Ring modulators with low-loss and large free spectral range (fsr) on a silicon-on-insulator (soi) platform
US-2024369864-A1 · Nov 7, 2024 · US
US2016291351A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016291351-A1 |
| Application number | US-201615082003-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 28, 2016 |
| Priority date | Mar 31, 2015 |
| Publication date | Oct 6, 2016 |
| Grant date | — |
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[Task] Reduction in crosstalk between signal electrodes. [Means for Resolution] An optical modulator 1 includes a relay substrate 3 including a substrate portion 30 , and signal electrodes 31 and 32 , and a ground electrode 33 which are provided on the substrate portion 30 , and an optical waveguide substrate 4 including an electrode-optical substrate 40 , signal electrodes 431 and 432 , and an optical waveguide 42 which are provided on the electro-optical substrate 40 . Modulation signals are input from ends 31 a and 32 a on one side of the signal electrodes 31 and 32 , the other end 31 b of the signal electrode 31 is electrically connected to the signal electrode 431 , the other end 32 b of the signal electrode 32 is electrically connected to the signal electrode 432 , an optical wave, which propagates through the optical waveguide 42 , is modulated by the modulation signals which propagate through the signal electrodes 431 and 432 , the ground electrode 33 is provided between the signal electrodes 31 and 32 , and the relay substrate 3 includes a first adjacent portion 44 at which the signal electrodes 31 and 32 are adjacent to each other, and a through-hole 30 g that is provided in the ground electrode 33 at the first adjacent portion 44.
Opening claim text (preview).
1 . An optical device, comprising: a relay substrate including a substrate portion, and a first signal electrode, a second signal electrode, and a ground electrode which are provided to the substrate portion; and an optical waveguide substrate including an electrode-optical substrate having an electro-optic effect, a third signal electrode, a fourth signal electrode, and an optical waveguide which are provided on the electro-optical substrate, wherein modulation signals are input from one end of the first signal electrode and one end of the second signal electrode, respectively, the other end of the first signal electrode is electrically connected to the third signal electrode, the other end of the second signal electrode is electrically connected to the fourth signal electrode, an optical wave, which propagates through the optical waveguide, is modulated by the modulation signals which propagate through the third signal electrode and the fourth signal electrode, the ground electrode is provided between the first signal electrode and the second signal electrode, and the relay substrate includes an adjacent portion at which the first signal electrode and the second signal electrode are adjacent to each other, and an aperture that is provided in the ground electrode at the adjacent portion. 2 . The optical device according to claim 1 , wherein the adjacent portion is located in the vicinity of a position at which the first signal electrode is electrically connected to the third signal electrode, and the second signal electrode is electrically connected to the fourth signal electrode. 3 . The optical device according to claim 1 , wherein the ground electrode includes two branched ground electrodes, one of the two branched ground electrodes is disposed along the first signal electrode, and the other of the two branched ground electrodes is disposed along the second signal electrode. 4 . The optical device according to claim 3 , wherein the branched ground electrodes include another aperture. 5 . The optical device according to claim 1 , wherein a distance between the first signal electrode and the second signal electrode at the adjacent portion is 300 μm to 1000 μm. 6 . The optical device according to claim 1 , wherein a distance between the other end of the first signal electrode and the other end of the second signal electrode is shorter than a distance between the one end of the first signal electrode and the one end of the second signal electrode. 7 . The optical device according to claim 1 , wherein the aperture extends along a direction in which at least one of the first signal electrode and the second signal electrode, which are disposed on both sides of the aperture, extends. 8 . The optical device according to claim 1 , wherein the aperture is a recess formed by digging into the relay substrate, or a through-hole that passes through the relay substrate. 9 . The optical device according to claim 8 , further comprising: a low dielectric constant portion that is provided in the recess or the through-hole, wherein the low dielectric constant portion has a dielectric constant lower than a dielectric constant of the substrate portion. 10 . The optical device according to claim 1 , wherein the optical waveguide substrate and the relay substrate further include one or more signal electrodes. 11 . The optical device according to claim 1 , wherein the aperture is disposed in a straight line connecting the one end of the first signal electrode and the other end of the first signal electrode, or in a straight line connecting the one end of the first signal electrode and the other end of the second signal electrode.
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controlled by a high-frequency electromagnetic wave component in an electric waveguide structure · CPC title
controlled by a high-frequency electromagnetic component in an electric waveguide structure · CPC title
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