Contamination trap for a lithographic apparatus

Patent metadata

Field	Value
Publication number	US-9494879-B2
Application number	US-201314395981-A
Country	US
Kind code	B2
Filing date	Apr 5, 2013
Priority date	Apr 23, 2012
Publication date	Nov 15, 2016
Grant date	Nov 15, 2016

Abstract

Disclosed is a contamination trap arrangement ( 300 ) configured to trap debris particles that are generated with the formation of a plasma within a radiation source configured to generate extreme ultraviolet radiation. The contamination trap comprises a vane structure ( 310 ) for trapping the debris particles; a heating arrangement ( 330 ) for heating the vane structure, the heating arrangement being in thermal communication with the vane structure; a cooling arrangement ( 350 ) for transporting heat generated as a result of the plasma formation, away from the vane structure, and a gap ( 370 ) between the heating arrangement and the cooling arrangement. The cooling arrangement is in thermal communication with the vane structure via the heating arrangement and the gap and the contamination trap also comprises a heat transfer adjustment arrangement operable to adjust the heat transfer characteristics of a fluid inside of the gap by providing for controllable relative movement between the surfaces defining the gap.

First claim

The invention claimed is:

1. A contamination trap arrangement configured to trap debris particles that are generated with formation of a plasma within a radiation source configured to generate extreme ultraviolet radiation, the contamination trap comprising;
a plurality of vanes configured to trap the debris particles;
a heating arrangement configured to heat the plurality of vanes, the heating arrangement being in thermal communication with the plurality of vanes;
a cooling arrangement configured to transport heat generated as a result of the plasma formation, away from the plurality of vanes; and
a gap between the heating arrangement and the cooling arrangement,
wherein the cooling arrangement is in thermal communication with the plurality of vanes via the heating arrangement and the gap.

2. The contamination trap arrangement of claim 1 , wherein the plurality of vanes are attached to an inside of a substantially cylindrical structure, and the heating arrangement, the gap and the cooling arrangement are arranged concentrically around an outside of the substantially cylindrical structure.

3. The contamination trap arrangement of claim 2 , wherein the heating arrangement comprises heating elements embedded within a wall of a conductive cylinder.

4. The contamination trap arrangement of claim 2 , wherein the cooling arrangement comprises cooling elements embedded within a wall of a conductive cylinder.

5. The contamination trap arrangement of claim 2 , wherein part of the contamination trap arrangement inside of the gap is arranged to be rotatable relative to part of the contamination trap arrangement outside of the gap to obtain a rotational movement.

6. The contamination trap arrangement of claim 1 , wherein the contamination trap further comprises a heat transfer adjustment configured to adjust heat transfer characteristics of a fluid inside of the gap by providing for controllable relative movement between surfaces defining the gap.

7. The contamination trap of claim 6 , wherein the heat transfer adjustment arrangement is configured to control the relative movement such that:
when heating of the plurality of vanes is required, a speed of the relative movement is either zero or sufficiently slow as to prevent turbulent flow in the fluid inside of the gap; and
when cooling of the plurality of vanes is required, a speed of the relative movement is sufficiently fast as to cause turbulent flow in the fluid inside of the gap.

8. The contamination trap of claim 6 , wherein the heat transfer adjustment arrangement is configured to control a speed of the relative movement in real time so as to maintain a temperature of the plurality of vanes within predetermined limits.

9. The contamination trap arrangement of claim 6 , wherein the controllable relative movement is rotational.

10. The contamination trap arrangement of claim 6 , wherein the plurality of vanes are attached to an inside of a substantially cylindrical structure, and the heating arrangement, the gap and the cooling arrangement are arranged concentrically around an outside of the substantially cylindrical structure, and wherein the controllable relative movement is rotational.

11. A radiation source comprising:
a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma; and
a contamination trap comprising;
a plurality of vanes configured to trap debris particles;
a heating arrangement configured to heat the plurality of vanes, the heating arrangement being in thermal communication with the plurality of vanes;
a cooling arrangement configured to transport heat generated as a result of the plasma formation, away from the plurality of vanes; and
a gap between the heating arrangement and the cooling arrangement,
wherein the cooling arrangement is in thermal communication with the plurality of vanes via the heating arrangement and the gap.

12. A radiation source according to claim 11 , wherein the contamination trap further comprises a heat transfer adjustment configured to adjust heat transfer characteristics of a fluid inside of the gap by providing for controllable relative movement between surfaces defining the gap.

13. A lithographic apparatus, comprising:
a radiation source comprising;
a plurality of vanes configured to trap debris particles;
a heating arrangement configured to heat the plurality of vanes, the heating arrangement being in thermal communication with the plurality of vanes;
a cooling arrangement configured to transport heat generated as a result of the plasma formation, away from the plurality of vanes; and
a gap between the heating arrangement and the cooling arrangement,
wherein the cooling arrangement is in thermal communication with the plurality of vanes via the heating arrangement and the gap;

an illumination system configured to condition a radiation beam;
a support configured to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;
a substrate table configured to hold a substrate; and
a projection system configured to project the patterned radiation beam onto a target portion of the substrate.

Assignees

• Asml Netherlands Bv

Inventors

• Luijten Carlo Cornelis Maria

Classifications

• H05G2/0092

  Housing of the apparatus for producing X-rays; Environment inside the housing · CPC title

• H05G2/0094

  Reduction, prevention or protection from contamination; Cleaning · CPC title

• G03F7/70883

  of optical system · CPC title

• G03F7/70033

  by plasma extreme ultraviolet [EUV] sources · CPC title

• G03F7/70916 Primary

  Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps · CPC title