Radiation source and lithographic apparatus

Patent metadata

Field	Value
Publication number	US-10394141-B2
Application number	US-201715661888-A
Country	US
Kind code	B2
Filing date	Jul 27, 2017
Priority date	Jun 22, 2012
Publication date	Aug 27, 2019
Grant date	Aug 27, 2019

Abstract

A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.

First claim

The invention claimed is:

1. An EUV radiation source housing apparatus comprising:
a rotatably mounted housing that is rotatable around a rotation axis, the housing defining a circumference when rotating around the rotation axis;
an actuator arranged to drive the housing to rotate around the rotation axis;
a heater located adjacent to a first portion of the circumference; and
a cooler located adjacent to a second portion of the circumference,
wherein the first portion is different than the second portion and the heater and the cooler are configured such that they do not rotate with the rotatably mounted housing.

2. The radiation source housing apparatus of claim 1 , wherein, in the first portion of the circumference, the housing does not have an inner surface from within which liquid fuel can drip.

3. The radiation source housing apparatus of claim 1 , wherein the first portion of the circumference defines a lowermost side of the rotatably mounted housing.

4. The radiation source housing apparatus of claim 1 , wherein the heater is arranged to heat the first portion of the circumference to a temperature which is above the melting temperature of tin, and wherein the cooler is arranged to cool the second portion of the circumference to a temperature which is below the melting temperature of tin.

5. The radiation source housing apparatus of claim 1 , wherein the cooler extends around at least two thirds of the circumference.

6. The radiation source housing apparatus of claim 1 , wherein the heater extends around less than one third of the circumference.

7. The radiation source housing apparatus of claim 1 , wherein the heater and the cooler do not overlap around the circumference.

8. The radiation source housing apparatus of claim 1 , wherein the inner surface of the housing is provided with grooves.

9. The radiation source housing apparatus of claim 1 , further comprising a fuel collector comprising:
a receptacle, said receptacle being provided with an entrance and a storage portion;
an object which is disposed within the receptacle such that fuel passing through the entrance is incident upon a surface of the object; and
a fuel transferring mechanism configured to transfer fuel collected upon the surface to the storage portion.

10. The radiation source housing apparatus of claim 9 , wherein the object is formed from a material which is low wetting with respect to a fuel it is desired to collect.

11. The radiation source housing apparatus of any of claim 9 , wherein the object is operable to move between a first position and a second position.

12. The radiation source housing apparatus of claim 11 , wherein movement of the object between the first and second positions provides the fuel transferring mechanism.

13. The radiation source housing apparatus of claim 11 , wherein the object is arranged so that as fuel accumulates upon the surface, the object moves from the first position towards the second position.

14. The radiation source housing apparatus of claim 11 , wherein the object is resiliently biased towards the first position.

15. The radiation source housing apparatus of claim 1 , wherein the rotatably mounted housing has an inner surface, and wherein the inner surface faces, in the first portion of the circumference, in a direction that includes a vertically upward component.

16. The radiation source housing apparatus of claim 1 , wherein the heater is positioned adjacent to a lowermost side of the circumference.

17. A radiation source comprising:
a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation; and
a radiation source housing apparatus comprising:
a rotatably mounted housing that is rotatable around a rotation axis, the housing defining a circumference when rotating around the rotation axis,
an actuator arranged to drive the housing to rotate around the rotation axis,
a heater located adjacent to a first portion of the circumference, and
a cooler located adjacent to a second portion of the circumference,

wherein the first portion is different than the second portion and the heater and the cooler are configured such that they do not rotate with the rotatably mounted housing.

18. The radiation source of claim 17 , wherein the fuel comprises tin or lithium, and the heater is arranged to heat the first portion of the circumference to a temperature which is above the melting temperature of tin or lithium, and wherein the cooler is arranged to cool the second portion of the circumference to a temperature which is below the melting temperature of tin or lithium.

19. The radiation source of claim 17 , wherein the fuel comprises tin or lithium, and the heater is arranged to heat the first portion of the circumference to a temperature at which the fuel on the housing will be in a liquid state, and wherein the cooler is arranged to cool the second portion of the circumference to a temperature at which the fuel on the housing will be in a solid state.

20. A method of generating EUV radiation comprising:
delivering fuel to a location from which the fuel emits EUV radiation;
driving a radiation source housing to rotate;
heating a portion of the housing to a temperature which is above the melting temperature of the fuel; and
cooling a portion of the housing to a temperature which is below the melting temperature of the fuel, wherein the heated portion of the housing and the cooled portion of the housing change as the housing rotates.

Assignees

• Asml Netherlands Bv

Inventors

• Riepen Michel
• Labetski Dzmitry
• Mestrom Wilbert Jan
• Kampinga Wim Ronald
• Nieuwenkamp Jan Okke
• Brinkert Jacob
• Castelijns Henricus Jozef
• Ten Kate Nicolaas
• Schimmel Hendrikus Gijsbertus
• Jansen Hans
• Paulussen Dennis Jozef Maria
• Virgo Brian Vernon
• Jilisen Reinier Theodorus Martinus
• Badie Ramin
• Rijpma Albert Pieter
• Franken Johannes Christiaan Leonardus
• Van Putten Peter
• Van Der Straaten Gerrit

Classifications

• G21K5/08

  Holders for targets or for other objects to be irradiated · CPC title

• G03F7/70008

  Production of exposure light, i.e. light sources · CPC title

• G03F7/70033 Primary

  by plasma extreme ultraviolet [EUV] sources · CPC title

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• Y10T137/206

  Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system] · CPC title