High pressure ammonia nitridation of tunnel oxide for 3dnand applications
US-2017349996-A1 · Dec 7, 2017 · US
US10329665B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10329665-B2 |
| Application number | US-201615379296-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 14, 2016 |
| Priority date | Oct 24, 2016 |
| Publication date | Jun 25, 2019 |
| Grant date | Jun 25, 2019 |
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A fuel cell separator includes a metal substrate having a surface; an ion penetration layer including carbon diffusion-inhibiting ions extending from the surface of the metal substrate into the metal substrate; and a carbon coating layer disposed on the surface of the metal substrate.
Opening claim text (preview).
What is claimed is: 1. A fuel cell separator, comprising a metal substrate having a surface; an ion penetration layer including carbon diffusion-inhibiting ions extending from the surface of the metal substrate into the metal substrate; and a carbon coating layer disposed on the surface of the metal substrate; wherein the ion penetration layer includes from 5 wt % to 30 wt % of the carbon diffusion-inhibiting ion and from 5 wt % to 85 wt % of carbon. 2. The fuel cell separator of claim 1 , wherein the carbon diffusion-inhibiting ions of the ion penetration layer are interposed between metal atoms in the metal substrate. 3. The fuel cell separator of claim 1 , wherein the carbon diffusion-inhibiting ion is a nitrogen ion or a boron ion. 4. The fuel cell separator of claim 1 , wherein the ion penetration layer has a thickness of from about 30 nm to about 300 nm. 5. The fuel cell separator of claim 1 , wherein the carbon coating layer has a thickness of from 10 nm to 1000 nm. 6. The fuel cell separator of claim 1 , wherein the carbon coating layer has a density of from 2.0 g/cm 3 to 3.0 g/cm 3 .
using ionised gases, e.g. ionitriding · CPC title
Irradiation with laser or particle beam · CPC title
in the form of layered or coated products · CPC title
using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title
Deposition of carbon only · CPC title
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