Waveguide structure
US-2016349546-A1 · Dec 1, 2016 · US
US9244296B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9244296-B2 |
| Application number | US-201414528183-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 30, 2014 |
| Priority date | Nov 15, 2013 |
| Publication date | Jan 26, 2016 |
| Grant date | Jan 26, 2016 |
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An optical modulator includes a single-crystal substrate, a lithium niobate film formed on a main surface of the single-crystal substrate, the lithium niobate film being an epitaxial film and having a ridge, a buffer layer formed on the ridge, a first electrode formed on the buffer layer, and a second electrode separated from the first electrode, the second electrode being in contact with the lithium niobate film.
Opening claim text (preview).
What is claimed is: 1. An optical modulator, comprising: a single-crystal substrate; a lithium niobate film formed on a main surface of the single-crystal substrate, the lithium niobate film being an epitaxial film and having a ridge; a buffer layer formed on the ridge; a first electrode formed on the buffer layer; and a second electrode separated from the first electrode, the second electrode being in contact with the lithium niobate film. 2. The optical modulator according to claim 1 , wherein the buffer layer is separated from the second electrode. 3. The optical modulator according to claim 2 , further comprising a dielectric layer in contact with a side surface of the buffer layer and a side surface of the ridge, the dielectric layer having a lower relative dielectric constant than the buffer layer. 4. The optical modulator according to claim 3 , wherein the second electrode is separated from the dielectric layer. 5. The optical modulator according to claim 4 , wherein the first electrode is in contact with the dielectric layer. 6. The optical modulator according to claim 5 , wherein the buffer layer has a relative dielectric constant of 6 or more, and the dielectric layer has a relative dielectric constant of 5 or less. 7. The optical modulator according to claim 6 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 8. The optical modulator according to claim 5 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 9. The optical modulator according to claim 4 , wherein the buffer layer has a relative dielectric constant of 6 or more, and the dielectric layer has a relative dielectric constant of 5 or less. 10. The optical modulator according to claim 9 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 11. The optical modulator according to claim 4 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 12. The optical modulator according to claim 3 , wherein the first electrode is in contact with the dielectric layer. 13. The optical modulator according to claim 12 , wherein the buffer layer has a relative dielectric constant of 6 or more, and the dielectric layer has a relative dielectric constant of 5 or less. 14. The optical modulator according to claim 13 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 15. The optical modulator according to claim 12 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 16. The optical modulator according to claim 3 , wherein the buffer layer has a relative dielectric constant of 6 or more, and the dielectric layer has a relative dielectric constant of 5 or less. 17. The optical modulator according to claim 16 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 18. The optical modulator according to claim 3 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 19. The optical modulator according to claim 2 , wherein the second electrode is in contact with a side surface of the lithium niobate film. 20. The optical modulator according to claim 1 , wherein the second electrode is in contact with a side surface of the lithium niobate film.
in an optical waveguide structure · CPC title
buffer layer · CPC title
Electrodes · CPC title
in an optical waveguide structure · CPC title
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