Plasma nitriding apparatus

Patent metadata

Field	Value
Publication number	US-10443117-B2
Application number	US-201615172507-A
Country	US
Kind code	B2
Filing date	Jun 3, 2016
Priority date	Dec 18, 2013
Publication date	Oct 15, 2019
Grant date	Oct 15, 2019

Abstract

A plasma nitriding apparatus includes: a surface treatment unit which includes a treatment tank to house part of a treatment object inclusive of a surface treatment region, and performs a nitriding treatment on the surface treatment region inside of the treatment tank by using plasma of a treatment gas; and an outer container which receives supply of the treatment gas, and houses the treatment object and the treatment tank so that a region of the treatment object other than the part is exposed from the treatment tank.

First claim

What is claimed is:

1. A plasma nitriding apparatus comprising: a surface treatment unit including a treatment tank configured to receive supply of a treatment gas and house part of a treatment object inclusive of a surface treatment region, and the surface treatment unit is configured to perform a nitriding treatment on the surface treatment region inside of the treatment tank by using plasma of the treatment gas; an electrode disposed in the treatment tank and opposed to the surface treatment region to produce the plasma between the electrode and the treatment object and an outer container as a vacuum chamber, the outer container configured to house whole of the treatment object and the treatment tank while a region of the treatment object other than the part is exposed from the treatment tank, wherein the outer container includes a lower container which houses the treatment tank and an upper container which houses the region of the treatment object that is exposed from the treatment tank, the lower container and the upper container each including flanges which are fastened to each other when the upper container is fixed to the lower container, further comprising an attachment jig which supports the treatment object, the attachment jig including a cover into which the treatment object is inserted, a disc which supports an upper end of the cover, and guide rods which define a height in a vertical direction of the surface treatment region relative to the electrode, wherein an upper end of each of the guide rods is fixed to a portion of the disc and a positioning hole is formed in a lower end of each of the guide rods, each positioning hole cooperating with a positioning pin fixed to the flange of the lower container.

2. The plasma nitriding apparatus according to claim 1 , wherein the surface treatment unit comprises a heating unit configured to heat the surface treatment region.

3. The plasma nitriding apparatus according to claim 2 , wherein the heating unit is an electric heater disposed on a side surface of the treatment tank away from the surface treatment region.

4. The plasma nitriding apparatus according to claim 1 , wherein the electrode is cylindrical around the treatment object as a center.

5. The plasma nitriding apparatus according to claim 2 , further comprising a heat insulation material that covers a side surface of the treatment tank.

Assignees

• Ihi Corp

Inventors

• Kameya Norimitsu
• Fuchigami Kenji

Classifications

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• C23C8/04

  Treatment of selected surface areas, e.g. using masks · CPC title

• H01J37/32522

  Temperature · CPC title

• C23C8/36 Primary

  using ionised gases, e.g. ionitriding · CPC title

• H01J2237/3387

  Nitriding · CPC title