Thermal chamber exhaust structure and method

Patent metadata

Field	Value
Publication number	US-10366909-B2
Application number	US-201715694161-A
Country	US
Kind code	B2
Filing date	Sep 1, 2017
Priority date	Jul 27, 2017
Publication date	Jul 30, 2019
Grant date	Jul 30, 2019

Abstract

An exhaust structure includes an intake section including a first high thermal conductivity material, the intake section having an inlet, an output section including a second high thermal conductivity material, the output section having an outlet, and a piping section including a third high thermal conductivity material, the piping section being configured to communicatively couple the intake section with the output section. The exhaust structure provides a high thermal conductivity path from the inlet to the outlet, the high thermal conductivity path including the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material.

First claim

What is claimed is:

1. An exhaust structure comprising:
an intake section comprising a first high thermal conductivity material, the intake section including an inlet;
an output section comprising a second high thermal conductivity material, the output section including an outlet; and
a piping section comprising a third high thermal conductivity material, the piping section comprising a first inner diameter from the intake section to the output section, thereby being configured to communicatively couple the intake section with the output section,
wherein
the exhaust structure is configured to provide a high thermal conductivity path from the inlet to the outlet, the high thermal conductivity path comprising the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material,
the piping section and one of the intake section or the output section are separate components of the exhaust structure mechanically coupled to each other at a section interface, and
the one of the intake section or the output section has a second inner diameter at the section interface, the second diameter having a same value as a value of the first inner diameter.

2. The exhaust structure of claim 1 , wherein the exhaust structure is configured to have the first inner diameter and the second inner diameter included in a uniform inner diameter extending from a portion of the intake section to a portion of the output section.

3. The exhaust structure of claim 2 , wherein the uniform inner diameter has a value ranging from 19 mm to 21 mm.

4. The exhaust structure of claim 1 , wherein at least one of the first high thermal conductivity material, the second high thermal conductivity material, or the third high thermal conductivity material has a low emissivity coefficient.

5. The exhaust structure of claim 1 , wherein at least one of the first high thermal conductivity material, the second high thermal conductivity material, or the third high thermal conductivity material comprises aluminum.

6. The exhaust structure of claim 1 , wherein at least one of the first high thermal conductivity material, the second high thermal conductivity material, or the third high thermal conductivity material has thermal conductivity greater than 200 Watts per meter-Kelvin.

7. The exhaust structure of claim 1 , wherein each of the intake section, the piping section, and the output section comprises a smoothing layer along an inner surface, the smoothing layer comprising a smoothing material different from each of the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material.

8. The exhaust structure of claim 7 , wherein the smoothing material comprises Teflon doped with carbon or tungsten.

9. The exhaust structure of claim 1 , wherein the exhaust structure has a length ranging from 25 cm to 30 cm.

10. A thermal chamber system comprising:
a thermal chamber configured to contain a gas;
a hot plate positioned in the thermal chamber; and
an exhaust structure comprising:
an intake section comprising a first high thermal conductivity material, the intake section including an inlet mechanically coupled with the thermal chamber;
an output section comprising a second high thermal conductivity material, the output section including an outlet; and
a piping section comprising a third high thermal conductivity material, the piping section being configured to communicatively couple the intake section with the output section,

wherein the exhaust structure is configured to provide a high thermal conductivity path from the hot plate to the outlet, the high thermal conductivity path comprising:
a low thermal resistance path between the hot plate and the inlet, the low thermal resistance path comprising a portion of a volume of the gas contained in the thermal chamber; and
the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material.

11. The thermal chamber system of claim 10 , wherein the low thermal resistance path is configured to thermally couple the hot plate with the inlet by convection.

12. The thermal chamber system of claim 10 , further comprising a flow regulator configured to mechanically couple the inlet with the thermal chamber.

13. The thermal chamber system of claim 10 , wherein the exhaust structure is configured to have a uniform inner diameter extending from a portion of the intake section to a portion of the output section.

14. The thermal chamber system of claim 10 , wherein at least one of the first high thermal conductivity material, the second high thermal conductivity material, or the third high thermal conductivity material has a low emissivity coefficient.

15. The thermal chamber system of claim 10 , wherein at least one of the first high thermal conductivity material, the second high thermal conductivity material, or the third high thermal conductivity material comprises aluminum.

16. The thermal chamber system of claim 10 , wherein at least one of the first high thermal conductivity material, the second high thermal conductivity material, or the third high thermal conductivity material has thermal conductivity greater than 200 Watts per meter-Kelvin.

17. The thermal chamber system of claim 10 , wherein each of the intake section, the piping section, and the output section comprises a smoothing layer along an inner surface, the smoothing layer comprising a smoothing material different from each of the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material.

18. A method of exhausting a vapor, the method comprising:
generating the vapor by using a hot plate to heat a substrate comprising a bottom anti-reflective coating (BARC);
heating an inlet of an exhaust structure;
conducting heat from the inlet to an outlet of the exhaust structure using a first material having a high thermal conductivity;
transporting the vapor from the inlet to the outlet; and
expelling the vapor through the outlet.

19. The method of claim 18 , wherein
the exhaust structure is mechanically coupled with a thermal chamber comprising the hot plate, and
the heating the inlet of the exhaust structure comprises transferring heat from the hot plate to the inlet by convection.

20. The method of claim 18 , wherein the transporting the vapor from the inlet to the outlet comprises transporting the vapor along a smoothing layer comprising Teflon doped with carbon or tungsten.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hsieh Hsien-Chang
• Lin Chun-Chih
• Shih Tah-Te
• Wu Wen-Hsong
• Yang Chune-Te
• Su Yu-Jen

Classifications

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• F23J2900/13001

  Preventing or reducing corrosion in chimneys · CPC title

• F23J13/02

  Linings; Jackets; Casings · CPC title