly of claim 8 , wherein the first lead and the second lead are substantially parallel.

10. The lamp assembly of claim 8 , wherein the first insulative sleeve and the first lead are coupled via a threaded connection.

Assignees

• Applied Materials Inc

Inventors

• Ranish Joseph M

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H01K1/66

  with built-in fuse · CPC title

• H05B3/0038

  for industrial applications · CPC title

• H01K1/40

  Leading-in conductors · CPC title

• H05B3/0047

  for semiconductor manufacture · CPC title