Plating bath composition and method for electroless plating of palladium

Patent metadata

Field	Value
Publication number	US-10385458-B2
Application number	US-201515523709-A
Country	US
Kind code	B2
Filing date	Dec 17, 2015
Priority date	Dec 17, 2014
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

The present invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the present invention comprises a source for palladium ions, a reducing agent for palladium ions and an aromatic compound. The aqueous plating bath composition has an increased deposition rate for palladium while maintaining bath stability. The aqueous plating bath composition has also a prolonged life time. The aromatic compounds of the present invention allow for adjusting the deposition rate to a constant range over the bath life time and for electrolessly depositing palladium layers at lower temperatures. The aromatic compounds of the present invention activate electroless palladium plating baths having a low deposition rate and reactivate aged electroless palladium plating baths.

First claim

The invention claimed is:

1. An aqueous plating bath composition for electroless deposition of palladium, comprising
(i) at least one source for palladium ions,
(ii) at least one reducing agent for palladium ions, and
(iii) at least one aromatic compound according to Formula (I)

wherein R1 is selected from the group consisting of —H, —CH 3 , and —CH 2 —CH 3 ; and
wherein R4 is selected from the group consisting of a substituted, linear C1 to C8 alkyl group; unsubstituted or substituted, branched C3 to C8 alkyl group; and an unsubstituted or substituted carbonyl group; and
wherein R2, R3, R5, and R6 are selected independently from each other from the group consisting of —H; unsubstituted or substituted, linear C1 to C20 alkyl group; unsubstituted or substituted, branched C3 to C20 alkyl group; —OH; —O—CH 3 ; —O—CH 2 —CH 3 ; and —CH 3 , and
wherein the unsubstituted or substituted carbonyl group of R4 is selected from moieties according to —(CR7R8) n -CO—(CR9R10) m -R11; wherein R7, R8, R9, R10 are selected independently of each other from —H, —CH 3 , —CH 2 —CH 3 , —OH, —O—CH 3 , —O—CH 2 —CH 3 ;
wherein R11 is selected from —CH 3 , —CH 2 —CH 3 , —O—CH 3 , —O—CH 2 —CH 3 , an unsubstituted or substituted phenyl group and an unsubstituted or substituted naphthyl group; and
wherein n, m are integers selected independently of each other from 0, 1 and 2, and
wherein the at least one aromatic compound according to Formula (I) has a concentration ranging from 0.01 to 50 mg/l.

2. The aqueous plating bath composition according to claim 1 , wherein the linear C1 to C8 alkyl groups, the linear C1 to C20 alkyl groups, the branched C3 to C8 alkyl groups or the branched C3 to C20 alkyl groups are substituted and the substituents are selected independently from each other from an unsubstituted or substituted phenyl group and an unsubstituted or substituted naphthyl group.

3. The aqueous plating bath composition according to claim 2 , wherein the phenyl group or the naphthyl group are substituted and the substituents are selected independently from each other from the group consisting of —OH, —O—CH 3 , —O—CH 2 —CH 3 , —CH 3 , and —CHO.

4. The aqueous plating bath composition according to claim 1 , wherein
R4 is selected from the group consisting of

and
wherein R2, R3, R5, and R6 are selected independently from each other from the group consisting of

—OH; —O—CH 3 ; and —O—CH 2 —CH 3 ; and
wherein R1 is selected from the group consisting of —H, —CH 3 , and —CH 2 —CH 3 .

5. The aqueous plating bath composition according to claim 1 , wherein the at least one aromatic compound according to Formula (I) has a concentration ranging from 0.01 to 20 mg/l.

6. The aqueous plating bath composition according to claim 1 , wherein the pH-value ranges from 4 to 7.

7. The aqueous plating bath composition according to claim 1 , wherein the at least one source for palladium ions is selected from the group comprising palladium chloride, palladium acetate, palladium sulfate, palladium perchlorate, dichloro ethane-1,2-diamine palladium, diacetato ethane-1,2-diamine palladium; dichloro N 1 -methylethane-1,2-diamine palladium; diacetato N 1 -methylethane-1,2-diamine; dichloro N 1 ,N 2 -dimethylethane-1,2-diamine; diacetato N 1 ,N 2 -dimethylethane-1,2-diamine; dichloro N 1 -ethylethane-1,2-diamine; diacetato N 1 -ethylethane-1,2-diamine, dichloro N 1 ,N 2 -diethylethane-1,2-diamine; and diacetato N 1 ,N 2 -diethylethane-1,2-diamine.

8. The aqueous plating bath composition according to claim 1 , further comprising at least one complexing agent for palladium ions selected from the group consisting of primary amines, secondary amines and tertiary amines.

9. The aqueous plating bath composition according to claim 1 , wherein the mole ratio of the complexing agent for palladium ions and palladium ions in the electroless plating bath ranges from 1:1 to 50:1.

10. The aqueous plating bath composition according to claim 1 , wherein the at least one reducing agent for palladium ions is selected from the group consisting of hydrazine, formaldehyde, formic acid, derivatives of the aforementioned and salts of formic acid.

11. The aqueous plating bath composition according to claim 10 , wherein the formic acid derivatives are selected from esters of formic acid.

12. The aqueous plating bath composition according to claim 1 , wherein the concentration of the at least one reducing agent ranges from 10 to 1000 mmol/l.

13. The aqueous plating bath composition according to claim 2 , wherein the at least one aromatic compound according to Formula (I) has a concentration ranging from 0.01 to 20 mg/l.

14. The aqueous plating bath composition according to claim 3 , wherein the at least one aromatic compound according to Formula (I) has a concentration ranging from 0.01 to 20 mg/l.

15. A method for electroless palladium plating comprising the steps of
(a) providing a substrate,
(b) contacting the substrate with the aqueous plating bath composition according to claim 1 and thereby depositing a layer of palladium onto at least a portion of the substrate.

16. The method for electroless palladium plating according to claim 15 wherein the substrate is contacted with the aqueous plating bath composition at a temperature of 30 to 65° C. in step (b).

Assignees

• Atotech Deutschland Gmbh

Inventors

• Walter Andreas
• Muskulus Katharina

Classifications

• C23C18/1617

  Purification and regeneration of coating baths · CPC title

• C23C18/44 Primary

  using reducing agents · CPC title

• C23C18/1651

  Two or more layers only obtained by electroless plating · CPC title