High pressure ammonia nitridation of tunnel oxide for 3dnand applications
US-2017349996-A1 · Dec 7, 2017 · US
Plasma nitriding apparatus
US2016281207A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016281207-A1 |
| Application number | US-201615172507-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 3, 2016 |
| Priority date | Dec 18, 2013 |
| Publication date | Sep 29, 2016 |
| Grant date | — |
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Abstract
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A plasma nitriding apparatus includes: a surface treatment unit which includes a treatment tank to house part of a treatment object inclusive of a surface treatment region, and performs a nitriding treatment on the surface treatment region inside of the treatment tank by using plasma of a treatment gas; and an outer container which receives supply of the treatment gas, and houses the treatment object and the treatment tank so that a region of the treatment object other than the part is exposed from the treatment tank.
First claim
Opening claim text (preview).
What is claimed is: 1 . A plasma nitriding apparatus comprising: a surface treatment unit including a treatment tank to house part of a treatment object inclusive of a surface treatment region, and configured to perform a nitriding treatment on the surface treatment region inside of the treatment tank by using plasma of a treatment gas; and an outer container configured to receive supply of the treatment gas, and to house the treatment object and the treatment tank so that a region of the treatment object other than the part is exposed from the treatment tank. 2 . The plasma nitriding apparatus according to claim 1 , wherein the surface treatment unit comprises an electrode disposed in the treatment tank in such a manner as to be opposed to the surface treatment region, and configured to produce the plasma between the electrode and the treatment object. 3 . The plasma nitriding apparatus according to claim 2 , wherein the surface treatment unit comprises a heating unit configured to heat the surface treatment region. 4 . The plasma nitriding apparatus according to claim 3 , wherein the heating unit is an electric heater disposed on a side surface of the treatment tank away from the surface treatment region.
Assignees
Inventors
Classifications
- C23C8/36Primary
using ionised gases, e.g. ionitriding · CPC title
Coating; Surface treatment · CPC title
Gas supply means · CPC title
Nitriding · CPC title
Localised processing · CPC title
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- What does patent US2016281207A1 cover?
- A plasma nitriding apparatus includes: a surface treatment unit which includes a treatment tank to house part of a treatment object inclusive of a surface treatment region, and performs a nitriding treatment on the surface treatment region inside of the treatment tank by using plasma of a treatment gas; and an outer container which receives supply of the treatment gas, and houses the treatment …
- Who is the assignee on this patent?
- Ihi Corp
- What technology area does this patent fall under?
- Primary CPC classification C23C8/36. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Thu Sep 29 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).