Radiation source and lithographic apparatus

Patent metadata

Field	Value
Publication number	US-9753383-B2
Application number	US-201314409048-A
Country	US
Kind code	B2
Filing date	Jun 13, 2013
Priority date	Jun 22, 2012
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.

First claim

The invention claimed is:

1. A radiation source comprising:
a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation; and
an immobile fuel debris receiving surface provided with a plurality of vanes and a plurality of grooves, the grooves being arranged to direct a flow of liquid fuel under the influence of gravity along a same plane towards a drain or gutter, wherein the plurality of grooves are provided in the vanes, and wherein the vanes are reflective structures located in the vicinity of an intermediate focus of the radiation source.

2. The radiation source of claim 1 , wherein the immobile fuel debris receiving surface is provided with a plurality of vanes, and wherein the plurality of grooves are provided in the vanes.

3. The radiation source of claim 1 , wherein at least some of the grooves have a cross-sectional size and/or shape that gives rise to capillary action.

4. The radiation source of claim 1 , wherein at least some of the grooves have a cross-sectional size and/or shape that gives rise to wicking action which draws liquid fuel into the grooves.

5. The radiation source of claim 1 , wherein the grooves comprise a set of grooves that extend substantially parallel to one another.

6. The radiation source of claim 1 , wherein adjacent vanes are separated by a distance that is equal to or less than six millimeters.

7. The radiation source of claim 1 , wherein the vanes are heated by a heating apparatus to a temperature that is above the melting temperature of the fuel and below the evaporation temperature of the fuel.

8. An apparatus comprising a radiation source having a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation, wherein the radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of vanes and a plurality of grooves, the grooves being arranged to direct a flow of liquid fuel under the influence of gravity along a same plane towards a drain or gutter, wherein the plurality of grooves are provided in the vanes, and wherein the vanes are reflective structures located in the vicinity of an intermediate focus of the radiation source.

9. A method of generating EUV radiation using a radiation source, the method comprising:
delivering fuel to a location at which a plasma that emits EUV radiation is generated using the fuel; and
receiving liquid fuel on an immobile surface of the radiation source,
wherein grooves provided in a plurality of vanes on the immobile surface direct the flow of liquid fuel under the influence of gravity along a same plane towards a drain or gutter, wherein the vanes are reflective structures located in the vicinity of an intermediate focus of the radiation source.

10. A radiation source comprising:
a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation;
a fuel debris receiving surface; and
a conduit connected to a source of liquid fuel and configured to deliver the liquid fuel from the source via openings through a wall of the conduit directly onto the fuel debris receiving surface disposed outside of the conduit, such that a coating of liquid fuel is maintained and continuously flows across the fuel debris receiving surface.

11. The radiation source of claim 10 , wherein the fuel debris receiving surface comprises a plurality of vanes.

12. A method of controlling contamination in a radiation source that uses fuel to generate EUV radiation, the method comprising:
delivering liquid fuel from a source connected to a conduit directly onto a fuel debris receiving surface via openings through a wall of the conduit, such that a coating of liquid fuel is maintained and continuously flows across the fuel debris receiving surface, wherein the fuel debris receiving surface is disposed outside of the conduit.

13. A method of generating EUV radiation using a radiation source, the method comprising:
delivering fuel to a location at which a plasma that emits EUV radiation is generated using the fuel;
receiving liquid fuel on an immobile surface of the radiation source, and
using grooves provided in a plurality of vanes on the immobile surface to direct a flow of the liquid fuel under the influence of gravity along a same plane towards a drain or gutter, wherein the vanes are reflective structures located in the vicinity of an intermediate focus of the radiation source.

14. A radiation source comprising:
a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation;
a fuel debris receiving surface; and
a conduit connected to a source of liquid alloy or metal and configured to deliver the liquid alloy or metal from the source via openings through a wall of the conduit directly onto the fuel debris receiving surface disposed outside of the conduit, such that a coating of the liquid alloy or metal is maintained and continuously flows across the fuel debris receiving surface at room temperature.

Assignees

• Asml Netherlands Bv

Inventors

• Riepen Michel
• Labetski Dzmitry
• Mestrom Wilbert Jan
• Kampinga Wim Ronald
• Nieuwenkamp Jan Okke
• Brinkert Jacob
• Castelijns Henricus Jozef
• Ten Kate Nicolaas
• Schimmel Hendrikus Gijsbertus
• Jansen Hans
• Paulussen Dennis Jozef Maria
• Virgo Brian Vernon
• Jilisen Reinier Theodorus Martinus
• Badie Ramin
• Rijpma Albert Pieter
• Franken Johannes Christiaan Leonardus
• Van Putten Peter
• Van Der Straaten Gerrit

Classifications

• G21K5/08

  Holders for targets or for other objects to be irradiated · CPC title

• G03F7/70033 Primary

  by plasma extreme ultraviolet [EUV] sources · CPC title

• G03F7/70916

  Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps · CPC title

• F15D1/0065

  using active means, e.g. supplying external energy or injecting fluid · CPC title

• Y10T137/206

  Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system] · CPC title