Waveguide structure
US-2016349546-A1 · Dec 1, 2016 · US
US10359653B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10359653-B2 |
| Application number | US-201715840602-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 13, 2017 |
| Priority date | Dec 14, 2016 |
| Publication date | Jul 23, 2019 |
| Grant date | Jul 23, 2019 |
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A thin-plate LN optical control device includes: a thin-plate LN optical waveguide element which includes an optical waveguide formed by thermal diffusion of Ti in a substrate made of lithium niobate, and a control electrode that is formed on the substrate and is configured to control a light wave propagating through the optical waveguide, and in which at least a part of the substrate is thinned; and a housing that accommodates the thin-plate LN optical waveguide element in an air-tight sealing manner. Oxygen is contained in a filler gas inside the housing.
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What is claimed is: 1. A thin-plate LN optical control device comprising: a thin-plate LN optical waveguide element which includes an optical waveguide formed by thermal diffusion of Ti, and a control electrode configured to control a light wave propagating through the optical waveguide in a substrate made of lithium niobate, and in which at least a part of the substrate is thinned; and a housing that accommodates the thin-plate LN optical waveguide element in an air-tight sealing manner, wherein the substrate is thinned by mechanical processing, the thickness of the substrate is 10 μm or less, and oxygen is contained in a filler gas inside the housing. 2. The thin-plate LN optical control device according to claim 1 , wherein a molar concentration of oxygen in the filler gas is 3% or greater. 3. The thin-plate LN optical control device according to claim 1 , wherein in the thin-plate LN optical waveguide element, a ridge is formed in a front surface or a back surface of the substrate. 4. The thin-plate LN optical control device according to claim 1 , wherein the filler gas does not container moisture.
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