High pressure ammonia nitridation of tunnel oxide for 3dnand applications
US-2017349996-A1 · Dec 7, 2017 · US
US2017165748A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017165748-A1 |
| Application number | US-201615373293-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 8, 2016 |
| Priority date | Dec 10, 2015 |
| Publication date | Jun 15, 2017 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A method for producing a powder includes forming a layer of a raw material powder, and performing one of an operation of nitriding the raw material powder of the layer in an atmosphere containing nitrogen or an operation of carbonizing the raw material powder of the layer in an atmosphere containing carbon.
Opening claim text (preview).
What is claimed is: 1 . A method for producing a powder, comprising: forming a layer of a raw material powder; and performing one of an operation of: nitriding the raw material powder of the layer in an atmosphere containing nitrogen, and an operation of carbonizing the raw material powder of the layer in an atmosphere containing carbon. 2 . The method according to claim 1 , wherein the one of the operations is performed while or after a coating film over the surface of the raw material powder of the layer is removed. 3 . The method according to claim 2 , wherein the coating film is an oxide film and is removed by a reduction reaction in an atmosphere containing hydrogen. 4 . The method according to claim 2 , wherein the coating film is removed in an atmosphere containing at least one of hydrogen and an inert element by applying a voltage to the layer to generate a plasma. 5 . The method according to claim 1 , wherein the layer is formed in a chamber capable of being depressurized, and the one of the operations is performed in an atmosphere having a pressure lower than atmospheric pressure created in the chamber. 6 . The method according to claim 5 , wherein the atmosphere in the chamber has a pressure in the range of 1 Pa to less than 20 kPa. 7 . The method according to claim 5 , further comprising creating the atmosphere in the chamber by evacuating the chamber to a first pressure, and then feeding a substance containing one of nitrogen and carbon to the chamber, wherein the atmosphere has a second pressure of more than the first pressure and less than atmospheric pressure. 8 . The method according to claim 5 , wherein the layer is formed in a powder container disposed in and electrically isolated from the chamber and then subjected to the one of the operations. 9 . The method according to claim 8 , wherein the layer is formed on a layer of the raw material formed on the bottom of the powder container through the steps of forming and operating one of the operations. 10 . The method according to claim 1 , wherein the one of the operations is performed in a state in which the layer is heated with at least one of a heater, an energy beam, and an inert gas plasma. 11 . The method according to claim 1 , wherein the raw material powder comprises metal particles produced by water atomization. 12 . A method for manufacturing a shaped object, the method comprising: forming a layer of a raw material powder; performing one of an operation of: nitriding the raw material powder of the layer in an atmosphere containing nitrogen, and an operation of carbonizing the raw material powder of the layer in an atmosphere containing carbon; and solidifying the layer subjected to the one of the operations by irradiating the layer with an energy beam. 13 . The method according to claim 12 , wherein the one of the operations is performed while or after a coating film over the surface of the raw material powder of the layer is removed. 14 . The method according to claim 13 , wherein the coating film is an oxide film and is removed by a reduction reaction in an atmosphere containing hydrogen. 15 . The method according to claim 13 , wherein the coating film is removed in an atmosphere containing at least one of hydrogen and an inert element by applying a voltage to the layer to generate a plasma. 16 . The method according to claim 12 , wherein the solidifying is performed in an atmosphere containing nitrogen and reduced oxygen on the layer subjected to the nitriding while a voltage is applied to the nitrided layer to generate a plasma. 17 . The method according to claim 12 , wherein the solidifying is performed in an atmosphere containing carbon and reduced oxygen on the layer subjected to the carbonizing while a voltage is applied to the carbonized layer to generate a plasma. 18 . The method according to claim 16 , wherein the atmosphere containing nitrogen contains hydrogen. 19 . The method according to claim 17 , wherein the atmosphere containing carbon contains hydrogen. 20 . The method according to claim 12 , wherein the energy beam is a laser beam. 21 . A powder producing apparatus comprising: a chamber; a forming device capable of forming a layer of a raw material powder in the chamber; a feeder capable of feeding a substance containing one of nitrogen and carbon to the chamber; and a power supply device capable of applying a voltage to the layer formed by the forming device. 22 . The powder producing apparatus according to claim 21 , wherein the feeder feeds a substance containing hydrogen to the chamber. 23 . The powder producing apparatus according to claim 21 , further comprising a depressurizing device capable of reducing the pressure in the chamber. 24 . The powder producing apparatus according to claim 23 , further comprising a measuring device capable of measuring the pressure in the chamber. 25 . The powder producing apparatus according to claim 21 , further comprising a powder container disposed in the chamber, the powder container being electrically isolated from the chamber. 26 . The powder producing apparatus according to claim 25 , wherein the powder container has a surface that comes into contact with the layer, the surface being made of an insulating material. 27 . The powder producing apparatus according to claim 21 , further comprising a heater in the powder container. 28 . A shaped object manufacturing apparatus comprising: a chamber; a forming device capable of forming a layer of a raw material powder in the chamber; a feeder capable of feeding a substance containing one of nitrogen and carbon to the chamber; a power supply device capable of applying a voltage to the layer formed by the forming device; and a beam irradiator capable of irradiating the layer with an energy beam. 29 . A shaped object produced in the shaped object manufacturing apparatus as set forth in claim 28 , the shaped object having a texture formed by growing crystals and containing 10% or more of nitrogen in terms of number of atoms. 30 . The shaped object according to claim 29 , wherein the inside of the shaped object is uniformly nitrided.
Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title
Use of plasma · CPC title
Processes of additive manufacturing · CPC title
Carburising · CPC title
Hydrogen · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.