Magnetoresistive memory element and method of fabricating same

Patent metadata

Field	Value
Publication number	US-9419208-B2
Application number	US-201615046483-A
Country	US
Kind code	B2
Filing date	Feb 18, 2016
Priority date	Jun 10, 2011
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

A magnetoresistive memory element (e.g., a spin-torque magnetoresistive memory element) includes a fixed magnetic layer, a free magnetic layer having perpendicular magnetic anisotropy, and a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer. A first surface of the first dielectric is in contact with a first surface of the free magnetic layer. The magnetoresistive memory element further includes a second dielectric, having a first surface that is in contact with a second surface of the free magnetic layer, a conductor, including electrically conductive material, and an electrode, disposed between the second dielectric and the conductor. The electrode includes: (i) a non-ferromagnetic portion having a surface that is in contact with a second surface of the second dielectric, and (ii) a second portion including at least one ferromagnetic material disposed between the non-ferromagnetic portion of the electrode and the conductor.

First claim

What is claimed is:

1. A magnetoresistive memory element, comprising:
a fixed magnetic layer;
a free magnetic layer, having a first surface and a second surface, wherein the free magnetic layer includes perpendicular magnetic anisotropy;
a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer, and having a first surface that is in contact with the first surface of the free magnetic layer;
a second dielectric, having a first surface and a second surface, wherein the first surface of the second dielectric is in contact with the second surface of the free magnetic layer;
a conductor including electrically conductive material;
an electrode, disposed between the second dielectric and the conductor, wherein the electrode includes:
a non-ferromagnetic portion having a surface that is in contact with the second surface of the second dielectric, and
a second portion, including at least one ferromagnetic material, disposed between the non-ferromagnetic portion of the electrode and the conductor.

2. The magnetoresistive memory element of claim 1 , wherein the non-ferromagnetic portion of the electrode includes at least one of ruthenium, tantalum, titanium, tungsten, molybdenum, and manganese.

3. The magnetoresistive memory element of claim 2 , wherein the at least one ferromagnetic material of the second portion of the electrode includes at least one of cobalt and iron.

4. The magnetoresistive memory element of claim 2 , wherein the second portion of the electrode is an alloy including (i) boron and (ii) at least one of cobalt and iron.

5. The magnetoresistive memory element of claim 1 , wherein the non-ferromagnetic portion of the electrode is ruthenium or tantalum.

6. The magnetoresistive memory element of claim 5 , wherein the second portion of the electrode is an alloy including (i) boron and (ii) at least one of cobalt and iron.

7. The magnetoresistive memory element of claim 5 , wherein the second portion of the electrode (a) is an alloy including (i) boron and (ii) at least one of cobalt and iron, and (b) includes a thickness of less than 15 angstroms.

8. A magnetoresistive memory element, comprising:
a fixed magnetic layer;
a free magnetic layer, having a first surface and a second surface, wherein the free magnetic layer includes perpendicular magnetic anisotropy;
a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer, and having a first surface that is in contact with the first surface of the free magnetic layer;
a second dielectric, having a first surface and a second surface, wherein the first surface of the second dielectric is in contact with the second surface of the free magnetic layer;
a conductor including electrically conductive material;
an electrode, disposed between the second dielectric and the conductor, wherein the electrode includes:
a non-ferromagnetic portion having a surface that is in contact with the second surface of the second dielectric, and
a diffusion resistant amorphous layer, including ferromagnetic material, disposed between the non-ferromagnetic portion of the electrode and the conductor.

9. The magnetoresistive memory element of claim 8 , wherein the diffusion resistant amorphous layer includes (i) boron and (ii) at least one of cobalt and iron.

10. The magnetoresistive memory element of claim 8 , wherein the diffusion resistant amorphous layer includes an alloy including (i) boron and (ii) at least one of cobalt and iron.

11. The magnetoresistive memory element of claim 8 , wherein the diffusion resistant amorphous layer is an alloy including (i) boron and (ii) at least one of cobalt and iron.

12. The magnetoresistive memory element of claim 8 , wherein:
the diffusion resistant amorphous layer includes an alloy including (i) boron and (ii) at least one of cobalt and iron, and
the non-ferromagnetic portion of the electrode includes at least one of ruthenium, tantalum, titanium, molybdenum, and manganese.

13. The magnetoresistive memory element of claim 8 , wherein the diffusion resistant amorphous layer includes a thickness of less than 15 angstroms.

14. A magnetoresistive memory element, comprising:
a fixed magnetic layer;
a free magnetic layer, having a first surface and a second surface, wherein the free magnetic layer includes perpendicular magnetic anisotropy;
a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer, and having a first surface that is in contact with the first surface of the free magnetic layer;
a second dielectric, having a first surface and a second surface, wherein the first surface of the second dielectric is in contact with the second surface of the free magnetic layer;
a conductor including electrically conductive material;
an electrode, disposed between the second dielectric and the conductor, wherein the electrode includes:
a non-ferromagnetic portion having a surface that is in contact with the second surface of the second dielectric.

15. The magnetoresistive memory element of claim 14 , wherein the non-ferromagnetic portion of the electrode includes:
an alloy, including at least one of cobalt and iron, that is in contact with the second surface of the second dielectric, and
a ferromagnetism suppression material in contact with the alloy.

16. The magnetoresistive memory element of claim 14 , wherein the non-ferromagnetic portion of the electrode includes:
an alloy, including at least one of cobalt and iron, that is in contact with the second surface of the second dielectric, and
a ferromagnetism suppression material, in contact with the alloy, including one or more of tantalum, titanium, vanadium, niobium, zirconium, tungsten, hafnium, chromium, ruthenium, molybdenum and manganese.

17. The magnetoresistive memory element of claim 14 , wherein the non-ferromagnetic portion of the electrode is an alloy including:
(i) at least one of cobalt and iron, and
(ii) one or more of boron, carbon, tantalum, titanium, vanadium, niobium, zirconium, tungsten, hafnium, chromium, molybdenum and manganese.

18. The magnetoresistive memory element of claim 14 , wherein:
the non-ferromagnetic portion of the electrode is in contact with the second surface of the second dielectric and includes:
(i) at least one of cobalt and iron,
(ii) boron, and
(iii) a ferromagnetism suppression material.

19. The magnetoresistive memory element of claim 18 , wherein the ferromagnetism suppression material includes one or more of tantalum, titanium, vanadium, niobium, zirconium, tungsten, hafnium, chromium, ruthenium, molybdenum and manganese.

Assignees

• Everspin Technologies Inc

Inventors

• Whig Renu
• Sun Jijun
• Rizzo Nicholas
• Slaughter Jon
• Houssameddine Dimitri
• Mancoff Frederick

Classifications

• G11C11/161 Primary

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title

• H01L43/10

  Electricity · mapped topic

• H01L43/02

  Electricity · mapped topic

• H01L43/08 Primary

  Electricity · mapped topic

• H10N50/85

  Materials of the active region · CPC title