Post exposure processing apparatus

Patent metadata

Field	Value
Publication number	US-10401742-B2
Application number	US-201815947409-A
Country	US
Kind code	B2
Filing date	Apr 6, 2018
Priority date	Dec 20, 2016
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

Implementations described herein relate to apparatus for post exposure processing. More specifically, implementations described herein relate to field-guided post exposure process chambers and cool down/development chambers used on process platforms. In one implementation, a plurality of post exposure process chamber and cool/down development chamber pairs are positioned on a process platform in a stacked arrangement and utilize a shared plumbing module. In another implementation, a plurality of post exposure process chamber and cool down/development chambers are positioned on a process platform in a linear arrangement and each of the chambers utilize an individually dedicated plumbing module.

First claim

What is claimed is:

1. A platform apparatus, comprising:
a factory interface;
a plumbing module; and
a process module disposed between the factory interface and the plumbing module, wherein the process module comprises:
a central region having a robot disposed therein; and
a plurality of process stations disposed about the central region and sharing the plumbing module, wherein each process station includes a process chamber and a post process chamber in a stacked arrangement, the process chamber and the post process chamber having ingress/egress openings disposed adjacent to and facing the central region, the process chamber further comprising:
a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally.

2. The apparatus of claim 1 , wherein the process chamber is disposed on top of the post process chamber in each of the process stations.

3. The apparatus of claim 1 , wherein the post process chamber is disposed on top of the process chamber in each of the process stations.

4. The apparatus of claim 1 , further comprising:
a door coupled to the chamber body; and
a first electrode coupled to the door.

5. The apparatus of claim 4 , further comprising:
a second electrode coupled to the chamber body.

6. The apparatus of claim 5 , further comprising:
a first plurality of fluid ports formed in a sidewall of the chamber body adjacent to the process volume.

7. The apparatus of claim 6 , further comprising:
a second plurality of fluid ports formed in the sidewall of the chamber body adjacent to the process volume opposite the first plurality of fluid ports.

8. The apparatus of claim 4 , wherein a vacuum source is in fluid communication with the first electrode.

9. The apparatus of claim 1 , wherein the chamber body is formed from polytetrafluoroethylene.

10. The apparatus of claim 1 , wherein the post process chamber further comprises:
a chamber body defining a process volume;
a rotatable pedestal disposed within the process volume;
a fluid delivery arm configured to deliver cleaning fluid to the process volume; and
a shield capable of being raised and lowered by a motor, the shield having an inner diameter greater than a diameter of the rotatable pedestal, wherein the shield is disposed radially outward of the rotatable pedestal.

11. A platform apparatus, comprising:
a factory interface;
a plumbing module; and
a process module disposed between the factory interface and the plumbing module, wherein the process module comprises:
a central region having a robot disposed therein, the robot comprising a plurality of end effectors, the end effectors moveable in three axes; and
a plurality of process stations disposed about the central region and sharing the plumbing module, wherein each process station includes a process chamber and a post process chamber in a stacked arrangement, the process chamber and the post process chamber having ingress/egress openings disposed adjacent to and facing the central region, the process chamber further comprising:
a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally.

12. The apparatus of claim 11 , wherein the process chamber further comprises:
a moveable door coupled to the chamber body;
a first electrode coupled to the door, the first electrode configured to support a substrate thereon;
a second electrode coupled to the chamber body, the second electrode at least partially defining the process volume;
a first plurality of fluid ports formed in a sidewall of the chamber body adjacent the process volume; and
a second plurality of fluid ports formed in the sidewall of the chamber body adjacent the process volume opposite the first plurality of fluid ports.

13. The apparatus of claim 11 , wherein the post process chamber further comprises:
a chamber body defining a process volume;
a rotatable pedestal disposed within the process volume;
a fluid delivery arm configured to deliver cleaning fluid to the process volume; and
a shield capable of being raised and lowered by a motor, the shield having an inner diameter greater than a diameter of the rotatable pedestal, wherein the shield is disposed radially outward of the rotatable pedestal.

14. A platform apparatus, comprising:
a factory interface;
an intermediate module disposed adjacent the factory interface, wherein a buffer station is disposed in the intermediate module;
a support module disposed adjacent the intermediate module, the support module having a plurality of cleaning stations disposed therein;
a process module disposed adjacent to the support module, the process module comprising:
a plurality of process stations, wherein each process station includes a process chamber and a post process chamber in a stacked arrangement, the process chamber and the post process chamber having ingress/egress openings disposed adjacent to and facing a central region, the process chamber further comprising:
a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally; and

a plumbing module shared by the plurality of process stations.

15. The apparatus of claim 14 , wherein the process chamber further comprises:
a moveable door coupled to the chamber body;
a first electrode coupled to the door, the first electrode configured to support a substrate thereon;
a second electrode coupled to the chamber body, the second electrode at least partially defining the process volume;
a first plurality of fluid ports formed in a sidewall of the chamber body adjacent the process volume; and
a second plurality of fluid ports formed in the sidewall of the chamber body adjacent the process volume opposite the first plurality of fluid ports.

16. The apparatus of claim 14 , wherein the post process chamber further comprises:
a chamber body defining a process volume;
a rotatable pedestal disposed within the process volume;
a fluid delivery arm configured to deliver cleaning fluid to the process volume; and
a shield capable of being raised and lowered by a motor, the shield having an inner diameter greater than a diameter of the rotatable pedestal, wherein the shield is disposed radially outward of the rotatable pedestal.

17. The apparatus of claim 14 , wherein each of the cleaning stations of the support module has a dedicated plumbing module.

Assignees

• Applied Materials Inc

Inventors

• Babayan Viachslav
• Godet Ludovic
• Hanson Kyle M
• Moore Robert B

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0458

  vertical arrangement · CPC title

• H10P72/0454

  surrounding a central transfer chamber · CPC title

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title