Magnetoresistive stack and method of fabricating same

Patent metadata

Field	Value
Publication number	US-10347828-B2
Application number	US-201816230031-A
Country	US
Kind code	B2
Filing date	Dec 21, 2018
Priority date	Jun 10, 2011
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

A magnetoresistive element (e.g., a spin-torque magnetoresistive memory element) includes a fixed magnetic layer, a free magnetic layer, having a high-iron alloy interface region located along a surface of the free magnetic layer, wherein the high-iron alloy interface region has at least 50% iron by atomic composition, and a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer. The magnetoresistive element further includes a second dielectric, having a first surface that is in contact with the surface of the free magnetic layer, and an electrode, disposed between the second dielectric and a conductor. The electrode includes: (i) a non-ferromagnetic portion having a surface that is in contact with a second surface of the second dielectric, and (ii) a second portion having at least one ferromagnetic material disposed between the non-ferromagnetic portion of the electrode and the conductor.

First claim

What is claimed is:

1. A magnetoresistive memory element, comprising:
a free magnetic layer having a first side and a second side;
a first fixed magnetic layer positioned on the first side of the free magnetic layer;
a second fixed magnetic layer positioned on the second side of the free magnetic layer;
a first intermediate layer positioned between, and in contact with, the first fixed magnetic layer and the first side of the free magnetic layer; and
a second intermediate layer positioned between, and in contact with, the second fixed magnetic layer and the second side of the free magnetic layer;
wherein an interface region of the free magnetic layer on the second side has a higher iron content than an interface region of the free magnetic layer on the first side.

2. The magnetoresistive memory element of claim 1 , wherein the interface region of the free magnetic layer on the second side has an iron content of greater than 20 percent by atomic composition, and the interface region of the free magnetic layer on the first side has an iron content of less than 20 percent by atomic composition.

3. The magnetoresistive memory element of claim 1 , wherein the interface region of the free magnetic layer on the second side has an iron content of greater than 20 percent by atomic composition, and the interface region of the free magnetic layer on the first side has an iron content of approximately five percent by atomic composition.

4. The magnetoresistive memory element of claim 1 , wherein the interface region of the free magnetic layer on the second side has an iron content of greater than 50 percent by atomic composition.

5. The magnetoresistive memory element of claim 1 , wherein the interface region of the free magnetic layer on the second side has an iron content of greater than 20 percent by atomic composition and a boron content of between 14 percent and 20 percent by atomic composition, and the interface region of the free magnetic layer on the first side has an iron content of less than 20 percent by atomic composition and a boron content of greater than 20 percent by atomic composition.

6. The magnetoresistive memory element of claim 1 , wherein the interface region of the free magnetic layer on the second side has an iron content of greater than 20 percent by atomic composition and a boron content of between 14 percent and 20 percent by atomic composition, and the interface region of the free magnetic layer on the first side has an iron content of approximately 5 percent by atomic composition and a boron content of approximately 25 percent by atomic composition.

7. The magnetoresistive memory element of claim 1 , wherein at least one of the first fixed magnetic layer and the second fixed magnetic layer includes a synthetic antiferromagnetic structure.

8. The magnetoresistive memory element of claim 1 , wherein each of the first fixed magnetic layer and the second fixed magnetic layer includes a synthetic antiferromagnetic structure.

9. The magnetoresistive memory element of claim 1 , wherein the first intermediate layer and the second intermediate layer include MgO.

10. The magnetoresistive memory element of claim 1 , wherein the free magnetic layer includes two ferromagnetic layers coupled together by a layer of a non-ferromagnetic transition metal.

11. A magnetoresistive memory element, comprising:
a free magnetic layer including:
a first ferromagnetic layer having a first surface and a second surface;
a second ferromagnetic layer having a third surface and a fourth surface, wherein a region of the second ferromagnetic layer that includes the fourth surface has a higher iron content than a region of the first ferromagnetic layer that includes the first surface;
an insertion layer in contact with the second surface of the first ferromagnetic layer and the third surface of the second ferromagnetic layer, wherein the insertion layer includes a non-ferromagnetic transition metal;

a first fixed magnetic layer positioned on one side of the free magnetic layer;
a second fixed magnetic layer positioned on an opposite side of the free magnetic layer;
a first intermediate layer in contact with the first fixed magnetic layer and the first surface of the first ferromagnetic layer; and
a second intermediate layer in contact with the second fixed magnetic layer and the fourth surface of the second ferromagnetic layer.

12. The magnetoresistive memory element of claim 11 , wherein the region of the second ferromagnetic layer that includes the fourth surface has an iron content of greater than 20 percent by atomic composition, and the region of the first ferromagnetic layer that includes the first surface has an iron content of less than 20 percent by atomic composition.

13. The magnetoresistive memory element of claim 11 , wherein the region of the second ferromagnetic layer that includes the fourth surface has an iron content of greater than 20 percent by atomic composition, and the region of the first ferromagnetic layer that includes the first surface has an iron content of approximately five percent by atomic composition.

14. The magnetoresistive memory element of claim 11 , wherein the region of the second ferromagnetic layer that includes the fourth surface has an iron content of greater than 50 percent by atomic composition.

15. The magnetoresistive memory element of claim 11 , wherein the region of the second ferromagnetic layer that includes the fourth surface has an iron content of greater than 20 percent by atomic composition and a boron content of between 14 percent and 20 percent by atomic composition, and the region of the first ferromagnetic layer that includes the first surface has an iron content of less than 20 percent by atomic composition and a boron content of greater than 20 by atomic composition.

16. The magnetoresistive memory element of claim 11 , wherein the region of the second ferromagnetic layer that includes the fourth surface has an iron content of greater than 20 percent by atomic composition and a boron content of between 14 percent and 20 percent by atomic composition, and the region of the first ferromagnetic layer that includes the first surface has an iron content of approximately 5 percent by atomic composition and a boron content of approximately 25 percent by atomic composition.

17. The magnetoresistive memory element of claim 11 , wherein at least one of the first fixed magnetic layer and the second fixed magnetic layer includes a synthetic antiferromagnetic structure.

18. The magnetoresistive memory element of claim 11 , wherein each of the first fixed magnetic layer and the second fixed magnetic layer include a synthetic antiferromagnetic structure.

19. The magnetoresistive memory element of claim 11 , wherein the insertion layer includes one of tantalum (Ta), ruthenium (Ru), vanadium (Va), zirconium (Zr), titanium (Ti), niobium (Nb), molybdenum (Mo), tungsten (W), hafnium (Hf), manganese (Mn), or chromium (Cr).

20. The magnetoresistive memory element of claim 11 , wherein the insertion layer includes a thickness less 3.5 Angstroms.

Assignees

• Everspin Technologies Inc

Inventors

• Whig Renu
• Sun Jijun
• Rizzo Nicholas
• Slaughter Jon
• Houssameddine Dimitri
• Mancoff Frederick

Classifications

• G11C11/161 Primary

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title

• H01L43/12 Primary

  Electricity · mapped topic

• H01L43/08

  Electricity · mapped topic

• H01L43/10

  Electricity · mapped topic

• H01L43/02

  Electricity · mapped topic