Purge device and purge method

Patent metadata

Field	Value
Publication number	US-10438829-B2
Application number	US-201415116527-A
Country	US
Kind code	B2
Filing date	Dec 17, 2014
Priority date	Feb 7, 2014
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

A purge apparatus is a purge apparatus that purges an inside of a storage container in which a product is stored, with a purge gas. The purge apparatus includes a discharge pipe that connects to a discharge port of the storage container to discharge the purge gas inside the storage container, a meter that measures an exhaust flow rate that is a flow rate of the purge gas flowing through the discharge pipe when the purging is carried out, and a detector that determines whether the purging is satisfactory, based on the exhaust flow rate measured by the meter.

First claim

The invention claimed is:

1. A purge apparatus for purging with a purge gas an inside of a storage container in which a product is stored, the purge apparatus comprising:
a discharge pipe that connects to a discharge port of the storage container to discharge the purge gas inside the storage container;
a flow rate controller that is configured or programmed to switch between a first mode in which the purging is carried out by supplying the purge gas to the storage container at a first flow rate, which is less than or equal to a predetermined flow rate, and a second mode in which the purging is carried out by supplying the purge gas to the storage container at a second flow rate, which is greater than the predetermined flow rate;
a meter that measures an exhaust flow rate that is a flow rate of the purge gas flowing through the discharge pipe when the purging is carried out; and
a detector that determines, while the purging is carried out in the first mode, whether the purging is satisfactory by comparing the exhaust flow rate measured by the meter with a supply flow rate of supplying the purge gas to the storage container, wherein
while the purging is carried out in the second mode, the detector does not determine whether the purging is satisfactory and does not compare the exhaust flow rate measured by the meter with the supply flow rate.

2. The purge apparatus according to claim 1 , wherein the predetermined flow rate is a flow rate in the storage container in which the purge gas leaks from a portion of the storage container other than the discharge port of the storage container when the flow rate of the purge gas supplied to the storage container is greater than the predetermined flow rate.

3. The purge apparatus according to claim 2 , wherein the flow rate controller starts the purging in the second mode, switches to the first mode to perform the purging to determine whether the purging is satisfactory, and performs again the purging in the second mode.

4. The purge apparatus according to claim 1 , further comprising:
a supply pipe that connects to a supply port of the storage container to supply the purge gas to the storage container; and
a mass flow controller that regulates the supply flow rate of the purge gas flowing through the supply pipe during the purging of the storage container; wherein
the detector determines whether the purging is satisfactory by comparing the supply flow rate achieved by the mass flow controller in the first mode with the exhaust flow rate measured in the first mode.

5. The purge apparatus according to claim 4 , further comprising an information transmitter that transmits the determination of whether the purging is satisfactory.

6. The purge apparatus according to claim 1 , wherein:
when the purging is carried out in the first mode, the purge apparatus provides an output to an operator of the purge apparatus indicating whether the purging is satisfactory or unsatisfactory; and
when the purging is carried out in the second mode, the purge apparatus does not provide the output to the operator of the purge apparatus indicating whether the purging is satisfactory or unsatisfactory.

7. The purge apparatus according to claim 1 , wherein, when the purging is carried out in the first mode, the detector determines that the purging is satisfactory when the exhaust flow rate measured by the meter is greater than or equal to the supply flow rate by a predetermined amount.

8. A purge method of purging, with a purge gas, an inside of a storage container in which a product is stored, the purge method comprising:
connecting a discharge pipe to a discharge port of the storage container, the discharge pipe being capable of discharging the purge gas inside the storage container;
switching a flow rate controller between a first mode in which the purging is carried out by supplying the purge gas to the storage container at a first flow rate, which is less than or equal to a predetermined flow rate, and a second mode in which the purging is carried out by supplying the purge gas to the storage container at a second flow rate, which is greater than the predetermined flow rate;
measuring, by a meter, an exhaust flow rate that is a flow rate of the purge gas flowing through the discharge pipe when the purging is carried out; and
determining, by a detector and while the purging is carried out in the first mode, whether the purging is satisfactory by comparing the exhaust flow rate measured by the meter with a supply flow rate of supplying the purge gas to the storage container, wherein
while the purging is carried out in the second mode, the detector does not determine whether the purging is satisfactory and does not compare the exhaust flow rate measured by the meter with the supply flow rate.

9. A purge method according to claim 8 , wherein the predetermined flow rate is a flow rate in the storage container in which the purge gas leaks from a portion of the storage container other than the discharge port of the storage container when the flow rate of the purge gas supplied to the storage container is greater than the predetermined flow rate.

10. A purge method according to claim 8 , further comprising:
connecting a supply pipe to a supply port of the storage container to supply the purge gas to the storage container; and
regulating the supply flow rate of the purge gas flowing through the supply pipe during the purging of the storage container with a mass flow controller; wherein
the detector determines whether the purging is satisfactory by comparing the supply flow rate achieved by the mass flow controller in the first mode with the exhaust flow rate measured in the first mode.

11. A purge method according to claim 10 , further comprising transmitting the determination of whether the purging is satisfactory by an information transmitter.

12. The purge method according to claim 8 , further comprising:
when the purging is carried out in the first mode, providing an output to an operator of the purge apparatus indicating whether the purging is satisfactory or unsatisfactory; and
when the purging is carried out in the second mode, not providing the output to the operator of the purge apparatus indicating whether the purging is satisfactory or unsatisfactory.

13. The purge method according to claim 8 , wherein, when the purging is carried out in the first mode, the detector determines that the purging is satisfactory when the exhaust flow rate measured by the meter is greater than or equal to the supply flow rate by a predetermined amount.

Assignees

• Murata Machinery Ltd

Inventors

• Murata Masanao
• Yamaji Takashi

Classifications

• H10P72/1908

  specially adapted for containing substrates other than wafers · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• B08B5/04

  Cleaning by suction, with or without auxiliary action · CPC title