Scanning microscope with controlled variable measurement parameters

Patent metadata

Field	Value
Publication number	US-10338367-B2
Application number	US-201715692418-A
Country	US
Kind code	B2
Filing date	Aug 31, 2017
Priority date	Sep 2, 2016
Publication date	Jul 2, 2019
Grant date	Jul 2, 2019

Abstract

A scanning microscope includes: a charged particle beam source configured to output a charged particle beam to be emitted to a sample; a detector configured to detect charged particles from the sample; and a controller configured to control the charged particle beam source and the detector, wherein the controller changes one or more variable parameters to determine a plurality of different parameter value sets, acquires a measurement result of a temporal change of absorption current in a target sample material under each of the plurality of different parameter value sets, and, based on the measurement results, selects a parameter value set for use in measurement of the target sample from the plurality of different parameter value sets.

First claim

What is claimed is:

1. A scanning microscope comprising:
a charged particle beam source configured to output a charged particle beam to be emitted to a sample;
a detector configured to detect charged particles from the sample; and
a controller configured to control the charged particle beam source and the detector, wherein
the controller changes one or more variable parameters to determine a plurality of different parameter value sets, acquires a measurement result of a temporal change of absorption current in a target sample material under each of the plurality of different parameter value sets, and, based on the measurement results, selects a parameter value set for use in measurement of a target sample from the plurality of different parameter value sets.

2. The scanning microscope according to claim 1 , wherein:
in accordance with user input, the controller selects the one or more variable parameters from a plurality of variable parameters, changes the one or more variable parameters, fixes parameters other than the one or more variable parameters, and generates the plurality of different parameter value sets.

3. The scanning microscope according to claim 2 , wherein:
the plurality of variable parameters include magnification, scan speed, acceleration voltage, and probe current.

4. The scanning microscope according to claim 1 , wherein:
the controller measures a temporal change of absorption current in the target sample under each of the plurality of different parameter value sets and acquires measurement results of the temporal change of the absorption current in the target sample material.

5. The scanning microscope according to claim 1 , further comprising:
a database configured to store measurement data of absorption current under the plurality of parameter value sets, wherein
the controller acquires a measurement result of a temporal change of absorption current in the target sample material under a parameter value set included in the plurality of different parameter value sets.

6. The scanning microscope according to claim 1 , further comprising:
a database configured to store measurement data of absorption current under the plurality of parameter value sets, wherein,
in a case in which the database stores a measurement result of a temporal change of absorption current in the target sample material under a parameter value set included in the plurality of different parameter value sets, the controller acquires the measurement result from the database, and,
in a case in which the database does not store a measurement result of a temporal change of absorption current in the target sample material under a parameter value set, the controller measures a temporal change of absorption current in the target sample under the parameter value set.

7. The scanning microscope according to claim 5 , wherein:
the controller stores the measurement result of the temporal change of the absorption current in the target sample in the database.

8. The scanning microscope according to claim 1 , wherein:
the controller selects the parameter value set for use based on a changing amount of the absorption current in the target sample material under each of the plurality of different parameter value sets.

9. The scanning microscope according to claim 8 , wherein:
the controller determines the changing amount of the absorption current based on a maximum value and a minimum value in the temporal change of the absorption current.

10. The scanning microscope according to claim 1 , wherein:
the one or more variable parameters include a first variable parameter, and
the controller determines a changing amount of the absorption current in the target sample material under each of different values of the first variable parameter and selects a parameter value set including a value of the first variable parameter the changing amount of which is the smallest as the parameter value set for use in measurement of the target sample.

11. The scanning microscope according to claim 1 , wherein:
the one or more variable parameters include scan speed, and
the controller selects a parameter value set in which a value of the scan speed is time representing a minimum value of an absorption current amount in a temporal change of absorption current in the target sample material as the parameter value set for use in measurement of the target sample.

12. A method for determining a parameter value set in a scanning microscope, the scanning microscope including a charged particle beam source configured to output a charged particle beam to be emitted to a sample, and a detector configured to detect charged particles from the sample, the method comprising:
changing one or more variable parameters to determine a plurality of different parameter value sets;
acquiring a measurement result of a temporal change of absorption current in a target sample material under each of the plurality of different parameter value sets; and
based on the measurement result, selecting a parameter value set for use in measurement of a target sample from the plurality of different parameter value sets.

Assignees

• Hitachi Ltd

Inventors

• Araki Ryoko
• Kim Hyejin
• Bizen Daisuke

Classifications

• G02B21/0036

  Scanning details, e.g. scanning stages · CPC title

• H01J2237/244

  Detection characterized by the detecting means · CPC title

• G02B21/0032

  Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title

• H01J37/263 Primary

  Contrast, resolution or power of penetration · CPC title

• H01J37/261 Primary

  Details · CPC title